Measurement and inspection device

Patent metadata

Field	Value
Publication number	US-9368324-B2
Application number	US-201314759222-A
Country	US
Kind code	B2
Filing date	Nov 22, 2013
Priority date	Jan 18, 2013
Publication date	Jun 14, 2016
Grant date	Jun 14, 2016

Abstract

The present invention relates to a measurement and inspection device of a scanning-type electron beam system, and provides a technique for achieving a measuring/inspecting process with high precision in accordance with a scanning speed. A secondary electron signal detection system in the present measurement and inspection device is suitably applicable to a scanning control with a plurality of scanning speeds, and the device is provided with a detector 107 for detecting a secondary electron signal (SE) derived from an irradiation onto a sample 110 with an electron beam by a scanning control process, a preamplifier 30 for current-to-voltage converting and pre-amplifying the output, an analog signal processing and amplifying unit 51 to which the output of the preamplifier 30 is inputted to carry out an analog processing and amplifying process thereon as a secondary electron signal detection unit 50 , an ADC 52 for analog-to-digital converting the output thereof, and an image processing unit 205 for generating an image for use in measurements or inspections based upon the output. A control unit 210 carries out a switching control of respective units including an LPF ( 12 ) inside the analog signal processing and amplifying unit 51 , in accordance with a scanning speed or the like.

First claim

The invention claimed is:

1. A measurement and inspection device which carries out at least either a measuring process or an inspecting process on a sample by using a scanning type electron beam system, comprising:
an irradiation unit for irradiating the sample with an electron beam, while scanning and controlling the beam thereon;
a detection unit for detecting secondary electrons generated from the sample as an electric signal;
an analog signal processing and amplifying unit to which a detection signal of the detection unit is inputted to be subjected to an analog signal processing and amplified, and then outputted;
an AD conversion unit to which the outputted analog signal of the analog signal processing and amplifying unit is inputted to be converted to a digital signal, and then outputted;
a processing unit to which the outputted digital signal of the AD conversion unit is inputted to generate data information including an image for use in the measurements or the inspections and also to output the resulting data information; and
a band switching unit for switching a frequency band of the analog signal to be passed through the analog signal processing and amplifying unit among a plurality of states in association with a scanning speed of the scanning control and a gain of the detection unit.

2. The measurement and inspection device according to claim 1 , further comprising:
a control unit for controlling the entire operations including the measurements or inspections and for storing and managing data information relating to the measurements or inspections;
an interface unit for providing a user interface for use in work including the measurements or inspections; and
a preamplifier for converting an output current signal from the detection unit to a voltage and for pre-amplifying the voltage to be outputted,
wherein the irradiation unit further comprises:
an electron optical system for irradiating an electron beam onto the sample;
an electron optical control unit for controlling the electron optical system; and
a scan controlling unit for carrying out a scan controlling process upon irradiating the electron beam onto the sample,
the detection unit further comprises a detector for detecting secondary electrons generated from the sample upon irradiation of the sample with the electron beam as an electric current signal,
the analog signal processing and amplifying unit receives input of the output voltage signal from the preamplifier, and carries out an analog signal processing on the signal and amplifies the signal to be outputted,
the processing unit comprises an image processing unit that receives input of the output digital signal of the AD conversion unit, generates data information including an image for use in the measurements or the inspections, and outputs the data information to a user through the interface unit, and
the band switching unit switches a frequency band of the analog signal to be passed through the analog signal processing and amplifying unit among a plurality of states in accordance with the scanning speed of the scanning control, the gain of the detector, and an input range of the AD conversion unit.

3. The measurement and inspection device according to claim 2 , further comprising:
a variable gain adjusting unit for adjusting an amplifying level by a variable gain amplifier of the analog signal processing and amplifying unit in association with the scanning speed of the scanning control, the gain of the detector, the frequency band, and the input range of the AD conversion unit.

4. The measurement and inspection device according to claim 3 , further comprising:
a clamp output adjusting unit for carrying out adjustments so as to limit a maximum output level of a clamp amplifier of the analog signal processing and amplifying unit in association with the scanning speed of the scanning control, the gain of the detector, the frequency band, an amplifying level by the variable gain amplifier and the input range of the AD conversion unit.

5. The measurement and inspection device according to claim 2 ,
wherein the analog signal processing and amplifying unit comprises:
a first clamp amplifier to which the output voltage signal of the preamplifier is inputted and from which the input signal is outputted within a maximum output level limit value which is set in accordance with the gain of the detector;
a plurality of filters for allowing a plurality of frequency bands to be passed therethrough, to which the output analog signal of the first clamp amplifier is inputted to be switched so that a filter in accordance with the frequency band to be passed is selected in association with the scanning speed;
a switch for use in selecting the filter;
a variable gain amplifier to which the output of the filter is inputted and from which the inputted signal that is amplified by an amplifying level by a variable gain set in accordance with the gain of the detector and the frequency band of the filter is outputted; and
a second clamp amplifier to which the output of the variable gain amplifier is inputted and from which the input variable gain amplifier is outputted within a maximum output level limit value which is set in accordance with the gain of the detector, the frequency band of the filter and the variable gain.

6. The measurement and inspection device according to claim 5 ,
wherein the control unit is provided with:
a function for switching the frequency band to be passed therethrough by selecting a filter from the plurality of filters based upon a control signal relative to the switch given from the analog signal processing and amplifying unit;
a function for adjusting the amplifying level by the variable gain based upon a control signal relative to the variable gain amplifier of the analog signal processing and amplifying unit; and
a function for adjusting a maximum output level of each of the first and second clamp amplifiers based upon a control signal relative to each of the first and second clamp amplifiers of the analog signal processing and amplifying unit.

7. The measurement and inspection device according to claim 2 ,
wherein the interface unit generates a screen for displaying data information including an image for use in the measurements or the inspections, and outputs the screen to a user;
the control unit carries out controlling processes in accordance with the information set in response to operations of the user on the screen; and
the screen is provided with an item for selecting the scanning speed in response to the operation of the user, and an item for switching the frequency band to be passed therethrough of the analog signal processing and amplifying unit in accordance with the scanning speed in response to the operation of the user.

8. The measurement and inspection device according to claim 7 ,
wherein the screen is provided with an item for adjusting the amplifying level by the variable gain of the analog signal processing and amplifying unit in accordance with the scanning speed in response to the operation of the user.

9. The measurement and inspection device according to claim 8 ,
wherein the screen is provided with an item for adjusting a maximum output level limit value of the clamp amplifier of the analog signal processing and amplifying unit in accordance with the scanning speed in response to the operation of the user.

10. The measurement and inspection device according to claim 2 ,
wherein the interface unit is capable of selecting one of two or more scanning speeds in response to the operation of the user;
the scanning control unit carries out a scan controlling process upon irradiation of the sample with the electron beam at

Assignees

• Hitachi High Tech Corp

Inventors

• Li Wen
• Takahashi Hiroyuki
• Suzuki Makoto
• Kawano Hajime

Classifications

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/265

  Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination · CPC title

• H01J2237/2485

  Electric or electronic means · CPC title

• H01J2237/2448

  Secondary particle detectors · CPC title

• H01J2237/221

  Image processing · CPC title