Electrochemical liquid-liquid-solid deposition processes for production of group IV semiconductor materials

Patent metadata

Field	Value
Publication number	US-9388498-B2
Application number	US-201214234084-A
Country	US
Kind code	B2
Filing date	Jul 20, 2012
Priority date	Jul 22, 2011
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

An electrochemical liquid-liquid-solid (LLS) process that produces unlimited amounts of crystalline semiconductor, such as Ge or Si, from aqueous or polar solutions with tunable nanostructured shapes without any physical or chemical templating agent is presented. Dissolution into, saturation within, and precipitation of the semiconductor from a liquid electrode (e.g., Hg pool) or near an electrode comprising metallic nanoparticles (e.g., In nanoparticles) yields a polycrystalline semiconductor material, as deposited. Such a process can be conducted at conditions, in a single step, and under electrochemical control, while affording control over formation of a variety of material morphologies. Materials formed by such processes are also provided.

First claim

What is claimed is:

1. A method comprising:
contacting a liquid electrolyte with a first liquid electrode, wherein the first liquid electrode is in electrical communication with a second electrode having a second opposite polarity from the first liquid electrode, wherein the liquid electrolyte is formed by combining water and an oxide compound of a semiconductor element selected from the group consisting of: silicon, germanium, and combinations thereof, and wherein the first liquid electrode comprises a metal selected from the group consisting of: mercury, gallium, indium, zinc, cadmium, combinations and alloys thereof; and
generating a precipitated crystalline solid material comprising the semiconductor element by applying an electric potential to the first liquid electrode in contact with the electrolyte to drive an electrochemical reduction reaction that forms a solid material comprising the semiconductor element by precipitation out of solution at or within the first liquid electrode.

2. The method of claim 1 , wherein the solid material is crystalline and comprises silicon and the first liquid electrode comprises a material that is inactive with respect to any parasitic electrolyte decomposition electrochemical reaction in the presence of the semiconductor element.

3. The method of claim 2 , wherein the oxide compound comprises silicon dioxide (SiO 2 ) and the first liquid electrode comprises mercury or indium, so as to form the crystalline solid material.

4. The method of claim 1 , wherein the solid material comprises silicon and the generating occurs by dissolving the silicon into the first liquid electrode, followed by saturating the first liquid electrode with the dissolved silicon, and then precipitating the silicon from the first liquid electrode.

5. The method of claim 1 , wherein the solid material comprises germanium and the first liquid electrode comprises a material that is inactive with respect to any parasitic electrolyte decomposition electrochemical reaction in the presence of the semiconductor element, so that the generating occurs by dissolving the germanium in the first liquid electrode, followed by saturating the first liquid electrode with the dissolved germanium, and then precipitating the germanium from the first liquid electrode.

6. The method of claim 5 , wherein the oxide compound comprises germanium oxide (GeO 2 ) and the first liquid electrode comprises mercury or indium.

7. The method of claim 1 , wherein the rate of generating the precipitated solid material comprising the semiconductor element is determined by magnitude of the applied electric potential.

8. The method of claim 1 , wherein the rate of generating the precipitated solid material comprising the semiconductor element is greater than or equal to about 1×10 −12 mol cm −2 s −1 .

9. The method of claim 1 , wherein the applied electric potential is greater than or equal to about a standard potential for the semiconductor reduction process to less than or equal to about 2 V overpotential.

10. The method of claim 1 , wherein the first liquid electrode comprises a metal selected from the group consisting of: mercury, gallium, indium, alloys and combinations thereof.

11. The method of claim 1 , wherein the generating is conducted at greater than or equal to room temperature to less than or equal to about 100° C.

12. A method for forming a crystalline material comprising:
contacting a liquid electrolyte with a first liquid electrode, wherein the first liquid electrode is in electrical communication with a second electrode having a second opposite polarity from the first liquid electrode, wherein the liquid electrolyte is formed by combining water and an oxide compound comprising a Group IV semiconductor element, and wherein the first liquid electrode comprises a metal selected from the group consisting of: mercury, gallium, indium, zinc, cadmium, combinations and alloys thereof; and
generating a crystalline material comprising the Group IV semiconductor element by applying an electric potential to the first liquid electrode in contact with the electrolyte to drive an electrochemical reduction reaction that generates the crystalline material comprising the Group IV semiconductor element by precipitation at or within the first liquid electrode.

13. The method of claim 12 , wherein the generating occurs by dissolving the Group IV semiconductor element in the first liquid electrode, followed by saturation of the first liquid electrode with the Group IV semiconductor element, and then precipitating the Group IV semiconductor element from the first liquid electrode.

14. The method of claim 12 , wherein the Group IV semiconductor element is selected from the group consisting of: germanium, silicon, and combinations thereof.

15. The method of claim 12 , wherein the oxide compound is selected from either germanium oxide (GeO 2 ) or silicon dioxide (SiO 2 ).

16. The method of claim 12 , wherein the crystalline material is a polycrystalline material.

17. The method of claim 16 , wherein the polycrystalline material has an average crystal domain size of greater than or equal to about 10nanometers to less than or equal to about 500 micrometers, wherein domains in the polycrystalline material are randomly oriented.

18. The method of claim 12 , wherein the crystalline material is a single crystal material.

19. The method of claim 12 , further comprising controlling the morphology of the crystalline material by the applied electric potential applied to generate a polycrystalline material in the shape of filaments, cubes, or sheets.

Assignees

• Maldonado Stephen
• Carim Azhar
• Univ Michigan

Inventors

• Maldonado Stephen
• Carim Azhar

Classifications

• H10P14/3462

  Nanowires · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/2923 Primary

  being conductive materials, e.g. metallic silicides · CPC title

• H10P14/279

  Vapour-liquid-solid growth · CPC title

• H10P14/274

  using seed materials · CPC title