Inspection apparatus and inspection method

Patent metadata

Field	Value
Publication number	US-9383321-B2
Application number	US-201414465435-A
Country	US
Kind code	B2
Filing date	Aug 21, 2014
Priority date	Aug 23, 2013
Publication date	Jul 5, 2016
Grant date	Jul 5, 2016

Abstract

An inspection apparatus is an apparatus for inspecting a solar cell panel. The inspection apparatus includes: an excitation light irradiation part for irradiating the solar cell panel with pulsed light for causing the solar cell panel to radiate an electromagnetic wave pulse; a detection part for detecting the electromagnetic wave pulse radiated from the solar cell panel in response to irradiation with the pulsed light; and a temperature changing part for changing a temperature of the solar cell panel at a part irradiated with the pulsed light.

First claim

What is claimed is:

1. An inspection apparatus for inspecting a photoelectric device, the inspection apparatus comprising:
an excitation light irradiation part for irradiating said photoelectric device with excitation light for causing said photoelectric device to radiate a terahertz wave;
a detection part for detecting the terahertz wave radiated from said photoelectric device in response to irradiation with said excitation light;
a temperature changing part for changing a temperature of said photoelectric device at a part irradiated with said excitation light;
a storage part for storing temperature correlation information regarding a correlation between a temperature of said photoelectric device and an intensity of said terahertz wave radiated from said photoelectric device in response to irradiation with said excitation light,
wherein said temperature correlation information is obtained by changing the temperature of said photoelectric device by said temperature changing part, and collecting intensities of said terahertz wave radiated from said photoelectric device at respective temperatures; and
a correction part for correcting an intensity of said terahertz wave detected by said detection part based on a temperature of said photoelectric device obtained by a temperature measuring part and said temperature correlation information.

2. The inspection apparatus according to claim 1 , further comprising the temperature measuring part for measuring a temperature of said photoelectric device at the part irradiated with said excitation light.

3. The inspection apparatus according to claim 1 , further comprising a continuous light irradiation part for irradiating said photoelectric device with continuous light.

4. The inspection apparatus according to claim 1 , further comprising:
a scanning mechanism for scanning said photoelectric device with said excitation light;
an image producing part for producing a terahertz wave intensity distribution image showing an intensity distribution of a terahertz wave radiated from said photoelectric device; and
a display part for displaying said terahertz wave intensity distribution image.

5. An inspection method for inspecting a photoelectric device, the inspection method comprising the steps of:
(a) irradiating said photoelectric device with excitation light;
(b) detecting a terahertz wave radiated from said photoelectric device in response to irradiation with said excitation light in said step (a);
(c) changing a temperature of said photoelectric device;
(d) storing temperature correlation information regarding a correlation between a temperature of said photoelectric device and an intensity of said terahertz wave radiated from said photoelectric device in response to irradiation with said excitation light in said step (a),
wherein said temperature correlation information is obtained by changing the temperature of said photoelectric device in said step (c) and collecting intensities of said terahertz wave radiated from said photoelectric device at respective temperatures; and
(e) correcting an intensity of said terahertz wave detected in said step (b) based on a temperature of said photoelectric device and said temperature correlation information.

Assignees

• Dainippon Screen Mfg
• Univ Osaka
• Screen Holdings Co Ltd

Inventors

• Nakanishi Hidetoshi
• Ito Akira
• Kawayama Iwao
• Tonouchi Masayoshi

Classifications

• G01N2201/10

  Scanning · CPC title

• G01N2021/6417

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• G01N21/6456

  Spatial resolved fluorescence measurements; Imaging · CPC title

• G01N21/6489 Primary

  Photoluminescence of semiconductors · CPC title