CMOS image sensor with epitaxial passivation layer

Patent metadata

Field	Value
Publication number	US-9349768-B2
Application number	US-201414229348-A
Country	US
Kind code	B2
Filing date	Mar 28, 2014
Priority date	Mar 28, 2014
Publication date	May 24, 2016
Grant date	May 24, 2016

Abstract

The present disclosure provides a complimentary metal-oxide-semiconductor (CMOS) image sensor (CIS) device. In accordance with some embodiments, the device includes a semiconductor region having a front surface and a back surface; a light-sensing region extending from the front surface towards the back surface within the semiconductor region; a gate stack formed over the semiconductor region; and at least one epitaxial passivation layer disposed at least one of over and below the light-sensing region. In some embodiments, the at least one epitaxial passivation layer includes a p-type doped silicon (Si) layer.

First claim

What is claimed is:

1. A complimentary metal-oxide-semiconductor (CMOS) image sensor (CIS) device, comprising:
a semiconductor region having a front surface and a back surface;
a light-sensing region extending from the front surface towards the back surface within the semiconductor region;
a first passivation layer disposed over the light-sensing region; and
a gate stack formed over an area of the semiconductor region that is free of the first passivation layer,
wherein the first passivation layer includes a p-type doped silicon (Si) layer, and
wherein the semiconductor region includes a front adsorption layer, the first passivation layer being disposed on the front adsorption layer.

2. The device of claim 1 , wherein the p-type doped Si layer includes a boron (B) doped Si layer.

3. The device of claim 2 , wherein a concentration of dopants B in the B doped Si layer is in a range from about 10 15 atom/cm 3 to about 10 21 atom/cm 3 .

4. The device of claim 1 , wherein the p-type doped Si layer further includes carbon (C) dopants with a concentration of p-type dopants and the C dopants in a range from about 10 15 atom/cm 3 to about 10 21 atom/cm 3 .

5. The device of claim 1 , wherein the first passivation layer has a thickness in a range from about 10 nm to about 20 nm.

6. The device of claim 1 , wherein the first passivation layer includes one or more crystal facets on an edge of the front passivation layer, the one or more crystal facets being selected from the group consisting of (001), (111), and (311).

7. The device of claim 1 , wherein the front adsorption layer includes a SiGe layer.

8. The device of claim 1 , wherein the front adsorption layer includes an n-type doped SiGe layer, and wherein the n-type doped SiGe layer includes a phosphor (P) doped SiGe layer.

9. The device of claim 1 , wherein the semiconductor region includes a P doped SiGe layer, and the front adsorption layer is an intrinsic SiGe layer disposed on the P doped SiGe layer, and
wherein a concentration of Ge in the P doped SiGe layer and the intrinsic SiGe layer increases from a range from about 1% to about 10%, to a range from about 30% to about 100% along a direction extending from a back-side towards a front-side.

10. The device of claim 1 , wherein the semiconductor region includes a back adsorption layer.

11. The device of claim 10 , wherein the back adsorption layer includes a SiGe layer.

12. The device of claim 10 , wherein the back adsorption layer includes an n-type doped SiGe layer, and wherein the n-type doped SiGe layer includes a phosphor (P) doped SiGe layer.

13. The device of claim 9 , further comprising
a front isolation region disposed below the front surface; and
a back isolation region disposed above the back surface.

14. A complimentary metal-oxide-semiconductor (CMOS) image sensor (CIS) device, comprising:
a semiconductor region having a front surface and a back surface;
a light-sensing region extending from the front surface towards the back surface within the semiconductor region;
a first passivation layer disposed over a first surface of the light-sensing region, wherein the first passivation layer includes one of: a p-type doped silicon (Si) layer and a high-k dielectric layer;
a second passivation layer disposed over a second surface of the light-sensing region, wherein the second passivation layer includes one of: a p-type doped silicon (Si) layer and a high-k dielectric layer;
first and second adsorption layers, wherein the first and second adsorption layers each include SiGe, the first adsorption layer is disposed between the first passivation layer and the first surface, and the second adsorption layer is disposed between the second passivation layer and the second surface; and
a gate stack disposed over an area of the semiconductor region that is free of the first passivation layer.

15. A complimentary metal-oxide-semiconductor (CMOS) image sensor (CIS) device, comprising:
a semiconductor region having a front surface and a back surface;
a light-sensing region extending from the front surface towards the back surface within the semiconductor region;
a first adsorption layer disposed over a first surface of the light-sensing region; and
a first passivation layer disposed over the first adsorption layer,
wherein the first passivation layer includes p-type doped silicon (Si) and the first adsorption layer includes SiGe.

16. The device of claim 15 , wherein the first surface of the light-sensing region is substantially coplanar with the front surface of the semiconductor region.

17. The device of claim 15 , further comprising:
a second adsorption layer disposed over a second surface of the light-sensing region; and
a second passivation layer disposed over the second adsorption layer,
wherein the second passivation layer includes p-type doped silicon (Si) and the second adsorption layer includes SiGe.

18. The device of claim 15 , wherein a front surface of the first adsorption layer is substantially coplanar with the front surface of the semiconductor region.

19. The device of claim 15 , wherein a front surface of the first passivation layer is substantially coplanar with the front surface of the semiconductor region.

20. The device of claim 15 , further comprising:
a gate stack formed over the front surface of the semiconductor region, wherein the first passivation layer is not disposed over the gate stack.

Assignees

• Taiwan Semiconductor Mfg

Inventors

• Cheng Yu-Hung
• Tseng Tung-Hsiung
• Wu Cheng-Ta
• Tu Yeur-Luen
• Tsai Chia-Shiung
• Lee Ru-Liang
• Ting Shyh-Fann
• Sze Jhy-Jyi
• Lin Tung-I
• Chen Wei-Li

Classifications

• H10F71/129

  Passivating · CPC title

• H10F77/1223

  characterised by the dopants · CPC title

• H10F77/306

  for devices having potential barriers · CPC title

• H10F39/18 Primary

  Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors · CPC title

• H10F39/024

  of coatings or optical elements · CPC title