Hardmask composition and method of forming patterns using the hardmask composition

Patent metadata

Field	Value
Publication number	US-9348229-B2
Application number	US-201414528029-A
Country	US
Kind code	B2
Filing date	Oct 30, 2014
Priority date	Dec 31, 2013
Publication date	May 24, 2016
Grant date	May 24, 2016

Abstract

A hardmask composition includes a polymer including a moiety represented by the following Chemical Formula 1 and a solvent.

In the above Chemical Formula 1, A and B are as defined in the specification.

First claim

What is claimed is:

1. A hardmask composition, comprising:
a polymer including a moiety represented by the following Chemical Formula 1, and a solvent:

wherein, in the above Chemical Formula 1,
A is selected from the following Groups 1a and 1b, and
B is selected from the following Group 2,

wherein, in Group 1a,
M and M′ are a carboxyl group (—COOH),
and wherein, in Groups 1a and 1b,
X is a substituted or unsubstituted C1 to C20 alkylene group, a substituted or unsubstituted C3 to C20 cycloalkylene group, a substituted or unsubstituted C6 to C20 arylene group, a substituted or unsubstituted C2 to C20 heteroarylene group, a substituted or unsubstituted C2 to C20 alkenylene group, a substituted or unsubstituted C2 to C20 alkynylene group, oxygen (O), sulfur (S), a carbonyl group (—C(═O)—) SO 2 , NR a , SiR b R c , PR d R e R f , or a combination thereof, and
R and R′ are independently hydrogen, a halogen, a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C3 to C30 cycloalkenyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C7 to C20 arylalkyl group, a substituted or unsubstituted C1 to C20 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heteroaryl group, a substituted or unsubstituted C1 to C30 alkoxy group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a substituted or unsubstituted C1 to C20 aldehyde group, a substituted or unsubstituted C1 to C4 alkyl ether, a substituted or unsubstituted C7 to C20 arylalkylene ether, a substituted or unsubstituted C1 to C30 haloalkyl group, a substituted or unsubstituted C1 to C20 alkylborane group, a substituted or unsubstituted C6 to C30 arylborane group, CR g R h R i , or a combination thereof, wherein R a , R b , R c , R d , R e , R f , R g , R h and R i are independently hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen, a halogen-containing group, or a combination thereof,

wherein, in Group 2,
Y and Y′ are independently hydrogen, a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C1 to C30 alkoxy group, NR a R b , COOR c , PR j R k R l R m , or a combination thereof,
X, R and R′ are the same as defined in Group 1, and
R a , R b , R c , R j , R k , R l and R m are independently hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen, a halogen-containing group, or a combination thereof.

2. The hardmask composition as claimed in claim 1 , wherein, in Groups 1 and 2,
R and R′ are independently hydrogen, a halogen, a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, CR g R h R i , or a combination thereof, and
R g , R h and R i are independently hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen, a halogen-containing group, or a combination thereof.

3. The hardmask composition as claimed in claim 1 , wherein, in Groups 1 and 2,
X is independently oxygen (O), sulfur (S), a carbonyl group (—C(═O)—), SO 2 , NR a , SiR b R c , PR d R e R f , or a combination thereof, and
R a , R b , R e , R d , R e and R f are independently hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen, a halogen-containing group, or a combination thereof.

4. The hardmask composition as claimed in claim 1 , wherein the polymer is represented by one of the following Chemical Formulae 2 to 7:

wherein, in the above Chemical Formulae 2 to 7,
X is oxygen (O), sulfur (S), a carbonyl group (—C(═O)—), SO 2 , NR a , SiR b R c , PR d R e R f , or a combination thereof,
Y and Y′ are independently a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C1 to C30 alkoxy group, NR a R b , COOR c , PR j R k R l R m , or a combination thereof,
R and R′ are independently hydrogen, a halogen, a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, CR g R h R i , or a combination thereof, 2≦n≦10,000, and
R a , R b , R e , R d , R e , R f , R g , R h , R i , R j , R k , R l and R m are independently hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen, a halogen-containing group, or a combination thereof.

5. The hardmask composition as claimed in claim 1 , wherein the polymer has a weight average molecular weight of about 1,000 to about 200,000.

6. The hardmask composition as claimed in claim 1 , wherein the solvent includes at least one selected from propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monomethylether (PGME), cyclohexanone, N-methyl 2-pyrrolidone (NMP), and ethyl lactate.

7. The hardmask composition as claimed in claim 1 , wherein the polymer is present in the hardmask composition in an amount of about 0.01 to about 50 parts by weight based on 100 parts by weight of the solvent.

8. A method of forming a pattern the method comprising
providing a material layer on a substrate,
applying the hardmask composition as claimed in claim 1 on the material layer,
heat-treating the hardmask composition to form a hardmask layer,
forming a silicon-containing thin layer on the hardmask layer,
forming a photoresist layer on the silicon-containing thin layer,
exposing and developing the photoresist layer to form a photoresist pattern,
selectively removing the silicon-containing thin layer and the hardmask layer using the photoresist pattern to expose a part of the material layer, and
etching the exposed part of the material layer.

9. The method as claimed in claim 8 , wherein the hardmask composition is applied by a spin-on coating method.

10. The method as claimed in claim 8 , wherein the hardmask layer is formed through heat treatment at about 100° C. to about 500° C.

11. The method as claimed in claim 8 , further comprising forming a bottom antireflective coating (BARC) layer on the silicon-containing thin layer.

12. The method as claimed in claim 8 , wherein the silicon-containing thin layer includes silicon oxynitride (SiON), silicon nitride (Si 3 N 4 ) or a combination thereof.

Assignees

• Samsung Sdi Co Ltd

Inventors

• Nam Youn-Hee
• Kim Hea-Jung
• Kim Sang-Kyun
• Kim Sung-Hwan
• Kim Yun-Jun
• Moon Joon-Young
• Song Hyun-Ji

Classifications

• H10P76/2043

  using an anti-reflective coating · CPC title

• H10P50/695

  characterised by the process involved to create the mask, e.g. lift-off masks or sidewalls or to modify the mask · CPC title

• H10P50/692

  characterised by their composition, e.g. multilayer masks or materials · CPC title

• H10P50/642

  Chemical etching · CPC title

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title