Optical detection for bio-entities

Patent metadata

Field	Value
Publication number	US-9366647-B2
Application number	US-201313830234-A
Country	US
Kind code	B2
Filing date	Mar 14, 2013
Priority date	Mar 14, 2013
Publication date	Jun 14, 2016
Grant date	Jun 14, 2016

Abstract

An integrated semiconductor device for manipulating and processing bio-entity samples and methods are described. The device includes a lower substrate, at least one optical signal conduit disposed on the lower substrate, at least one cap bonding pad disposed on the lower substrate, a cap configured to form a capped area, and disposed on the at least one cap bonding pad, a microfluidic channel, wherein a first side of the microfluidic channel is formed on the lower substrate and a second side of the microfluidic channel is formed on the cap, a photosensor array coupled to sensor control circuitry, and logic circuitry coupled to the fluidic control circuitry, and the sensor control circuitry.

First claim

What is claimed is:

1. An integrated semiconductor device for manipulating and processing bio-entity samples, the device comprising:
a lower substrate;
at least one optical signal conduit disposed on the lower substrate;
at least one cap bonding pad disposed on the lower substrate and over a portion of the optical signal conduit;
a cap comprising an upper substrate and configured to form a capped area, and disposed on the at least one cap bonding pad, wherein the at least one optical signal conduit extends from outside the capped area to inside the capped area;
a microfluidic channel, wherein a first side of the microfluidic channel is formed on the lower substrate and a second side of the microfluidic channel is formed on the cap, the cap being coupled to the substrate so as to provide the microfluidic channel for a droplet containing a bio-entity sample and the microfluidic channel being coupled to fluidic control circuitry;
a photosensor array coupled to sensor control circuitry; and
logic circuitry coupled to the fluidic control circuitry and the sensor control circuitry, wherein the fluidic control circuitry, the sensor control circuitry, and the logic circuitry are formed on the lower substrate.

2. The integrated semiconductor device of claim 1 , wherein the fluidic control circuitry, the sensor control circuitry, and the logic circuitry are embedded in an inter-level dielectric (ILD) layer, and further comprise a plurality of electrodes over the ILD layer, the plurality of electrodes being coupled to the fluidic control circuitry.

3. The integrated semiconductor device of claim 1 , wherein the first side of the microfluidic channel comprises:
a high-k dielectric layer; and
a hydrophobic coating covering the high-k dielectric layer.

4. The integrated semiconductor device of claim 3 , wherein the hydrophobic coating is a self-assembled monolayer or a polytetrafluoroethylene layer.

5. The integrated semiconductor device of claim 1 , wherein the second side of the microfluidic channel comprises:
a dielectric layer over the cap; and
a hydrophobic coating over the dielectric layer.

6. The integrated semiconductor device of claim 1 , further comprising a surface treated area, the surface treated area disposed on the high-k dielectric layer of the first side of the microfluidic channel.

7. The integrated semiconductor device of claim 1 , wherein the microfluidic channel is coupled to a microfluidic grid, the microfluidic grid being coupled to a plurality of reservoirs and configured to allow for transport and mixing of fluids contained in the plurality of reservoirs, the fluids including bio-entity samples and reagents.

8. The integrated semiconductor device of claim 1 , wherein the optical signal conduit is configured to transmit light to a target molecule and wherein a photodetector is configured to detect a response from the target molecule.

9. The integrated semiconductor device of claim 1 , wherein the cap is not transparent.

10. The integrated semiconductor device of claim 1 , further comprising a plurality of electrodes over the cap and under a high-k dielectric layer, wherein the electrodes are not transparent.

11. An integrated semiconductor device for manipulating and processing bio-entity samples, the device comprising:
a lower substrate;
at least one optical signal conduit disposed on the lower substrate and configured to transmit light to a target molecule;
at least one cap bonding pad disposed on the lower substrate and over a portion of the optical signal conduit;
a cap comprising an upper substrate and configured to form a capped area, and disposed on the at least one cap bonding pad, wherein the at least one optical signal conduit extends from outside the capped area to inside the capped area;
a surface treated area with receptors disposed within the capped area and on the lower substrate and configured to interact with the target molecule;
a microfluidic channel, wherein a bottom surface of the microfluidic channel is formed on the lower substrate and a top surface of the microfluidic channel is formed on the cap, the cap being coupled to the substrate so as to provide the microfluidic channel; and
a photodetector disposed within the lower substrate and configured to detect a response from the target molecule.

12. The integrated semiconductor device of claim 11 , wherein the lower substrate does not comprise a color filter.

13. The integrated semiconductor device of claim 11 , wherein the bottom surface and the top surface of the microfluidic channel comprise a hydrophobic coating.

14. The integrated semiconductor device of claim 13 , wherein the bottom surface and the top surface of the microfluidic channel further comprise a high-K dielectric layer.

15. The integrated semiconductor device of claim 11 , wherein an oxide or anti-reflective coating is disposed between the photodetector and the surface treated area.

16. The integrated semiconductor device of claim 11 , further comprising a plurality of electrodes disposed on the lower substrate.

17. A method for manipulating and processing bio-entity samples with an integrated semiconductor device, the method comprising:
providing a bio-entity sample droplet from a first reservoir, the first reservoir coupled to a microfluidic grid;
transporting the bio-entity sample droplet from the microfluidic grid into a microfluidic channel using an electrowetting effect, the bio-entity sample droplet contacting a surface treatment in the microfluidic channel, wherein one side of the microfluidic channel is provided on a lower substrate;
transmitting light to the surface treatment through an optical signal conduit disposed on the lower substrate; and
detecting a photonic signal with a photosensor array, the photonic signal being enhanced by an interaction of the bio-entity sample droplet and the receptors on surface treatment, the photosensor array being formed on the lower substrate.

18. The method of claim 17 , further comprising:
providing a reagent droplet from a second reservoir coupled to the microfluidic grid; and
mixing the bio-entity sample droplet and the reagent droplet in the microfluidic grid to form a prepared sample droplet.

19. The method of claim 18 , wherein transporting the bio-entity sample droplet from the microfluidic grid into a microfluidic channel comprises transporting the prepared sample droplet into the microfluidic channel.

20. The method of claim 17 , further comprising providing an optical cable input that provides an optical path for light to the optical signal conduit or providing a grating coupler.

Assignees

• Taiwan Semiconductor Mfg

Inventors

• Chang Allen Timothy
• Chang Yi-Hsien
• Cheng Chun-Ren

Classifications

• B01L2300/089

  Virtual walls for guiding liquids · CPC title

• G01N2021/058

  Flat flow cell · CPC title

• B01L2400/0427

  Electrowetting · CPC title

• B01L2300/0819

  Microarrays; Biochips · CPC title

• C12Q1/6869 Primary

  Methods for sequencing · CPC title