Exposure device and exposure method

Patent metadata

Field	Value
Publication number	US-9333708-B2
Application number	US-90188710-A
Country	US
Kind code	B2
Filing date	Oct 11, 2010
Priority date	Oct 20, 2009
Publication date	May 10, 2016
Grant date	May 10, 2016

Abstract

An exposure device includes a rotation driving section that rotationally drives an exposure object; a light irradiation section that irradiates an exposure surface of the exposure object with laser light; a slide moving section secured to the rotation driving section or the light irradiation section, and moving the rotation driving section or the light irradiation section along the exposure surface in a direction crossing a direction of rotation of the rotation driving section; a signal generating section that transmits an analog modulating signal to the light irradiation section in accordance with a rotation synchronization signal from the rotation driving section, the analog modulating signal causing an intensity of the laser light to be changed; and a controlling section that controls movements of the rotation driving section, the slide moving section, and the light irradiation section.

First claim

What is claimed is:

1. An exposure device comprising:
a rotation driving section configured to rotationally drive an exposure object in a rotational movement and generate a rotation synchronization signal;
a light irradiation section configured to irradiate an exposure surface of the exposure object with laser light;
a slide moving section secured to the light irradiation section, the slide moving section configured to linearly move the light irradiation section so as to move the laser light linearly along the exposure surface in a direction crossing a direction of rotation of the rotation driving section;
a signal generating section configured to transmit an analog modulating signal to the light irradiation section in accordance with the rotation synchronization signal from the rotation driving section, the analog modulating signal configured to modulate an intensity of the laser light in accordance with the rotation synchronization signal, wherein the intensity of the laser light with which the exposure object is irradiated in a same rotation phase of the exposure object is changed with time;
a controlling section configured to control the rotational movement of the rotation driving section, the slide moving section, and the light irradiation section, and wherein
a movement amount for the laser light to scan the exposure surface per rotation of the exposure object by the slide moving section is less than a spot diameter of the laser light per rotation period of the exposure object.

2. The exposure device according to claim 1 , wherein the rotation driving section is connected to a roll, and the slide moving section is configured to move along a direction of a rotational axis of the roll.

3. An exposure method comprising:
rotating an exposure object;
generating a rotation synchronization signal;
causing laser light to scan along an exposure surface of the rotating exposure object in a direction crossing a direction of rotation of the exposure object, the exposure surface being irradiated with the laser light; and
modulating an intensity of the laser light in accordance with the rotation synchronization signal,
wherein the intensity of the laser light is modulated in accordance with a rotation period of the exposure object, and
wherein the intensity of the laser light with which the exposure object is irradiated in a same rotation phase of the exposure object is changed with time, and
wherein a movement amount for the laser light to scan the exposure surface per rotation of the exposure object by the slide moving section is less than a spot diameter of the laser light per rotation period of the exposure object.

4. The exposure method according to claim 3 , wherein the movement amount for the laser light to scan the exposure surface per rotation of the exposure object by the slide moving section is greater than or equal to ½ of the spot diameter of the laser light per rotation period of the exposure object, and is less than the spot diameter.

5. The exposure method according to claim 3 , wherein the exposure object is a positive resist.

6. The exposure method according to claim 3 , wherein the exposure surface is a roll surface of a rotating roll, and the laser light scans the roll surface along a direction of a rotational axis of the roll.

7. The exposure method according to claim 3 , wherein the exposure object is a disc, and the laser light scans the disc along a radial direction of a disc surface of the exposure object.

8. An exposure method comprising the steps of:
rotating an exposure object; and
causing laser light to scan along an exposure surface of the rotating exposure object in a direction crossing a direction of rotation of the exposure object, the exposure surface being irradiated with the laser light,
wherein an intensity of the laser light is modulated in accordance with a rotation period of the exposure object,
wherein,
a movement amount for the laser light to scan the exposure surface per rotation of the exposure object by the slide moving section is less than a spot diameter of the laser light per rotation period of the exposure object, and
the intensity of the laser light with which the exposure object is irradiated in a same rotation phase of the exposure object is changed with time.

9. The exposure method according to claim 8 , wherein the intensity of the laser light with which the exposure object is irradiated in the same rotation phase of the exposure object is continuously changed.

Assignees

• Haga Shinsuke
• Ohno Masaki
• Takeuchi Taichi
• Sony Corp

Inventors

• Haga Shinsuke
• Ohno Masaki
• Takeuchi Taichi

Classifications

• B29C64/264

  Arrangements for irradiation · CPC title

• G03F7/70366

  Rotary scanning · CPC title

• B29C67/0051 Primary

  Operations & Transport · mapped topic

• G03F7/70191 Primary

  Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like · CPC title

• B33Y30/00 Primary

  Apparatus for additive manufacturing; Details thereof or accessories therefor · CPC title