Optical scanner apparatus and optical scanner control apparatus

Patent metadata

Field	Value
Publication number	US-9383578-B2
Application number	US-201514591260-A
Country	US
Kind code	B2
Filing date	Jan 7, 2015
Priority date	Oct 3, 2011
Publication date	Jul 5, 2016
Grant date	Jul 5, 2016

Abstract

An optical scanner apparatus includes first and second torsion beams which support a mirror support portion supporting a mirror from both sides in an axial direction; first and second horizontal driving beams configured to include first and second horizontal driving sources, respectively, a connecting beam; a first piezo-electric sensor; first and second sensor interconnects connected to one of and the other of an upper electrode and a lower electrode of the first piezo-electric sensor, respectively, the first sensor interconnect and the second sensor interconnect being formed to extend toward the first horizontal driving beam and the second horizontal driving beam, respectively.

First claim

What is claimed is:

1. An optical scanner apparatus comprising:
a mirror;
a mirror support portion which supports the mirror;
a torsion beam which supports the mirror support portion in an axial direction around which the mirror support portion is oscillated by torsion of the torsion beam;
a driving source;
a driving beam that is oscillated by a driving voltage applied to the driving source for oscillating the mirror and the mirror support portion;
a piezo-electric sensor configured to detect a displacement of the mirror when the mirror is being oscillated by the driving voltage applied to the driving source;
a sensor interconnect connected to the piezo-electric sensor; and
a guard pattern connected to a ground terminal to be grounded and formed between the driving source and the sensor interconnect to divide a space between the driving source and the sensor interconnect, so as to suppress influences from the driving source on the sensor interconnect.

2. The optical scanner apparatus according to claim 1 ,
wherein the driving source is a horizontal driving source and the driving beam is a horizontal driving beam for oscillating the mirror and the mirror support portion around the axial direction, and
wherein the piezo-electric sensor is configured to detect a displacement by an oscillation of the torsion beam around the axial direction when the mirror is being oscillated by the driving voltage applied to the horizontal driving source.

3. The optical scanner apparatus according to claim 2 , further comprising:
a vertical driving source;
a vertical driving beam that is oscillated by a driving voltage applied to the vertical driving source for oscillating the mirror and the mirror support portion in a direction perpendicular to the axial direction,
wherein the guard pattern is provided to extend between the vertical driving source and the sensor interconnect.

4. The optical scanner apparatus according to claim 1 ,
wherein the driving source is a vertical driving source and the driving beam is a vertical driving beam for oscillating the mirror and the mirror support portion in a direction perpendicular to the axial direction, and
wherein the piezo-electric sensor is configured to detect a displacement when the mirror is being oscillated by a driving voltage applied to the vertical driving source.

5. The optical scanner apparatus according to claim 4 , further comprising:
a horizontal driving source;
a horizontal driving beam that is oscillated by a driving voltage applied to the horizontal driving source for oscillating the mirror and the mirror support portion around the axial direction, and
wherein the guard pattern is provided to extend between the horizontal driving source and the sensor interconnect.

6. The optical scanner apparatus according to claim 1 ,
wherein the guard pattern is physically provided between the driving source and the sensor interconnect.

7. The optical scanner apparatus according to claim 1 ,
wherein the sensor interconnect transmits a current value output from the piezo-electric sensor corresponding to the displacement of the torsion beam.

8. The optical scanner apparatus according to claim 1 , further comprising a drive interconnect that provides the driving voltage to the driving source,
wherein the sensor interconnect extends along the drive interconnect, and the guard pattern is formed between the sensor interconnect and the drive interconnect.

Assignees

• Tanaka Toyoki
• Takahashi Somei
• Sekine Hisamichi
• Aga Hisanori
• Hibiya Riichiro
• Mitsumi Electric Co Ltd

Inventors

• Tanaka Toyoki
• Takahashi Somei
• Sekine Hisamichi
• Aga Hisanori
• Hibiya Riichiro

Classifications

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• G01C9/06

  Electric or photoelectric indication or reading means · CPC title

• G02B26/0858 Primary

  the reflecting means being moved or deformed by piezoelectric means · CPC title

• G01S7/4817

  relating to scanning · CPC title

• G01C2009/066

  optical · CPC title