Touchdown monitoring for individual dies of a semiconductor wafer

Patent metadata

Field	Value
Publication number	US-9347979-B2
Application number	US-201314042824-A
Country	US
Kind code	B2
Filing date	Oct 1, 2013
Priority date	Oct 1, 2013
Publication date	May 24, 2016
Grant date	May 24, 2016

Abstract

A prober system comprises a chuck, sensor and processing circuit. The chuck is configured to horizontally move a semiconductor wafer having a plurality of dies to position a selected group of the dies for parallel testing and vertically move the wafer to press the selected group of dies in contact with probes of a tester probe card. The sensor is configured to measure the vertical movement of the chuck when the wafer is on the chuck. The processing circuit is configured to control the horizontal and vertical movement of the chuck to test different groups of the dies, determine a total number of touchdowns between the wafer and the probes based on the vertical movement of the chuck measured by the sensor and associate each of the touchdowns with a location of the wafer contacted by the probes during that touchdown. A corresponding test data analysis system is also provided.

First claim

What is claimed is:

1. A prober system, comprising:
a chuck configured to horizontally move a semiconductor wafer having a plurality of semiconductor dies to position a selected group of the dies for parallel testing and vertically move the wafer to press the selected group of dies in contact with probes of a tester probe card;
a sensor configured to measure the vertical movement of the chuck when the wafer is on the chuck;
a processing circuit configured to:
control the horizontal and vertical movement of the chuck to test different groups of the dies;
determine a total number of touchdowns between the wafer and the probes based on the vertical movement of the chuck measured by the sensor; and
associate each of the touchdowns with a location of the wafer contacted by the probes during that touchdown.

2. The prober system of claim 1 , wherein the processing circuit is configured to:
compare vertical movement measurement data from the sensor for the chuck to a threshold value, the threshold value corresponding to a contact height value assigned to the probes plus an adjustment value which accounts for height differences between the probes; and
determine a touchdown occurred between the wafer and the probes each time the vertical movement measurement data exceeds the threshold value.

3. The prober system of claim 2 , wherein the adjustment value ranges between −99 μm and +99 μm.

4. The prober system of claim 1 , wherein the processing circuit is configured to associate each of the touchdowns with an x-y wafer location of a die included in a region of the wafer contacted by the probes during that touchdown.

5. The prober system of claim 1 , further comprising data storage configured to store the total number of touchdowns determined by the processing circuit and the wafer location associated with each of the touchdowns in a file.

6. The prober system of claim 5 , wherein the processing circuit is further configured to write geometry information for the prober system into the file, the geometry information indicating a number of rows and columns of dies positioned by the prober system for parallel testing.

7. A method of counting wafer touchdowns at a prober system, the method comprising:
loading a semiconductor wafer having a plurality of semiconductor dies onto a chuck of the prober system;
controlling horizontal movement of the chuck to position a selected group of the dies for parallel testing and vertical movement of the chuck to press the selected group of dies in contact with probes of a tester probe card;
measuring the vertical movement of the chuck when the wafer is on the chuck;
determining a total number of touchdowns between the wafer and the probes based on the vertical movement measured for the chuck; and
associating each of the touchdowns with a location of the wafer contacted by the probes during that touchdown.

8. The method of claim 7 , wherein determining the total number of touchdowns between the wafer and the probes comprises:
comparing vertical movement measurement data for the chuck to a threshold value, the threshold value corresponding to a contact height value assigned to the probes plus an adjustment value which accounts for height differences between the probes; and
determining a touchdown occurred between the wafer and the probes each time the vertical movement measurement data exceeds the threshold value.

9. The method of claim 7 , wherein associating each of the touchdowns with a location of the wafer contacted by the probes during that touchdown comprises associating each of the touchdowns with an x-y wafer location of a die included in a region of the wafer contacted by the probes during that touchdown.

10. The method of claim 7 , further comprising storing the total number of touchdowns determined by the processing circuit and the wafer location associated with each of the touchdowns in a file.

11. The method of claim 10 , further comprising writing geometry information for the prober system into the file, the geometry information indicating a number of rows and columns of dies positioned by the prober system for parallel testing.

12. A test data analysis system, comprising:
an input/output (I/O) interface configured to retrieve tester data and prober data for a semiconductor wafer having a plurality of semiconductor dies, the tester data including test data collected for the wafer by one or more testers having a probe card for contacting the wafer, the prober data including a total number of touchdowns between the wafer and each probe card that tested the wafer and a location of the wafer contacted by one of the probe cards during each of the touchdowns; and
a processing circuit configured to:
determine a total number of touchdowns for each of the dies based on the total number of touchdowns for the wafer and the location of the wafer contacted by one of the probe cards during each of the touchdowns; and
compare the total number of touchdowns determined for each of the dies to a maximum touchdown limit to determine whether any of the dies exceeds the maximum touchdown limit.

13. The test data analysis system of claim 12 , wherein the location of the wafer contacted by one of the probe cards during each of the touchdowns corresponds to an x-y wafer location of a die included in a region of the wafer contacted by the probe card during that touchdown.

14. The test data analysis system of claim 13 , wherein the prober data further includes geometry information for each prober system that handled the wafer, the geometry information indicating a number of rows and columns of dies positioned by each prober system for parallel testing, and wherein for each of the touchdowns of the wafer the processing circuit is configured to overlay the x-y wafer location information associated with that touchdown with the geometry information for the prober system that handled the wafer during that touchdown to determine which of the dies were contacted during that touchdown.

15. The test data analysis system of claim 12 , wherein the I/O interface is further configured to retrieve prober touchdown count data indicating touchdown count information for each of the probe cards that contacted the wafer, and wherein the processing circuit is further configured to update the prober touchdown count data based on the prober data retrieved for the wafer so that the updated prober touchdown count data accounts for the number of touchdowns performed by each of the probe cards that contacted the wafer.

16. The test data analysis system of claim 12 , wherein the tester data for the wafer is included in a STDF file, and wherein receipt of the STDF file by the I/O interface triggers the processing circuit to begin analysis of the prober data for the wafer to determine whether any of the dies exceeds the maximum touchdown limit.

17. The test data analysis system of claim 16 , wherein the processing circuit is further configured to add the total number of touchdowns for each of the dies to the STDF file.

18. The test data analysis system of claim 12 , wherein the processing circuit is further configured to generate at least one of a first report indicating which of the dies failed the maximum touchdown limit and a second report indicating the total number of touchdowns for each of the dies.

19. A method of analyzing test data, the method comprising:
retrieving tester data and prober data for a semiconductor wafer having a plurality of semiconductor dies, the tester data including test data collected for the wafer by one or more t

Assignees

• Infineon Technologies Ag

Inventors

• Pesl Stefan
• SCHÜTZ Robert

Classifications

• G01R31/2894

  Aspects of quality control [QC] (G01R31/31718 takes precedence; program control for QC G05B19/41875) · CPC title

• G01R31/2601 Primary

  Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence) · CPC title

• G01R31/2887 Primary

  involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392) · CPC title

• G01R1/06794

  Devices for sensing when probes are in contact, or in position to contact, with measured object · CPC title