Plating apparatus and plating method

Patent metadata

Field	Value
Publication number	US-9388504-B2
Application number	US-201414223972-A
Country	US
Kind code	B2
Filing date	Mar 24, 2014
Priority date	Mar 26, 2013
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

A plating apparatus includes a processing bath configured to store a processing liquid therein, a transporter configured to immerse a substrate holder, holding a substrate, in the processing liquid, raise the substrate holder out of the processing bath, and transport the substrate holder in a horizontal direction, and a gas flow generator configured to generate a clean gas flow forward of the substrate with respect to a direction in which the substrate holder is transported. The transporter moves the gas flow generator together with the substrate holder in the horizontal direction while transporting the substrate holder in the horizontal direction.

First claim

What is claimed is:

1. A plating apparatus, comprising:
a processing bath configured to store a processing liquid therein;
a substrate holder comprising a sealing member configured to hold a substrate with the sealing member, the sealing member configured to press the substrate and to seal at least a portion of the substrate from contacting the processing liquid;
a transporter configured to immerse the substrate holder comprising the sealing member in the processing liquid stored in the processing bath, raise the substrate holder comprising the sealing member out of the processing bath, and transport the substrate holder comprising the sealing member in a horizontal direction;
a suction mechanism configured to suck the processing liquid remaining on the substrate held by the substrate holder; and
a moving mechanism configured to move the suction mechanism relative to the substrate holder,
the suction mechanism being mounted to the moving mechanism, the moving mechanism being mounted to the transporter, and the transporter being configured to move the suction mechanism and the moving mechanism together with the substrate holder comprising the sealing member in the horizontal direction while transporting the substrate holder comprising the sealing member in the horizontal direction.

2. The plating apparatus according to claim 1 , wherein the moving mechanism includes an X-axis actuator configured to move the suction mechanism closer to and away from the substrate held by the substrate holder.

3. The plating apparatus according to claim 2 , wherein:
the suction mechanism includes
a first suction mechanism configured to suck the processing liquid remaining on the sealing member and the substrate, and
a second suction mechanism configured to suck the processing liquid remaining on a surface of the substrate; and

the X-axis actuator includes
a first X-axis actuator configured to move the first suction mechanism closer to and away from the substrate held by the substrate holder, and
a second X-axis actuator configured to move the second suction mechanism closer to and away from the substrate held by the substrate holder.

4. The plating apparatus according to claim 3 , wherein the moving mechanism further includes
a Y-axis actuator configured to move the suction mechanism in the horizontal direction parallel to the substrate held by the substrate holder, and
a Z-axis actuator configured to move the suction mechanism in a vertical direction.

5. The plating apparatus according to claim 4 , wherein each of the Y-axis actuator and the Z-axis actuator comprises an electric actuator capable of moving the suction mechanism along a preset path.

6. The plating apparatus according to claim 3 , wherein the first suction mechanism includes a single suction nozzle.

Assignees

• Ebara Corp

Inventors

• Hirao Tomonori

Classifications

• C23C18/1628

  Specific elements or parts of the apparatus · CPC title

• C25D17/001

  Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells · CPC title

• C25D21/04

  Removal of gases or vapours {; Gas or pressure control} · CPC title

• B65G45/10

  Cleaning devices (adaptations of roller sleeves for cleaning belts B65G39/073) · CPC title

• C23C18/1675

  Process conditions · CPC title