Inspection method and method of manufacturing semiconductor device

Patent metadata

Field	Value
Publication number	US-9343319-B2
Application number	US-201414531462-A
Country	US
Kind code	B2
Filing date	Nov 3, 2014
Priority date	Nov 6, 2013
Publication date	May 17, 2016
Grant date	May 17, 2016

Abstract

First, a product to be inspected is prepared. The product to be inspected includes a substrate and a first film formed on the substrate. TDS is performed while the temperature of the product to be inspected is raised to 1,000° C. or higher, and the quality of the product to be inspected is determined by checking for the presence or absence of a peak at 1,000° C. or higher. Meanwhile, the substrate is, for example, a semiconductor substrate such as a silicon substrate. In addition, the rate of temperature rise is, for example, equal to or higher than 40° C./min and equal to or lower than 80° C./min. The upper limit of the temperature of TDS is, for example, 1,300° C.

First claim

What is claimed is:

1. An inspection method comprising determining a quality of a product to be inspected including a substrate and a first film formed on the substrate by performing thermal desorption spectrometry (TDS) on the product to be inspected while raising a temperature of the product to 1,000° C. or higher, and checking for the presence or absence of a peak at 1,000° C. or higher.

2. The inspection method according to claim 1 , wherein the first film is a silicon-containing film.

3. The inspection method according to claim 2 , wherein the peak is located at 1,200° C. or lower.

4. The inspection method according to claim 2 , wherein a second film is located between the first film and the substrate,
the second film is a silicon oxide film or a silicon oxynitride film, and
the first film is a polysilicon film.

5. The inspection method according to claim 1 , wherein the first film is formed using a CVD method.

6. The inspection method according to claim 1 , further comprising determining that the quality of the product is normal in response to the peak at 1,000° C. or higher being expected and present.

7. The inspection method according to claim 1 , further comprising determining that the quality of the product is defective in response to the peak at 1,000° C. or higher being expected and absent.

8. The inspection method according to claim 1 , further comprising determining that the quality of the product is normal in response to the peak at 1,000° C. or higher being unexpected and absent.

9. The inspection method according to claim 1 , further comprising determining that the quality of the product is defective in response to the peak at 1,000° C. or higher being unexpected and present.

10. The inspection method according to claim 1 , wherein the checking for the presence or absence of the peak is performed at 1,100° C. or higher.

11. A method of manufacturing a semiconductor device, comprising:
a first film forming process of forming a first film over substrates; and
an inspection process of determining a quality of the first film by, after the first film forming process is performed on a first one of the substrates, performing TDS on the substrate while a processing temperature is raised to 1,000° C. or higher, and checking for the presence or absence of a peak at 1,000° C. or higher,
wherein when a height of the peak is equal to or greater than a reference in the inspection process, the first film forming process is performed on at least a second one of the substrates.

12. The method of manufacturing a semiconductor device according to claim 11 , further comprising a second film forming process of forming a second film made of a silicon oxide film or a silicon oxynitride film before the first film forming process,
wherein the first film forming process is a process of forming a polysilicon film as the first film over the second film, using a CVD method,
the method further includes a patterning process of patterning at least the first film after the first film forming process,
in the inspection process, the presence or absence of the peak is checked for by performing TDS after the second film forming process and the first film forming process are performed on the first substrate, and before the patterning process is performed, and
when the height of the peak is equal to or less than a reference in the inspection process, the first film forming process, the second film forming process, and the patterning process are performed on at least a second one of the substrates.

13. The method of manufacturing a semiconductor device according to claim 12 , wherein the second film is a tunnel insulating film or a gate insulating film, and the first film is a gate electrode.

14. The method of manufacturing a semiconductor device according to claim 12 , wherein the peak is located at equal to or higher than 1,100° C. and equal to or lower than 1,200° C.

15. The method of manufacturing a semiconductor device according to claim 11 , further comprising determining that the quality of the product is normal in response to the peak at 1,000° C. or higher being expected and present.

16. The method of manufacturing a semiconductor device according to claim 11 , further comprising determining that the quality of the product is defective in response to the peak at 1,000° C. or higher being expected and absent.

17. The method of manufacturing a semiconductor device according to claim 11 , further comprising determining that the quality of the product is normal in response to the peak at 1,000° C. or higher being unexpected and absent.

18. The method of manufacturing a semiconductor device according to claim 11 , further comprising determining that the quality of the product is defective in response to the peak at 1,000° C. or higher being unexpected and present.

19. The method of manufacturing a semiconductor device according to claim 11 , wherein the checking for the presence or absence of the peak is performed at 1,100° C. or higher.

Assignees

• Renesas Electronics Corp

Inventors

• Cho Shien
• Hara Takahiro
• Ito Kenichi

Classifications

• H10D64/01344

  in a nitrogen-containing ambient, e.g. N2O oxidation · CPC title

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P14/43 Primary

  Chemical deposition, e.g. chemical vapour deposition [CVD] · CPC title

• G01N25/4846 Primary

  for a motionless, e.g. solid sample · CPC title

• G01N5/04

  by removing a component, e.g. by evaporation, and weighing the remainder · CPC title