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US-9474150-B2 · Oct 18, 2016 · US
Manufacturing method of piezoelectric film element, piezoelectric film element and piezoelectric device
US9166142B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9166142-B2 |
| Application number | US-201213567157-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 6, 2012 |
| Priority date | Aug 10, 2011 |
| Publication date | Oct 20, 2015 |
| Grant date | Oct 20, 2015 |
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Abstract
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A manufacturing method of a piezoelectric film element includes forming a piezoelectric film including a lead-free alkali niobate based compound having a perovskite structure represented by a compositional formula of (K 1-X Na X )NbO 3 on a substrate, and dry-etching the piezoelectric film by using a low-pressure plasma including a fluorine system reactive gas.
First claim
Opening claim text (preview).
What is claimed is: 1. A manufacturing method of a piezoelectric film element, comprising: forming a piezoelectric film comprising a lead-free alkali niobate based compound having a perovskite structure represented by a compositional formula of (K 1-x Na x )NbO 3 on a substrate; forming a mask made of Cr, Ta, W, or Ti or a mask made of a laminated Cr, Ta, W or Ti body on the piezoelectric film; and dry-etching the piezoelectric film formed with the mask thereon by using a low…
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Electricity · mapped topic
- H01G5/18Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9166142B2 cover?
- A manufacturing method of a piezoelectric film element includes forming a piezoelectric film including a lead-free alkali niobate based compound having a perovskite structure represented by a compositional formula of (K 1-X Na X )NbO 3 on a substrate, and dry-etching the piezoelectric film by using a low-pressure plasma including a fluorine system reactive gas.
- Who is the assignee on this patent?
- Horikiri Fumimasa, Shibata Kenji, Suenaga Kazufumi, and 3 more
- What technology area does this patent fall under?
- Primary CPC classification H01G5/18. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Oct 20 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).