Laser irradiation method and laser irradiation apparatus

Patent metadata

Field	Value
Publication number	US-9387553-B2
Application number	US-201113216669-A
Country	US
Kind code	B2
Filing date	Aug 24, 2011
Priority date	May 14, 2004
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

The present invention is to provide a laser irradiation technique for irradiating the irradiation surface with the laser beam having homogeneous intensity distribution using a cylindrical lens array without being affected by the intensity distribution of the original beam. A laser beam emitted from a laser oscillator is divided by two kinds of cylindrical lens arrays into a plurality of beams, which are two kinds of linear laser beams with their energy intensity distribution inverted each other, and the two kinds of linear laser beams are superposed in a minor-axis direction. This can form the linear laser beam having homogeneous intensity distribution on the irradiation surface.

First claim

What is claimed is:

1. A laser irradiation apparatus comprising:
a cylindrical lens array configured to divide a laser beam into a plurality of laser beams, the cylindrical lens array comprising a first cylindrical lens and a second cylindrical lens in direct contact with the first cylindrical lens;
a first combined cylindrical lens array in which first convex cylindrical lenses and first concave cylindrical lenses are arranged alternately in a direction of curvature; and
a second combined cylindrical lens array in which second convex cylindrical lenses and second concave cylindrical lenses are arranged alternately in a direction of curvature,
wherein the first combined cylindrical lens array and the second combined cylindrical lens array are stacked in a direction of a generating line of the first concave cylindrical lens,
wherein the first concave cylindrical lens comprises a concave surface and a flat surface opposite the concave surface,
wherein a direction of curvature of the cylindrical lens array is perpendicular to a direction of curvature of each of the first and second combined cylindrical lens arrays, and
wherein an outer shape of a beam exit surface of the first cylindrical lens is the same as an outer shape of a beam exit surface of the second cylindrical lens.

2. The laser irradiation apparatus according to claim 1 , further comprising a condensing lens configured to superpose a plurality of laser beams transmitted through the first combined cylindrical lens array and the second combined cylindrical lens array.

3. The laser irradiation apparatus according to claim 1 , further comprising a laser oscillator, wherein the cylindrical lens array is provided between the laser oscillator and the first and second combined cylindrical lens arrays.

4. The laser irradiation apparatus according to claim 1 , further comprising an excimer laser oscillator.

5. The laser irradiation apparatus according to claim 1 ,
wherein the cylindrical lens array is configured to condense one of the plurality of laser beams onto the first convex cylindrical lenses and the first concave cylindrical lenses, and
wherein the cylindrical lens array is configured to condense another one of the plurality of laser beams onto the second convex cylindrical lenses and second concave cylindrical lenses.

6. A laser irradiation apparatus comprising:
a cylindrical lens array configured to divide a laser beam into a plurality of laser beams, the cylindrical lens array comprising a first cylindrical lens and a second cylindrical lens in direct contact with the first cylindrical lens;
a first combined cylindrical lens array in which first convex cylindrical lenses and first concave cylindrical lenses are arranged alternately in a direction of curvature; and
a second combined cylindrical lens array in which second convex cylindrical lenses and second concave cylindrical lenses are arranged alternately in a direction of curvature,
wherein the first combined cylindrical lens array and the second combined cylindrical lens array are stacked in a direction of a generating line of the second convex cylindrical lens,
wherein the first concave cylindrical lens comprises a concave surface and a flat surface opposite the concave surface,
wherein a direction of curvature of the cylindrical lens array is perpendicular to a direction of curvature of each of the first and second combined cylindrical lens arrays, and
wherein an outer shape of a beam exit surface of the first cylindrical lens is the same as an outer shape of a beam exit surface of the second cylindrical lens.

7. The laser irradiation apparatus according to claim 6 , further comprising a condensing lens configured to superpose a plurality of laser beams transmitted through the first combined cylindrical lens array and the second combined cylindrical lens array.

8. The laser irradiation apparatus according to claim 6 , further comprising a laser oscillator, wherein the cylindrical lens array is provided between the laser oscillator and the first and second combined cylindrical lens arrays.

9. The laser irradiation apparatus according to claim 6 , further comprising an excimer laser oscillator.

10. The laser irradiation apparatus according to claim 6 ,
wherein the cylindrical lens array is configured to condense one of the plurality of laser beams onto the first convex cylindrical lenses and the first concave cylindrical lenses, and
wherein the cylindrical lens array is configured to condense another one of the plurality of laser beams onto the second convex cylindrical lenses and second concave cylindrical lenses.

11. A laser irradiation apparatus comprising:
a cylindrical lens array configured to divide a laser beam into a plurality of laser beams, the cylindrical lens array comprising a first cylindrical lens and a second cylindrical lens in direct contact with the first cylindrical lens;
a first combined cylindrical lens array in which first convex cylindrical lenses and first concave cylindrical lenses are arranged alternately in a direction of curvature; and
a second combined cylindrical lens array in which second convex cylindrical lenses and second concave cylindrical lenses are arranged alternately in a direction of curvature,
wherein the first combined cylindrical lens array and the second combined cylindrical lens array are stacked so that a generating line of the first concave cylindrical lens is connected to a generating line of the second convex cylindrical lens,
wherein the first concave cylindrical lens comprises a concave surface and a flat surface opposite the concave surface,
wherein a direction of curvature of the cylindrical lens array is perpendicular to a direction of curvature of each of the first and second combined cylindrical lens arrays, and
wherein an outer shape of a beam exit surface of the first cylindrical lens is the same as an outer shape of a beam exit surface of the second cylindrical lens.

12. The laser irradiation apparatus according to claim 11 , further comprising a condensing lens configured to superpose a plurality of laser beams transmitted through the first combined cylindrical lens array and the second combined cylindrical lens array.

13. The laser irradiation apparatus according to claim 11 , further comprising a laser oscillator, wherein the cylindrical lens array is provided between the laser oscillator and the first and second combined cylindrical lens arrays.

14. The laser irradiation apparatus according to claim 11 , further comprising an excimer laser oscillator.

15. The laser irradiation apparatus according to claim 11 ,
wherein the cylindrical lens array is configured to condense one of the plurality of laser beams onto the first convex cylindrical lenses and the first concave cylindrical lenses, and
wherein the cylindrical lens array is configured to condense another one of the plurality of laser beams onto the second convex cylindrical lenses and second concave cylindrical lenses.

Assignees

• Tanaka Koichiro
• Oishi Hirotada
• Semiconductor Energy Lab

Inventors

• Tanaka Koichiro
• Oishi Hirotada

Classifications

• B23K26/0738 Primary

  into a linear shape · CPC title

• B23K26/0608 Primary

  in the same heat affected zone [HAZ] (B23K26/0613, B23K26/0619 take precedence) · CPC title

• G02B27/0961

  Lens arrays (lens arrays per se G02B3/0006) · CPC title

• B23K26/0732

  into a rectangular shape · CPC title

• B23K2103/56

  being semiconducting · CPC title