Device for generating a laser radiation and associated fabrication method
US-2017373456-A1 · Dec 28, 2017 · US
Gas laser device and control method therefor
US2016359291A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016359291-A1 |
| Application number | US-201615240162-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 18, 2016 |
| Priority date | Mar 18, 2014 |
| Publication date | Dec 8, 2016 |
| Grant date | — |
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Abstract
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A gas laser apparatus includes a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, a motor connected to a rotating shaft of the fan, and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes.
First claim
Opening claim text (preview).
1 . A gas laser apparatus comprising: a chamber containing a laser gas; a pair of electrodes disposed within the chamber; a fan disposed within the chamber; a motor connected to a rotating shaft of the fan; and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes. 2 . The gas laser apparatus according to claim 1 , further comprising an electrode moving mechanism configured to move a first one of the pair of electrodes toward a second one of the pair of electrodes, wherein the rotating speed control unit controls the rotating speed of the fan based on the wear-out parameter of the pair of electrodes and an amount of movement of the first one of the pair of electrodes by the electrode moving mechanism. 3 . The gas laser apparatus according to claim 1 , further comprising a distance measurement unit configured to measure a distance between the pair of electrodes, wherein the wear-out parameter includes the distance between the pair of electrodes. 4 . The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes a total number indicating how many pulses of a pulse voltage have been supplied between the pair of electrodes since the pair of electrodes were installed within the chamber. 5 . The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes an integrated value of input energy having been inputted between the pair of electrodes since the pair of electrodes were installed within the chamber. 6 . The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes a stability of pulse energy of a laser beam that is outputted from the chamber. 7 . The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes a proximity with a target value of pulse energy of the laser beam that is outputted from the chamber. 8 . The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes a pressure of the laser gas in the chamber. 9 . The gas laser apparatus according to claim 1 , wherein the wear-out parameter includes a charging voltage of a charger configured to supply a pulse voltage between the pair of electrodes. 10 . A gas laser apparatus comprising: a chamber containing a laser gas; a pair of electrodes disposed within the chamber; a fan disposed within the chamber; a motor connected to a rotating shaft of the fan; an electrode moving mechanism configured to move a first one of the pair of electrodes toward a second one of the pair of electrodes; and a rotating speed control unit configured to control a rotating speed of the fan based on a distance between the pair of electrodes calculated after the first one of the pair or electrodes is moved by the electrode moving mechanism. 11 . A method for controlling a gas laser apparatus, the gas laser apparatus including a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, and a motor connected to a rotating shaft of the fan, the method comprising: calculating a distance between the pair of electrodes based on a wear-out parameter of the pair of electrodes; and controlling a rotating speed of the fan based on the distance between the pair of electrodes.
Assignees
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Classifications
in gas lasers · CPC title
using a diffraction grating · CPC title
transversely excited (H01S3/0975 takes precedence) · CPC title
Feedback control systems · CPC title
by lasers · CPC title
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Frequently asked questions
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- What does patent US2016359291A1 cover?
- A gas laser apparatus includes a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, a motor connected to a rotating shaft of the fan, and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes.
- Who is the assignee on this patent?
- Gigaphoton Inc
- What technology area does this patent fall under?
- Primary CPC classification H01S3/038. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Dec 08 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).