Air washer of make-up air unit

Patent metadata

Field	Value
Publication number	US-9358490-B2
Application number	US-201414199746-A
Country	US
Kind code	B2
Filing date	Mar 6, 2014
Priority date	Mar 6, 2014
Publication date	Jun 7, 2016
Grant date	Jun 7, 2016

Abstract

An air washer includes a contamination removal membrane and a nozzle rack. The contamination removal membrane purifies an outdoor air for a clean room. The nozzle rack sprays water on the contamination removal membrane. The nozzle rack includes a supply pipe, a plurality of spray pipes connecting to the supply pipe and a plurality of nozzles fixed on the spray pipes to spray the water on the contamination removal membrane. The contamination removal membrane is a cellulose paper sheet, an agglomeration ceramic pad, a stainless steel filter or the combination thereof. In addition, a make-up air unit having the air washer is also disclosed therein.

First claim

What is claimed is:

1. An air washer, comprising:
a contamination removal membrane to purify an outdoor air for a clean room, wherein the contamination removal membrane comprises a first contamination removal pad and a second contamination removal pad to form a V-shaped contamination removal membrane;
a first nozzle rack to spray water on the contamination removal membrane,
wherein the first nozzle rack further comprises:
a supply pipe;
a plurality of spray pipes connecting to the supply pipe; and
a plurality of nozzles fixed on the spray pipes to spray the water on the contamination removal membrane; and
auxiliary nozzle racks positioned between the contamination removal membrane and the first nozzle rack, and respectively parallel to the first contamination removal pad and the second contamination removal pad.

2. The air washer of claim 1 , wherein the contamination removal membrane comprises a cellulose paper sheet.

3. The air washer of claim 2 , wherein a thickness of the cellulose paper sheet is about 250 mm to 350 mm.

4. The air washer of claim 1 , wherein the contamination removal membrane comprises a cellulose paper sheet and an agglomeration ceramic pad.

5. The air washer of claim 4 , wherein a thickness of the cellulose paper sheet is about 150 mm to 250 mm, and a thickness of the agglomeration ceramic pad is about 50 mm to 150 mm.

6. The air washer of claim 1 , further comprising a water recovery tray under the contamination removal membrane, the first nozzle rack and the auxiliary nozzle racks to collect the water.

7. The air washer of claim 1 , wherein the nozzles are sector nozzles.

8. The air washer of claim 7 , wherein the sector nozzles form an included angle with a vertical direction about 0 degrees to about 30 degrees.

9. The air washer of claim 8 , wherein a spray angle of the sector nozzle is about 115 degrees to about 145 degrees.

10. The air washer of claim 1 , wherein the nozzles are cone nozzles.

11. The air washer of claim 10 , wherein the cone nozzles form an included angle with a vertical direction about 80 degrees to about 100 degrees.

12. The air washer of claim 10 , wherein a spray angle of the cone nozzle is about 130 degrees to about 160 degrees.

13. The air washer of claim 1 , wherein the contamination removal membrane comprises a cellulose paper sheet and a stainless steel filter.

14. The air washer of claim 1 , wherein the contamination removal membrane further comprises a third contamination removal pad, the third contamination removal pad is perpendicular to an airflow direction of the outdoor air, and the first contamination removal pad and the second contamination removal pad are oblique to the airflow direction.

15. An air washer, comprising:
a contamination removal membrane to filter out airborne molecular contaminations in an outdoor air for an clean room, wherein the contamination removal membrane comprises a first contamination removal pad and a second contamination removal pad oblique to an airflow direction of the outdoor air;
a first nozzle rack perpendicular to the airflow direction of the outdoor air; and
auxiliary nozzle racks positioned between the contamination removal membrane and the first nozzle rack, wherein the auxiliary nozzle racks comprise:
a second nozzle rack parallel to the first contamination removal pad; and
a third nozzle rack parallel to the second contamination removal pad;
wherein each of the first nozzle rack, the second nozzle rack, and the third nozzle rack spraying water on the contamination removal membrane to form water films on the contamination removal membrane so as to catch the airborne molecular contaminations, further comprises:
a supply pipe;
a plurality of spray pipes connecting to the supply pipe; and
a plurality of nozzles fixed on the spray pipes to spray the water on the contamination removal membrane.

16. The air washer of claim 15 , wherein the contamination removal membrane is a cellulose paper sheet, an agglomeration ceramic pad, a stainless steel filter or a combination thereof.

17. An air washer, comprising:
a contamination removal membrane to filter out airborne molecular contaminations in an outdoor air for a clean room, wherein the contamination removal membrane comprises a first contamination removal pad and a second contamination removal pad oblique to an airflow direction of the outdoor air;
a first nozzle rack to spray water on the contamination removal membrane to form water films on the contamination removal membrane to catch the airborne molecular contaminations; and
auxiliary nozzle racks positioned between the contamination removal membrane and the first nozzle rack, wherein the auxiliary nozzle racks comprise:
a second nozzle rack parallel to the first contamination removal pad; and
a third nozzle rack parallel to the second contamination removal pad,
wherein each of the first nozzle rack, the second nozzle rack, and the third nozzle rack further comprises:
a supply pipe;
a plurality of spray pipes connecting to the supply pipe; and
a plurality of nozzles fixed on the spray pipes to spray the water on the contamination removal membrane.

18. The air washer of claim 17 , wherein the contamination removal membrane is a cellulose paper sheet, an agglomeration ceramic pad, a stainless steel filter or a combination thereof.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Tsao Chih-Ming

Classifications

• B01D47/06 Primary

  Spray cleaning · CPC title

• B01D2258/0216

  from CVD treatment or semi-conductor manufacturing · CPC title

• B01D47/028

  by directing the gas through a wetted wire mesh or a perforated plate (B01D47/14 takes precedence) · CPC title

• B01D53/78

  with gas-liquid contact · CPC title

• B01D53/18 Primary

  Absorbing units; Liquid distributors therefor (B01D3/16, B01D3/26, B01D3/30 take precedence; packing elements B01J19/30, B01J19/32) · CPC title