Method and apparatus for liquid treatment of wafer shaped articles

Patent metadata

Field	Value
Publication number	US-9355883-B2
Application number	US-201113229097-A
Country	US
Kind code	B2
Filing date	Sep 9, 2011
Priority date	Sep 9, 2011
Publication date	May 31, 2016
Grant date	May 31, 2016

Abstract

In an apparatus and method for treating a wafer-shaped article, a spin chuck is provided for holding a wafer-shaped article in a predetermined orientation wherein a lower surface of the wafer-shaped article is spaced a predetermined distance from an upper surface of the spin chuck. A heating assembly comprising at least one infrared heater is mounted above the upper surface of the spin chuck and below a wafer-shaped article when mounted on the spin chuck. The heating assembly is stationary in relation to rotation of the spin chuck.

First claim

What is claimed is:

1. Apparatus for treating a wafer-shaped article, comprising:
a spin chuck for holding a wafer-shaped article in a predetermined orientation wherein a lower surface of the wafer-shaped article is spaced a predetermined distance from an upper surface of the spin chuck; and
a heating assembly mounted above said upper surface of said spin chuck and underlying a wafer-shaped article when mounted on the spin chuck, the heating assembly being stationary in relation to rotation of said spin chuck;
wherein said spin chuck comprises a peripheral series of gripping elements positioned so as to be engageable with a peripheral edge of a wafer-shaped article to be held by the spin chuck, said gripping elements extending upwardly from said upper surface to uppermost gripping portions positioned above said heating assembly.

2. The apparatus according to claim 1 , further comprising:
a lower nozzle assembly comprising at least one nozzle for directing a fluid upwardly onto a downwardly facing surface of a wafer-shaped article positioned on the spin chuck.

3. The apparatus according to claim 2 , wherein said heating assembly comprises a housing that is integrated with a housing of said lower nozzle assembly.

4. The apparatus according to claim 1 , wherein said gripping elements are pivotable about an axis parallel to an axis of rotation of the spin chuck.

5. The apparatus according to claim 4 , wherein each of said uppermost gripping portions is moveable upon pivoting of the gripping element from a radially inward position engaging a wafer-shaped article to a radially outward position releasing a wafer-shaped article.

6. The apparatus according to claim 1 , wherein said apparatus is a process module for single wafer wet processing of semiconductor wafers.

7. The apparatus according to claim 1 , wherein said heating assembly comprises at least one tubular infrared heating element having a curved configuration.

8. The apparatus according to claim 7 , wherein said at least one tubular infrared heating element emits infrared radiation with a maximum peak in a range from 700 to 1300 nm.

9. The apparatus according to claim 7 , wherein said at least one tubular infrared heating element comprises a reflective coating on an underside thereof, thereby to direct infrared radiation upwardly of said heating assembly.

10. The apparatus according to claim 1 , wherein said heating assembly comprises a cover plate overlying at least one infrared heater, said cover plate having high transparency to infrared radiation generated by the at least one infrared heater.

11. A process for treating a wafer-shaped article, comprising:
positioning a wafer-shaped article on a spin chuck in a predetermined orientation wherein a first surface of the wafer-shaped article faces downwardly and is spaced a predetermined distance from an upper surface of the spin chuck, wherein a heating assembly is positioned between the wafer-shaped article and the upper surface of the spin chuck, and wherein the wafer-shaped article is held by a peripheral series of gripping elements that extend upwardly from the upper surface of the spin chuck to uppermost gripping portions positioned above the heating assembly;
dispensing a treatment fluid onto a second surface of the wafer-shaped article that faces upwardly, from at least one upper nozzle while rotating the wafer-shaped article in the spin chuck; and
heating the wafer-shaped article with the heating assembly during said dispensing, wherein the heating assembly is maintained stationary relative to rotation of the spin chuck and the wafer-shaped article.

12. The process according to claim 11 , wherein the heating assembly comprises at least one tubular infrared heating element having a curved configuration.

13. The process according to claim 12 , wherein the wafer-shaped article comprises a silicon substrate, and wherein the at least one tubular infrared heating element emits infrared radiation with a maximum peak in a range from 700 to 1300 nm.

14. The process according to claim 11 , wherein the uppermost gripping portions each comprise a body that is pivotable about an axis parallel to an axis of rotation of the spin chuck.

15. The process according to claim 11 , wherein the treatment fluid dispensed onto the first surface of the wafer-shaped article is a liquid comprising isopropyl alcohol, and wherein the heating assembly heats the wafer-shaped article to a temperature in the range of 50-100° C., preferably 60-80° C., and more preferably 65-75° C.

16. The process according to claim 15 , wherein the liquid comprising isopropyl alcohol is heated to a temperature in excess of 30° C., and preferably in excess of 60° C.

17. The process according to claim 11 , wherein said heating assembly comprises a cover plate having high transparency to infrared radiation generated by said heating assembly.

Assignees

• Hohenwarter Karl-Heinz
• Otto Lach
• Lam Res Ag

Inventors

• Hohenwarter Karl-Heinz
• Otto Lach

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P70/20

  Cleaning during device manufacture · CPC title

• H10P72/7608 Primary

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• H01L21/68792

  Electricity · mapped topic