Device for forming a reduced chamber space, and method for positioning multilayer bodies

Patent metadata

Field	Value
Publication number	US-9352431-B2
Application number	US-201113580322-A
Country	US
Kind code	B2
Filing date	Feb 22, 2011
Priority date	Feb 23, 2010
Publication date	May 31, 2016
Grant date	May 31, 2016

Abstract

A device for forming a reduced chamber space, which is a process box or a process hood, containing an apparatus, which positions at least two multilayer bodies each including a surface to be processed, wherein the apparatus is designed such that the multilayer bodies are opposite to each other, wherein the surfaces to be processed are facing away from each other such that the multilayer bodies can be processed as a multilayer body arrangement in a processing system. In addition, a method for positioning the two multilayer bodies comprising a surface to be processed, with the two multilayer bodies disposed in such a device such that multilayer bodies are opposite each other, wherein the surfaces to be processed are facing away from each other, such that the multilayer bodies are processable as a multilayer body arrangement in a processing system.

First claim

The invention claimed is:

1. A device comprising an apparatus, which positions at least two multilayer bodies, each comprising a surface to be processed,
wherein the apparatus is designed such that the multilayer bodies are opposite each other, wherein the surfaces to be processed are facing away from each other and such that the multilayer bodies are processable as a multilayer body arrangement in a processing system,
wherein the apparatus is designed such that the multilayer bodies are sandwiched on top of each other while in use to form a bottom multilayer body and a top multilayer body of the multilayer body arrangement,
wherein the device is a process box, and the apparatus comprises a first supporting element disposed on a floor element and/or on a side wall element of the process box, wherein the first supporting element is designed such that the bottom multilayer body is at least partially supported on the first supporting element,
wherein the apparatus comprises a second supporting element disposed on the floor element and/or on the side wall element of the process box and/or on or against the first supporting element, wherein the second supporting element is designed such that the top multilayer body is at least partially supported on the second supporting element,
wherein, the first supporting element and/or the second supporting element are provided in each case as a frame element such that the multilayer bodies are disposed at least partially on the respective frame element and/or, the first supporting element and/or the second supporting element are designed in each case as two frame strip elements opposite to each other in a plane of extension of the multilayer bodies while in use such that the multilayer bodies are disposed at least partially on the frame strip elements,
wherein the first supporting element and/or the second supporting element each comprise a cross-connection element, which connects regions of the respective frame element opposite to each other in the plane of extension of the multilayer bodies or of frame strip elements opposite to each other while in use such that the multilayer bodies are supported and prevented from bending, and
wherein the cross-connection element comprises a first support element such that the multilayer bodies rest on or abut against the cross-connection element via the support element, wherein the support element has the same height as the frame element and/or frame strip elements.

2. The device of claim 1 , wherein at least a part of the apparatus configured for positioning the at least two multilayer bodies forms at least a part of the device.

3. The device of claim 1 , wherein the apparatus comprises an intermediate element disposed between the first supporting element and the second supporting element such that the second supporting element is stacked on the first supporting element.

4. The device of claim 1 , wherein the apparatus comprises a second support element provided on a floor element of the process box to support the multilayer body arrangement.

5. The device of claim 1 , wherein the frame element and/or frame strip element comprises at least two support elements such that the multilayer bodies can rest on or abut against the support elements.

6. The device of claim 1 , wherein the apparatus comprises a spacing element disposed at least partially between the two multilayer bodies such that the multilayer bodies are positioned at a distance from each other.

Assignees

• Palm Joerg
• Jost Stefan
• Fuerfanger Martin
• Hartwich Jessica
• Saint Gobain

Inventors

• Palm Joerg
• Jost Stefan
• Fuerfanger Martin
• Hartwich Jessica

Classifications

• H10P72/1921

  characterised by substrate supports · CPC title

• H10P72/1902

  specially adapted for a single substrate · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/18

  characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title