Method for fabricating organic light emitting device

Patent metadata

Field	Value
Publication number	US-9368743-B2
Application number	US-201313955569-A
Country	US
Kind code	B2
Filing date	Jul 31, 2013
Priority date	Jan 4, 2013
Publication date	Jun 14, 2016
Grant date	Jun 14, 2016

Abstract

A method of fabricating an organic light emitting device includes forming a first electrode layer on a substrate, surface-treating the first electrode layer with CF 4 plasma, forming a first common layer containing pentacene on the surface-treated first electrode layer, forming an organic light emitting layer on the first common layer, forming a second common layer on the organic light emitting layer, and forming a second electrode layer on the second common layer. The CF 4 plasma treatment enhances the luminous efficiency of the organic light emitting device.

First claim

What is claimed is:

1. A method of fabricating an organic light emitting device, the method comprising:
forming a first electrode layer on a substrate;
surface-treating the first electrode layer with CF 4 plasma;
forming a first common layer directly on the surface-treated first electrode layer and the first common layer comprising a pentacene thin film, and decreasing sizes of crystal grains of the pentacene thin film by the surface-treating of the first electrode layer;
forming an organic light emitting layer on the first common layer;
forming a second common layer on the organic light emitting layer; and
forming a second electrode layer on the second common layer.

2. The method of claim 1 , wherein the forming of the first common layer comprises stacking a hole injection layer on the surface-treated first electrode layer, and wherein the hole injection layer forms an interface with the surface-treated first electrode layer.

3. The method of claim 2 , wherein the forming of the first common layer further comprises stacking a hole transport layer on the hole injection layer.

4. The method of claim 2 , wherein the forming of the second common layer further comprises stacking an electron injection layer on the organic light emitting layer.

5. The method of claim 2 , wherein the forming of the second common layer further comprises:
stacking an electron transport layer on the organic light emitting layer; and
stacking an electron injection layer on the electron transport layer.

6. The method of claim 5 , further comprising forming a hole blocking layer blocking movement of holes from the organic light emitting layer to the electron transport layer between the electron transport layer and the organic light emitting layer.

7. The method of claim 2 , further comprising forming a hole blocking layer blocking movement of holes from the organic light emitting layer to the second common layer between the forming of the organic light emitting layer and the forming of the second common layer.

8. The method of claim 2 , wherein the first common layer is formed by a dry layer process.

9. The method of claim 8 , wherein the dry layer forming process is one of the processes selected from the group consisting of chemical vapor deposition, thermal deposition, and sputter deposition.

10. The method of claim 1 , wherein the second common layer contains 4,7-diphenyl-1,10-phenanthroline.

11. The method of claim 1 , wherein the first electrode layer contains indium tin oxide.

12. A method of fabricating an organic light emitting device, the method comprising:
forming a first electrode layer containing indium tin oxide on a substrate;
surface-treating the first electrode layer with CF 4 plasma;
forming a first common layer directly on the surface-treated first electrode layer by a dry layer forming process and the first common layer comprising a pentacene thin film, and decreasing sizes of crystal grains of the pentacene thin film by the surface-treating of the first electrode layer;
forming an organic light emitting layer on the first common layer;
forming a hole blocking layer on the organic light emitting layer;
forming a second common layer on the hole blocking layer; and
forming a second electrode layer on the second common layer, and
wherein the first common layer forms an interface with the surface-treated first electrode layer, and
wherein the electron transport layer contains 4,7-diphenyl-1,10-phenanthroline.

13. The method of claim 12 , wherein the second common layer comprises an electron transport layer and an electron injection layer sequentially stacked.

14. The method of claim 12 , wherein the dry layer forming process is one of the processes selected from the group consisting of chemical vapor deposition, thermal deposition, and sputter deposition.

Assignees

• Samsung Display Co Ltd

Inventors

• Choi Hyun Ju
• Lee Chang Ho
• Oh Ilsoo
• Ko Heejoo
• Shin Dae Yup
• Choi Keonha
• Lee Changmin
• Lee Injae
• Jeon Pyungeun
• Cho Sejin
• Yun Jinyoung
• Lee Bora
• Kim Beomjoon
• Lee Yeon Woo
• Shim Ji Hye
• Sim Joongwon

Classifications

• H01L51/0012

  Electricity · mapped topic

• H01L51/5056 Primary

  Electricity · mapped topic

• H05B33/10 Primary

  Apparatus or processes specially adapted to the manufacture of electroluminescent light sources · CPC title

• H10K71/191 Primary

  characterised by provisions for the orientation or alignment of the layer to be deposited · CPC title

• H10K50/15 Primary

  Hole transporting layers · CPC title