Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS)

Patent metadata

Field	Value
Publication number	US-9355824-B2
Application number	US-95450707-A
Country	US
Kind code	B2
Filing date	Dec 12, 2007
Priority date	Dec 12, 2006
Publication date	May 31, 2016
Grant date	May 31, 2016

Abstract

An apparatus for generating sputtering of a target to produce a coating on a substrate is provided. The apparatus comprises a magnetron including a cathode and an anode. A power supply is operably connected to the magnetron and at least one capacitor is operably connected to the power supply. The apparatus also includes an inductance operably connected to the at least one capacitor. A first switch and a second switch are also provided. The first switch operably connects the power supply to the magnetron to charge the magnetron and the first switch is configured to charge the magnetron according to a first pulse. The second switch is operably connected to discharge the magnetron. The second switch is configured to discharge the magnetron according to a second pulse.

First claim

What is claimed is:

1. An apparatus for generating sputtering of a target to produce a coating on a substrate comprising:
a magnetron;
a power supply operably connected to the magnetron;
at least one capacitor operably connected to the power supply;
an inductance of 0.1 to 100 μH operably connected to the at least one capacitor wherein the inductance is connected in series with the power supply and the magnetron;
a first switch operably connecting the power supply to the inductance;
a first control pulse generator having an output operationally connected to the first switch and configured to control the first switch to administer a first pulse having a duty cycle of 0.1% to 10% to the inductance;
a second switch operably connected to cause discharge of the magnetron when the second switch is open; and
a second control pulse generator having an output operationally connected to the second switch and configured to control the second switch to cause the discharge of the magnetron.

2. An apparatus according to claim 1 , wherein the inductance is a coil and the second switch is operably connected at a point along the coil.

3. An apparatus according to claim 1 , further comprising:
a cable with an inductance and a resistance connected to discharge a starting voltage of the at least one capacitor into the magnetron.

4. An apparatus according to claim 1 , wherein the first pulse and the second pulse have on-times and off-times between 0.2 μs and 5 μs.

5. An apparatus for generating sputtering of a target to produce a coating on a substrate comprising:
a magnetron;
a power supply operably connected to the magnetron;
at least one capacitor operably connected to the power supply;
an inductance of 0.1 to 100 μH operably connected to the at least one capacitor wherein the inductance is connected in series with the power supply and the magnetron;
a first switch operably connecting the power supply to the inductance;
a first control pulse generator having an output operationally connected to the first switch and configured to control the first switch to administer a first pulse having a duty cycle of 0.1% to 10% to the inductance;
at least one detector operably connected to the magnetron wherein the at least one detector is configured for detecting an arc that is forming;
a second switch operably connected to cause discharge of the magnetron when the second switch is open and configured to discharge the magnetron and inhibit a formation of the arc upon a detection of the arc forming by the at least one detector; and
a second control pulse generator having an output operationally connected to the second switch and configured to control the second switch to cause the discharge of the magnetron.

6. An apparatus according to claim 5 ,
wherein the inductance is configured to limit a rise time of a magnetron discharge current and to limit a peak current when an arc occurs.

7. An apparatus according to claim 6 , wherein the inductance is a coil and the second switch is operably connected at a point along the coil.

8. An apparatus according to claim 5 , wherein the second switch is located at a position close to the cathode.

9. An apparatus according to claim 5 , wherein the first switch is controlled in response to the detection of the arc by the at least one detector.

10. An apparatus for generating sputtering of a target to produce a coating on a substrate comprising:
a magnetron;
a power supply operably connected to the magnetron;
at least one capacitor operably connected to the power supply;
an inductance of 0.1 to 100 μH operably connected to the at least one capacitor wherein the inductance is connected in series with the power supply and the magnetron;
a first switch operably connecting the power supply to the inductance;
a first control pulse generator having an output operationally connected to the first switch and configured to control the first switch to administer a first pulse having a duty cycle of 0.1% to 10% to the inductance;
a second switch operably connected to cause discharge of the magnetron;
a second control pulse generator having an output operationally connected to the second switch and configured to control the second switch to cause the discharge of the magnetron; and
at least one detector operably connected to the magnetron;
wherein the at least one detector is configured for detecting a formation of an arc; and
wherein a detection of the arc activates the second switch to inhibit the formation of the arc.

11. An apparatus according to claim 10 , wherein the inductance is a coil and the second switch is operably connected at a point along the coil.

12. An apparatus according to claim 10 , further comprising:
a cable with an inductance and a resistance connected to discharge a starting voltage of the at least one capacitor into the magnetron.

13. An apparatus according to claim 10 , wherein the first switch is controlled in response to the detection of the arc by the at least one detector.

14. An apparatus for generating sputtering of a target to produce a coating on a substrate comprising:
a magnetron;
a power supply operably connected to the magnetron;
at least one capacitor operably connected to the power supply;
a coil having an inductance of 0.1 to 100 μH operably connected to the at least one capacitor wherein the coil is connected in series with the power supply and the magnetron;
a first switch operably connecting the power supply to the coil ;
a first control pulse generator having an output operationally connected to the first switch and configured to control the first switch to administer a first pulse having a duty cycle of 0.1% to 10% to the coil;
a second switch operably connected to cause discharge of the magnetron and connected at a point along the coil;
a second control pulse generator having an output operationally connected to the second switch and configured to control the second switch to cause the discharge of the magnetron; and
at least one detector operably connected to the magnetron wherein the at least one detector is configured for detecting an arc that is forming; and
wherein the first switch and the second switch are controlled in response to a detection of the arc by the at least one detector to inhibit a formation of the arc.

15. The apparatus according to claim 1 wherein the at least one capacitor and inductance are connected in parallel.

16. The apparatus according to claim 1 wherein the second pulse generator is configured to generate a second pulse to control the second switch and the first pulse generator and the second pulse generator are configured such that the first pulse is longer than the second pulse.

Assignees

• Kadlec Stanislav
• Weichart Jürgen
• Evatec Ag

Inventors

• Kadlec Stanislav
• Weichart Jürgen

Classifications

• H01J37/3408

  Planar magnetron sputtering · CPC title

• H01J37/3467

  Pulsed operation, e.g. HIPIMS · CPC title

• H01J37/3444 Primary

  Associated circuits · CPC title

• H01J37/32944 Primary

  Arc detection · CPC title

• C23C14/3485 Primary

  using pulsed power to the target · CPC title