Method and apparatus for calibrating sensors that detect wafer protrusion from a wafer cassette

Patent metadata

Field	Value
Publication number	US-9348057-B2
Application number	US-201414340060-A
Country	US
Kind code	B2
Filing date	Jul 24, 2014
Priority date	Jul 24, 2014
Publication date	May 24, 2016
Grant date	May 24, 2016

Abstract

A calibration gauge, an apparatus and a method for calibrating sensors that detect wafer protrusion from a wafer cassette using the calibration gauge. The calibration gauge includes a disk having a first region which is a circular sector of central angle A 1 having a constant radius R 1 about a center and an integral second region of increasing radius about the center, the increasing radius increasing from R 1 to R 2 through a central angle A 2 , wherein R 2 is greater than R 1 and A 1 +A 2 equals 360°.

First claim

What is claimed is:

1. An apparatus, comprising:
a wafer cassette comprising a top, a bottom, opposite first and second ends and opposite sidewalls between said first and second ends, said cassette open at said top and said bottom, a plurality of slots formed in said sidewalls, each slot adapted to hold a circular wafer;
a calibration gauge in the form of a disk having a first region which is a circular sector of central angle A 1 having a constant radius R 1 about a center and an integral second region of increasing radius about said center, the increasing radius increasing from R 1 to R 2 through a central angle A 2 , wherein R 2 is greater than R 1 and A 1 +A 2 equals 360°; and
wherein said disk is removeably positioned in a slot of said plurality slots and rotatable about said center, said second region of said disk extending past said opposite ends and said top of said wafer cassette.

2. The apparatus of claim 1 , further including:
an optical wafer protrusion system comprising a sender for generating an optical beam and a receiver for receiving said optical beam, said sender positioned proximate to said first end of said cassette and said receiver proximate to said second end of said wafer cassette; and
means for detecting when said beam is broken by said calibration gauge.

3. The apparatus of claim 2 , further including:
a semiconductor process tool, said semiconductor process tool having a load/unload station having a wafer cassette holder, said sender and said receiver located in said load/unload station and said load/unload station connected to a process chamber; and
wherein said semiconductor process tool is selected from any of measurement tools, grinding tools, chemical-mechanical-polish tools, ion implantation tools, plasma etch tools, reactive ion etch tools, chemical vapor deposition tools, evaporative deposition tools, sputter deposition tools and other integrated circuit fabrication tools.

4. The apparatus of claim 1 , said disk further including:
a plurality of straight sight lines formed in or on a top surface of said disk, said sight lines extending from a perimeter of said second region, through said center to a perimeter of said first region.

5. The apparatus of claim 1 , further including:
indicia formed in or on said top surface of said disk proximate to a corresponding sight line and proximate to a perimeter of said first region.

6. The apparatus of claim 5 , wherein each of said indicia indicate the length of said corresponding sight line measured from said center of said disk to said perimeter of said second region.

7. The apparatus of claim 1 , wherein said increasing radius of said second region increases smoothly from R 1 to R 2 .

8. The apparatus of claim 1 , wherein R 1 is equal to the radius of a semiconductor wafer said wafer cassette is designed to hold.

9. A method, comprising:
providing a calibration gauge comprising a disk having a first region which is a circular sector of central angle A 1 having a constant radius R 1 about a center and an integral second region of increasing radius about said center, the increasing radius increasing from R 1 to R 2 through a central angle A 2 , wherein R 2 is greater than R 1 and A 1 +A 2 equals 360°;
providing a wafer cassette comprising a top, a bottom, opposite first and second ends and opposite sidewalls between said first and second ends, said cassette open at said top and said bottom, a plurality of slots formed in said sidewalls, each slot adapted to hold a circular wafer;
placing said calibration gauge in a slot of said plurality of slots in said wafer cassette, said calibration gauge rotatable about said center, said second region of said disk extending past said opposite ends and said top of said wafer cassette;
placing said wafer cassette with said calibration gauge in a load/unload station having an optical wafer protrusion system comprising a sender for generating an optical beam and a receiver for receiving said optical beam, said sender positioned proximate to said first end of said cassette and said receiver proximate to said second end of said wafer cassette; and
rotating said calibration gauge about it center until said beam is broken by said calibration gauge and determining a difference between R 1 and a distance from said center of said calibration gauge to said perimeter of said second region when said beam is broken.

10. The method of claim 9 , wherein:
said disk includes a plurality of straight sight lines formed in or on a top surface of said disk, said sight lines extending from a perimeter of said second region, through said center to a perimeter of said first region.

11. The method of claim 10 , further including:
indicia formed in or on said top surface of said disk proximate to a corresponding sight line and proximate to a perimeter of said first region.

12. The method of claim 11 , wherein each of said indicia indicates a difference between R 1 and a length of said corresponding sight line measured from said center of said disk to said perimeter of said second region.

13. The method of claim 9 , wherein said increasing radius of said second region increases smoothly from R 1 to R 2 .

14. The method of claim 9 , wherein R 1 is equal to the radius of a semiconductor wafer said wafer cassette is designed to hold.

15. The method of claim 9 , wherein said load/unload station communicates with a semiconductor process chamber; and
wherein said semiconductor process tool is selected from any of measurement tools, grinding tools, chemical-mechanical-polish tools, ion implantation tools, plasma etch tools, reactive ion etch tools, chemical vapor deposition tools, evaporative deposition tools, sputter deposition tools and other integrated circuit fabrication tools.

16. A device, comprising:
a disk having a first region which is a circular sector of central angle A 1 having a constant radius R 1 about a center and an integral second region of increasing radius about said center, the increasing radius increasing from R 1 to R 2 through a central angle A 2 , wherein R 2 is greater than R 1 and A 1 +A 2 equals 360°;
a plurality of straight sight lines formed in or on a top surface of said disk, said sight lines extending from a perimeter of said second region, through said center to a perimeter of said first region; and
wherein A 1 is greater than 0°.

17. The device of claim 16 , further including:
indicia formed in or on said top surface of said disk proximate to a corresponding sight line and proximate to a perimeter of said first region.

18. The device of claim 17 , wherein each of said indicia indicate a difference between R 1 and a length of said corresponding sight line measured from said center of said disk to said perimeter of said second region.

19. The device of claim 16 , wherein said increasing radius of said second region.

Assignees

• IBM

Inventors

• Bandy John J
• Bates Graham M
• Mahan Bradley M

Classifications

• H10P72/0608 Primary

  of substrates stored in a container, a magazine, a carrier, a boat or the like · CPC title

• G01V8/12 Primary

  using one transmitter and one receiver · CPC title