Method of manufacturing semiconductor chips

Patent metadata

Field	Value
Publication number	US-9385268-B2
Application number	US-201514877592-A
Country	US
Kind code	B2
Filing date	Oct 7, 2015
Priority date	Nov 10, 2014
Publication date	Jul 5, 2016
Grant date	Jul 5, 2016

Abstract

A method of manufacturing semiconductor chips includes: forming grooves on a front face side of a substrate; and forming grooves on a back face side of the substrate as defined herein, and in manufacturing conditions in which a variation range of a top section of the cutting member having a tapered tip end shape with no top face in the groove width direction changes from a range included in the groove on the front face side to a range away from the groove on the front face side as wear of the cutting member advances, the use of the cutting member is stopped before the variation range changes from the range included in the groove on the front face side to the range away from the groove on the front face side.

First claim

What is claimed is:

1. A method of manufacturing semiconductor chips comprising:
forming grooves on a front face side of a substrate; and
forming grooves on a back face side of the substrate communicating with the grooves on the front face side using a rotating cutting member having a thickness thicker than width of inlet portions of the grooves on the front face side from the back face side of the substrate and dicing the substrate into semiconductor chips, wherein
in manufacturing conditions in which a variation range of a top section of the cutting member having a tapered tip end shape with no top face in the groove width direction changes from a range included in the groove on the front face side to a range away from the groove on the front face side as wear of the cutting member advances, the use of the cutting member is stopped before the variation range changes from the range included in the groove on the front face side to the range away from the groove on the front face side.

2. The method of manufacturing semiconductor chips according to claim 1 , wherein the use of the cutting member is stopped based on a predetermined relationship between use amount of the cutting member and rate of breakage at the periphery of the groove on the front face side.

3. A method of manufacturing semiconductor chips comprising:
forming grooves on a front face side of a substrate; and
forming grooves on a back face side of the substrate communicating with the grooves on the front face side using a rotating cutting member having a thickness thicker than width of inlet portions of the grooves on the front face side from the back face side of the substrate and dicing the substrate into semiconductor chips, wherein
in manufacturing conditions in which a variation range of a top section of the cutting member having a tapered tip end shape with no top face in the groove width direction changes from a range included in the groove on the front face side to a range away from the groove on the front face side as wear of the cutting member advances, the use of the cutting member is stopped before the tip end shape of the cutting member is formed into a tapered shape in which a maximum stress is applied at a region of the top section and periphery of the groove on the front face side is broken due to the wear of the cutting member.

4. The method of manufacturing semiconductor chips according to claim 3 , wherein the use of the cutting member is stopped based on a predetermined relationship between use amount of the cutting member and rate of breakage at the periphery of the groove on the front face side.

5. A method of manufacturing semiconductor chips comprising:
forming grooves on a front face side of a substrate; and
forming grooves on a back face side of the substrate communicating with the grooves on the front face side using a rotating cutting member having a thickness thicker than width of inlet portions of the grooves on the front face side from the back face side of the substrate and dicing the substrate into semiconductor chips, wherein
in manufacturing conditions in which a variation range of a thickness direction center of a tip end section of the cutting member becomes away from the groove on the front face side and periphery of the groove on the front face side is broken by a stress from a region of a top section of the cutting member that has been tapered due to wear, the use of the cutting member is stopped before rate of breakage of the periphery of the groove on the front face side starts rising as the wear of the cutting member advances.

6. The method of manufacturing semiconductor chips according to claim 5 , wherein the use of the cutting member is stopped based on a predetermined relationship between use amount of the cutting member and rate of breakage at the periphery of the groove on the front face side.

Assignees

• Fuji Xerox Co Ltd

Inventors

• MINAMIRU Takeshi
• Murata Michiaki
• Yamazaki Kenji
• Otsuka Tsutomu

Classifications

• H10P54/00 Primary

  Cutting or separating of wafers, substrates or parts of devices · CPC title

• H10H20/01 Primary

  Manufacture or treatment · CPC title

• H01L33/0095 Primary

  Electricity · mapped topic

• B28D5/022

  by cutting with discs or wheels · CPC title

• B28D5/029

  with a plurality of cutting blades · CPC title