Front referenced anode

Patent metadata

Field	Value
Publication number	US-9340893-B2
Application number	US-201514678686-A
Country	US
Kind code	B2
Filing date	Apr 3, 2015
Priority date	Sep 10, 2010
Publication date	May 17, 2016
Grant date	May 17, 2016

Abstract

Apparatus and methods for electroplating are described. Apparatus described herein include anode supports including positioning mechanisms that maintain a consistent distance between the surface of the wafer and the surface of a consumable anode during plating. Greater uniformity control is achieved.

First claim

We claim:

1. A consumable anode for an electroplating apparatus, the consumable anode comprising:
a plurality of sections, wherein each section has a first surface and a second surface, substantially parallel to the first surface, wherein both the first and the second surfaces have a shape of a sector of a circle, wherein each of the sections has a plurality of through channels connecting the first and second surfaces, wherein one of the first and second surfaces has at least one depression configured for registering with a protrusion on a component of an anode assembly, and wherein the at least one depression surrounds at least one through channel of the plurality of the through channels.

2. The consumable anode of claim 1 , wherein the sector of the circle has a central angle of 90 degrees and the anode has four sections.

3. The consumable anode of claim 1 , wherein the sector of the circle has a central angle of 120 degrees, and the anode has three sections.

4. The consumable anode of claim 1 , wherein the sector of the circle has a central angle of 180 degrees and the anode has two sections.

5. The consumable anode of claim 1 , wherein each anode segment comprises a plurality of depressions configured for registering with protrusions on a component of an anode assembly.

6. The consumable anode of claim 1 , wherein the at least one depression is a circular depression.

7. An anode assembly comprising:
(a) a consumable anode for an electroplating apparatus, the consumable anode comprising a plurality of sections, wherein each section has a first surface and a second surface, substantially parallel to the first surface, wherein both the first and the second surfaces have a shape of a sector of a circle, wherein each of the sections has a plurality of through channels connecting the first and second surfaces, and wherein one of the first and second surfaces has a plurality of depressions;
(b) a support plate comprising a plurality of protrusions configured to register with the plurality of depressions on the consumable anode; and
(c) a base plate comprising a plurality of springs configured to be compressed against the support plate.

8. The anode assembly of claim 7 , further comprising a charge plate, wherein the charge plate is connected to a power supply via cables attached to the charge plate.

9. The anode assembly of claim 8 , wherein the anode segments are bolted to the charge plate.

10. The anode assembly of claim 7 , wherein at least two anode segments are fastened to each other.

11. The anode assembly of claim 7 , wherein the base plate further comprises a plurality of guiding rods, wherein said guiding rods are configured to pass through a portion of the plurality of through channels of the consumable anode.

12. The anode assembly of claim 11 , wherein each guiding rod is located in the center of each spring of the plurality of springs.

13. An anode assembly comprising:
(a) a consumable anode for an electroplating apparatus, the consumable anode comprising a plurality of sections, wherein each section has a first surface and a second surface, substantially parallel to the first surface, wherein both the first and the second surfaces have a shape of a sector of a circle, wherein each of the sections has a plurality of through channels connecting the first and second surfaces, and wherein one of the first and second surfaces has a plurality of depressions;
(b) a support plate comprising a plurality of protrusions configured to register with the plurality of depressions on the consumable anode; and
(c) fasteners passing through the plurality of through channels of the anode.

14. The anode assembly of claim 13 , wherein the fasteners are bolts attaching the anode segments to a charge plate.

Assignees

• Novellus Systems Inc

Inventors

• Feng Jingbin
• Stowell R Marshall
• Ghongadi Shantinath
• He Zhian
• Wilmot Frederick Dean

Classifications

• H10P14/47

  Electrolytic deposition, i.e. electroplating; Electroless plating · CPC title

• C25D17/12 Primary

  Shape or form (C25D17/14 takes precedence) · CPC title

• C25D7/123

  Semiconductors first coated with a seed layer or a conductive layer · CPC title

• C25D17/10

  Electrodes {, e.g. composition, counter electrode} · CPC title

• C25D17/06

  Suspending or supporting devices for articles to be coated · CPC title