Acoustic wave element and acoustic wave device using same

Patent metadata

Field	Value
Publication number	US-9319023-B2
Application number	US-201214129819-A
Country	US
Kind code	B2
Filing date	Jun 14, 2012
Priority date	Jun 28, 2011
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

An IDT electrode of a SAW element has a plurality of first dummy electrodes which extend from the first bus bar to the second bus bar side and have tips which face the tips of the plurality of second electrode fingers through a plurality of first gaps, and a plurality of second dummy electrodes which extend from the second bus bar to the first bus bar side and have tips which face the tips of the plurality of first electrode fingers through a plurality of second gaps. The plurality of first gaps and the plurality of second gaps are arranged to be inclined to the same side relative to the propagation direction of SAW. When the inclination angles of the first gaps and the second gaps relative to the propagation direction are a first angle θA and a second angle θB, the following are true: 10°≰θA≰26°, and 10°≰θB≰26°.

First claim

The invention claimed is:

1. An acoustic wave element, comprising:
a piezoelectric substrate; and
an IDT electrode located on an upper surface of the piezoelectric substrate, wherein the IDT electrode comprises
a first bus bar and a second bus bar which face each other in a direction which intersects with a propagation direction of the acoustic wave,
a plurality of first electrode fingers which extend from the first bus bar to the second bus bar side,
a plurality of second electrode fingers which extend from the second bus bar to the first bus bar side and have a portion adjacent to the plurality of first electrode fingers in the propagation direction,
a plurality of first dummy electrodes which extend from the first bus bar to the second bus bar side and have tips which face the tips of the plurality of second electrode fingers through a plurality of first gaps, and
a plurality of second dummy electrodes which extend from the second bus bar to the first bus bar side and have tips which face the tips of the plurality of first electrode fingers through a plurality of second gaps,

wherein, in a certain range of the propagation direction of the IDT electrode,
when the arrangement direction of the first gaps among the plurality of first gaps which are adjacent to each other is the first direction, the first direction is inclined relative to the propagation direction,
when the arrangement direction of the second gaps among the plurality of second gaps which are adjacent to each other is the second direction, the second direction is inclined to the side the same as the side to which the first direction is inclined relative to the propagation direction, and

when the inclination angle of the first direction relative to the propagation direction is a first angle θA and the inclination angle of the second direction relative to the propagation direction is a second angle θB, the first angle θA and the second angle θB are within a following ranges:
10°≦θA≦26°
10°≦θB≦26°, and

wherein, when the wavelength of the acoustic wave is λ(μm), within the certain range, the gap lengths G (μm) of the plurality of first gaps and the plurality of second gaps in the direction perpendicular to the propagation direction are within the following range: 0.1≦G≦0.28λ.

2. The acoustic wave element according to claim 1 , wherein the first angles θA are the same for all the adjacent first gaps, the second angles θB are the same for all the adjacent second gaps, and the first angles θA and the seconds angle θB are the same.

3. The acoustic wave element according to claim 1 , wherein within the certain range,
the edge part of the first bus bar which is on the second bus bar side is inclined relative to the propagation direction so as to become parallel relative to the arrangement direction of the first gaps, and
the edge part of the second bus bar which is on the first bus bar side is inclined relative to the propagation direction so as to become parallel relative to the arrangement direction of the second gaps.

4. The acoustic wave element according to claim 1 , wherein the certain range is the whole of the propagation direction of the IDT electrode.

5. The acoustic wave element according to claim 4 , wherein
the first outer side edge part of the first bus bar which is on the side opposite to the second bus bar is inclined relative to the propagation direction so as to become parallel to the arrangement direction of the first gaps,
the second outer edge part of the second bus bar which is on the side opposite to the first bus bar is inclined relative to the propagation direction so as to become parallel to the arrangement direction of the second gaps, and
the plurality of IDT electrodes are arranged in the direction perpendicular to the propagation direction.

6. The acoustic wave element according to claim 1 , further comprising a reflector which is adjacent to the IDT electrode in the propagation direction, wherein the reflector comprises
a third bus bar on the first bus bar side and a fourth bus bar on the second bus bar side which face each other in the direction perpendicular to the propagation direction, and
a plurality of third electrode fingers extending so as to connect the third bus bar and the fourth bus bar,
the edge part of the third bus bar which is on the fourth bus bar side is inclined relative to the propagation direction so as to become parallel to the arrangement direction of the first gaps, and
the edge part of the fourth bus bar which is on the third bus bar side is inclined relative to the propagation direction so as to become parallel to the arrangement direction of the second gaps.

7. The acoustic wave element according to claim 1 , which is a double mode type SAW filter in which a plurality of the above IDT electrodes are arranged in a direction which is inclined relative to the propagation direction to the side the same as the side to which the arrays of the plurality of first gaps and the plurality of second gaps are inclined.

8. An acoustic wave device having an acoustic wave element according to claim 1 and a circuit board on which the acoustic wave element is mounted.

9. An acoustic wave element, comprising:
a piezoelectric substrate and
an IDT electrode located on an upper surface of the piezoelectric substrate,
wherein
the IDT electrode comprises
a first bus bar and a second bus bar which face each other in a direction intersecting with a propagation direction of the acoustic wave,
a plurality of first electrode fingers which extend from the first bus bar to the second bus bar side,
a plurality of second electrode fingers which
extend from the second bus bar to the first bus bar side and
have a portion adjacent to the plurality of first electrode fingers in the propagation direction,
a plurality of first dummy electrodes which
extend from the first bus bar to the second bus bar side and
have tips which face the tips of the plurality of second electrode fingers through a plurality of first gaps,
a plurality of second dummy electrodes which
extend from the second bus bar to the first bus bar side and
have tips which face the tips of the plurality of first electrode fingers through a plurality of second gaps,
a first additional electrode which
is located between a first electrode finger and a first dummy electrode which are adjacent to each other and at a position which it closes at least a portion of a first gap when viewed in the propagation direction and
is connected to at least one of the first electrode finger or the first dummy electrode, and
a second additional electrode which
is located between a second electrode finger and a second dummy electrode which are adjacent to each other and at a position which it closes at least a portion of the second gaps when viewed in the propagation direction and
is connected to at least one of the second electrode finger or the second dummy electrode, and,
in a certain range of the propagation direction of the IDT electrode,
when the arrangement direction of the first gaps among the plurality of first gaps which are adjacent to each other is a third direction, the third direction is inclined relative to the propagation direction,
when the arrangement direction of the second gaps among the plurality of second gaps which are adjacent to each other is a fourth direction, the fourth direction is inclined to the side the same as the side to which the third direction is inclined relative to the propagation direction, and
when the inclination angle of the third direction relative to the propagation direction is a third angle θC and the inclination angle of the fourth direction relative to the propagation direction is a fourth angle θD, the third

Assignees

• Tanaka Hiroyuki
• Kyocera Corp

Inventors

• Tanaka Hiroyuki

Classifications

• H03H9/14594

  Plan-rotated or plan-tilted transducers · CPC title

• H03H9/059 Primary

  consisting of mounting pads or bumps · CPC title

• H03H9/1071

  the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the SAW device · CPC title

• H03H9/1452

  by finger overlap length, apodisation · CPC title

• H03H9/25 Primary

  Constructional features of resonators using surface acoustic waves {(devices for manipulating acoustic surface waves in general G10K11/36)} · CPC title