Micromechanical component and method for producing a micromechanical component

Patent metadata

Field	Value
Publication number	US-9360664-B2
Application number	US-201414471582-A
Country	US
Kind code	B2
Filing date	Aug 28, 2014
Priority date	Aug 28, 2013
Publication date	Jun 7, 2016
Grant date	Jun 7, 2016

Abstract

A micromechanical component and a method for producing a micromechanical component are described. The component has: a frame; a plate spring that is connected to the frame and that has a front side and a rear side facing away from the front side; a mirror element that is situated on the front side of the plate spring and is connected to the front side of the plate spring in such a way that the mirror element is suspended on the frame so as to be capable of displacement; and at least one piezoelectric strip that is connected to the rear side of the plate spring; the plate spring being elastically deformable through the application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.

First claim

What is claimed is:

1. A micromechanical device, comprising:
a frame;
a plate spring connected to the frame and having a front side and a rear side facing away from the front side;
a spacing element;
a mirror element situated on the front side of the plate spring and connected to the front side of the plate spring via the spacing element in such a way that the mirror element is suspended on the frame so as to be capable of displacement, wherein the mirror element includes a reflective surface that is situated at a distance from the front side of the plate spring at least by the spacing element; and
at least one piezoelectric strip connected to the rear side of the plate spring, wherein the plate spring is elastically deformable through an application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.

2. The device as recited in claim 1 , wherein at least one slit is present in the plate spring continuously from the front side of the plate spring to the rear side of the plate spring.

3. The device as recited in claim 1 , wherein the plate spring is connected to the frame at least two segments, at a distance from one another, of the front side of the plate spring.

4. The device as recited in claim 1 , wherein the mirror element is displaceable in such a way that the mirror element is capable of rotation at least about an axis of rotation.

5. The device as recited in claim 4 , wherein:
the plate spring is formed essentially as a cuboid,
the axis of rotation is situated parallel to the front side of the plate spring and perpendicular to an edge of the plate spring in an undeformed state, and
the edge is a longest edge of the cuboid.

6. The device as recited in claim 4 , wherein:
the plate spring is formed essentially as a cuboid,
the axis of rotation is parallel to the rear side of the plate spring and parallel to an edge of the plate spring in an undeformed state, and
the edge is a longest edge of the cuboid.

7. The device as recited in claim 1 , further comprising:
a torsion spring between the front side of the plate spring and the mirror element, wherein the torsion spring is connected to the front side of the plate spring, to the mirror element, and to the frame.

8. The device as recited in claim 1 , wherein the mirror element is connected to the front side of the plate spring via a plurality of connection points at a distance from one another.

9. The device as recited in claim 1 , wherein the mirror element is connected to the front side of the plate spring via at least three connection points at a distance from one another.

10. The device as recited in claim 1 , further comprising:
a detection device that includes:
at least one piezoresistive element that is formed and situated in such a way that an electrical resistance of the at least one piezoresistive element can be modified through deformation of the plate spring, and
printed conductors via which the electrical resistance of the at least one piezoresistive element can be ascertained in order to determine a deformation of the plate spring.

11. A method for producing a micromechanical component, comprising:
forming a frame and a plate spring connected to the frame, the plate spring having a front side and a rear side facing away from the front side;
forming a mirror element on the front side of the plate spring that is connected to the front side of the plate spring via a spacing element in such a way that the mirror element is suspended on the frame so as to be capable of displacement, wherein the mirror element includes a reflective surface situated at a distance from the front side of the plate spring at least by the spacing element; and
forming at least one piezoelectric strip that is connected to the rear side of the plate spring in such a way that the plate spring is elastically deformable through an application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.

Assignees

• Armbruster Simon
• Grutzeck Helmut
• Schatz Frank
• Muchow Joerg
• Njimonzie Frederic Njikam
• Baader Johannes
• Doessel Kerrin
• Straub Rainer
• Bosch Gmbh Robert

Inventors

• Armbruster Simon
• Grutzeck Helmut
• Schatz Frank
• Muchow Joerg
• Njimonzie Frederic Njikam
• Baader Johannes
• Doessel Kerrin
• Straub Rainer

Classifications

• G02B26/0858 Primary

  the reflecting means being moved or deformed by piezoelectric means · CPC title