Selectively forming a protective conductive cap on a metal gate electrode

Patent metadata

Field	Value
Publication number	US-9379209-B2
Application number	US-201414536167-A
Country	US
Kind code	B2
Filing date	Nov 7, 2014
Priority date	Nov 7, 2014
Publication date	Jun 28, 2016
Grant date	Jun 28, 2016

Abstract

A replacement gate structure that includes a conductive metal gate electrode is formed in a gate cavity, wherein the gate cavity is formed in a dielectric material formed above an active region of a semiconductor device. An upper surface of the conductive metal gate electrode and an upper surface of the dielectric material are planarized during a common planarization process, and a protective conductive cap is selectively formed on and in direct physical contact with the planarized upper surface of the conductive metal gate electrode. A contact structure is formed in a dielectric insulating layer formed above the replacement gate structure, the contact structure directly contacting the protective conductive cap.

First claim

What is claimed:

1. A method, comprising:
forming a replacement gate structure comprising an HK/MG material layer stack and a conductive metal gate electrode in a gate cavity, wherein said gate cavity is formed in a dielectric material formed above an active region of a semiconductor device, and wherein said HK/MG material layer stack is formed between said conductive metal gate electrode and sidewall and bottom surfaces of said gate cavity, said HK/MG material layer stack comprising a high-k dielectric material and a work function metal material formed above said high-k dielectric material;
planarizing an upper surface of said conductive metal gate electrode, an upper surface of said HK/MG material layer stack, and an upper surface of said dielectric material during a common planarization process;
selectively forming a protective conductive cap on and in direct physical contact with said planarized upper surface of said conductive metal gate electrode, wherein said protective conductive cap is substantially confined to said planarized upper surface of said conductive metal gate electrode and is not formed on and in direct physical contact with planarized upper surface portions of said high-k dielectric material or said work function metal material of said HK/MG material layer stack; and
forming a contact structure in a dielectric insulating layer formed above said replacement gate structure, said contact structure directly contacting said protective conductive cap.

2. The method of claim 1 , wherein selectively forming said protective conductive cap comprises performing a selective growth process, wherein said planarized upper surfaces of said conductive metal gate electrode, said HK/MG material layer stack, and said dielectric material are exposed to said selective growth process, and wherein performing said selective growth process comprises initiating growth of a material comprising said protective conductive cap on said material of said conductive metal gate electrode but not on said dielectric material or said materials comprising said HK/MG material layer stack.

3. The method of claim 2 , wherein performing said selective growth process comprises performing a pregrowth anneal process above approximately 577° C.

4. The method of claim 3 , wherein said pregrowth anneal process is performed under substantial vacuum conditions having a pressure of approximately 1×10 −6 Torr or lower.

5. The method of claim 1 , wherein said selectively formed protective conductive cap covers an entirety of said planarized upper surface of said conductive metal gate electrode but does not cover said planarized upper surface of said dielectric material.

6. The method of claim 1 , wherein said conductive metal gate electrode comprises aluminum.

7. The method of claim 6 , wherein said protective conductive cap comprises silicon.

8. The method of claim 1 , further comprising performing a silicidation process on said protective conductive cap.

9. The method of claim 1 , wherein said selectively formed protective conductive cap covers an entirety of said planarized upper surface of said conductive metal gate electrode but does not cover an entirety of said planarized upper surface of said HK/MG material layer stack or said planarized upper surface of said dielectric material.

10. The method of claim 1 , wherein an upper surface of said protective conductive cap is at a greater height level above said active region than said planarized upper surface of said portion of said material layer stack and said planarized upper surface of said dielectric material.

11. The method of claim 1 , wherein selectively forming said protective conductive cap comprises performing a selective deposition process, and wherein said planarized upper surfaces of said conductive metal gate electrode, said HK/MG material layer stack, and said dielectric material are exposed to said selective deposition process.

12. The method of claim 11 , wherein performing said selective deposition process comprises performing a vapor phase deposition process.

13. The method of claim 1 , wherein said protective conductive cap comprises one of tungsten, rhenium, ruthenium, rhodium, palladium, silver, osmium, iridium, platinum and gold.

14. The method of claim 1 , wherein said work function metal material is a first work function metal material, wherein said HK/MG material layer stack further comprises a second work function metal material positioned above said first work function metal material, and wherein said protective conductive cap is not formed on and in direct physical contact with a planarized upper surface portion of said second work function metal material.

15. A method, comprising:
lining sidewall and bottom surfaces of a gate cavity with a material layer stack comprising a high-k dielectric material and a work function metal formed above said high-k dielectric material, wherein said gate cavity is formed in a dielectric material formed above an active region of a semiconductor device;
forming a conductive gate electrode material comprising aluminum in said gate cavity and above said material layer stack;
performing a planarization process on said conductive gate electrode material, said material layer stack, and said dielectric material so as to form a replacement gate structure comprising an aluminum gate electrode and an HK/MG material layer stack in said gate cavity, said HK/MG material layer stack comprising a planarized layer portion of said high-k dielectric material and a planarized layer portion of said work function metal;
selectively forming a protective conductive cap on and in direct physical contact with a planarized upper surface of said aluminum gate electrode but not on and in direct physical contact with planarized upper surfaces of said planarized layer portions of said high-k dielectric material or said work function metal of said HK/MG material layer stack, an upper surface of said protective conductive cap being at a greater height level above said active region than said planarized upper surfaces of said planarized layer portions of said high-k dielectric material and said work function metal of said HK/MG material layer stack and a planarized upper surface of said dielectric material; and
forming a contact structure in a dielectric insulating layer formed above said replacement gate structure, said contact structure directly contacting said protective conductive cap and said protective conductive cap physically separating said contact structure from said aluminum gate electrode.

16. The method of claim 15 , wherein selectively forming said protective conductive cap comprises performing a selective growth process, wherein said planarized upper surfaces of said aluminum gate electrode, said planarized layer portions of said high-k dielectric material and said work function metal of said HK/MG material layer stack and said dielectric material are exposed to said selective growth process, and wherein performing said selective growth process comprises initiating growth of a material comprising said protective conductive cap on said exposed planarized upper surface of said aluminum gate electrode but not on said exposed planarized upper surfaces of said planarized layer portions of said high-k dielectric material or said work function metal of said HK/MG material layer stack or said exposed planarized upper surface of said dielectric material.

17. The method of claim 15 , wherein said selectively formed protective conductive cap covers an entirety of said planarized upper surface of said aluminum gate electrode but does

Assignees

• Globalfoundries Inc

Inventors

• Cai Xiuyu
• Mao Jiajun
• Wu Xusheng
• Chi Min-Hwa

Classifications

• H10D64/0112

  using conductive layers comprising silicides · CPC title

• H10P95/04

  Planarisation of conductive or resistive materials · CPC title

• H10P14/432

  using selective deposition · CPC title

• H10P14/414

  of metal-silicide materials · CPC title

• H10D64/01316

  the conductor comprising a layer of elemental metal contacting the insulator, e.g. Ta, W, Mo or Al · CPC title