Forming a device having a curved piezoelectric membrane

Patent metadata

Field	Value
Publication number	US-9362484-B2
Application number	US-201514628609-A
Country	US
Kind code	B2
Filing date	Feb 23, 2015
Priority date	Jul 26, 2010
Publication date	Jun 7, 2016
Grant date	Jun 7, 2016

Abstract

Processes for forming an actuator having a curved piezoelectric membrane are disclosed. The processes utilize a profile-transferring substrate having a curved surface surrounded by a planar surface to form the curved piezoelectric membrane. The piezoelectric material used for the piezoelectric actuator is deposited on at least the curved surface of the profile-transferring substrate before the profile-transferring substrate is removed from the underside of the curved piezoelectric membrane. The resulting curved piezoelectric membrane includes grain structures that are columnar and aligned, and all or substantially all of the columnar grains are locally perpendicular to the curved surface of the piezoelectric membrane.

First claim

What is claimed is:

1. A method for forming a curved surface in a profile-transferring substrate, comprising:
forming a negative profile-transferring substrate, the negative profile-transferring substrate having a curved surface in a first side of the negative profile-transferring substrate, and the curved surface in the first side of the negative profile-transferring substrate being surrounded by a planar surface;
depositing an etch stop layer over at least the curved surface in the first side of the negative profile-transferring substrate;
depositing a first semiconductor layer on a first side of the negative profile-transferring substrate over the etch stop layer such that a first side of the semiconductor layer conforms to the curved surface and the planar surface of the first side of the negative profile-transferring substrate; and
removing the negative profile-transferring substrate from the first side of the negative profile-transferring substrate until the etch stop layer is exposed, an exposed first side of etch stop layer and the first side of the first semiconductor layer including an inversion of at least the curved surface in the first side of negative profile-transferring substrate,
wherein the curved surface in the first side of the negative profile-transferring substrate is convex relative to the negative profile-transferring substrate, and the curved surface in the profile-transferring substrate is concave relative to the profile-transferring substrate,
wherein forming a negative profile-transferring substrate further comprises:
depositing a layer of photoresist on the first side of the negative profile-transferring substrate, the first side of the negative profile-transferring substrate being substantially planar before the photoresist is deposited;
forming a curved surface in a first side of the photoresist layer; and
etching the photoresist layer and the negative profile-transferring substrate from the first side of the photoresist layer to transfer a profile of the first side of the photoresist layer to the first side of the negative profile-transferring substrate,
wherein forming a curved surface in a first side of the photoresist layer further comprises:
patterning the photoresist layer such that only a portion of the photoresist layer at an intended location of the curved surface of the profile-transferring substrate remains on the negative profile-transferring substrate;
heating the photoresist layer remaining on the first side of the negative profile-transferring substrate such that the photoresist layer reflows to form a photoresist dome on the first side of profile-transferring substrate; and
cooling the photoresist layer such that the photoresist dome solidifies on the first side of the negative profile-transferring substrate.

2. The method of claim 1 , wherein heating the photoresist layer is performed in a vacuum environment.

3. A method for forming a curved surface in a profile-transferring substrate, comprising:
forming a negative profile-transferring substrate, the negative profile-transferring substrate having a curved surface in a first side of the negative profile-transferring substrate, and the curved surface in the first side of the negative profile-transferring substrate being surrounded by a planar surface;
depositing an etch stop layer over at least the curved surface in the first side of the negative profile-transferring substrate;
depositing a first semiconductor layer on a first side of the negative profile-transferring substrate over the etch stop layer such that a first side of the semiconductor layer conforms to the curved surface and the planar surface of the first side of the negative profile-transferring substrate; and
removing the negative profile-transferring substrate from the first side of the negative profile-transferring substrate until the etch stop layer is exposed, an exposed first side of etch stop layer and the first side of the first semiconductor layer including an inversion of at least the curved surface in the first side of negative profile-transferring substrate,
wherein the curved surface in the first side of the negative profile-transferring substrate is convex relative to the negative profile-transferring substrate, and the curved surface in the profile-transferring substrate is concave relative to the profile-transferring substrate,
wherein the method further comprises:
prior to removing the negative profile-transferring substrate,
planarizing a second side of the first semiconductor layer opposite to the first side of the first semiconductor layer; and
bonding the second side of the first semiconductor layer to a first side of a second semiconductor layer to form the profile-transferring substrate,

wherein planarizing the second side of the first semiconductor layer further comprises:
first polishing the second side of the first semiconductor layer using a low pH silicon slurry to remove the curved surface in the second side of the first semiconductor layer; and
after the first polishing, second polishing the second side of the first semiconductor layer using a high pH oxide slurry to smoothen the second side of the first semiconductor layer.

4. The method of claim 1 , wherein the first semiconductor layer is made of polysilicon.

5. The method of claim 3 , wherein the first semiconductor layer is made of polysilicon.

Assignees

• Fujifilm Corp

Inventors

• Hoisington Paul A
• Birkmeyer Jeffrey
• Bibl Andreas
• Ottosson Mats G
• Brabander Gregory De
• Chen Zhenfang
• Nepomnishy Mark
• Sugimoto Shinya

Classifications

• B41J2/1607

  Production of print heads with piezoelectric elements (B41J2/1606, B41J2/162 take precedence) · CPC title

• B41J2002/14241

  having a cover around the piezoelectric thin film element · CPC title

• B41J2/1631

  photolithography · CPC title

• B41J2/1626

  etching · CPC title

• H01L41/33

  Electricity · mapped topic