Self-limited crack etch to prevent device shorting

Patent metadata

Field	Value
Publication number	US-9318692-B1
Application number	US-201514629659-A
Country	US
Kind code	B1
Filing date	Feb 24, 2015
Priority date	Feb 24, 2015
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

A semiconductor device includes a piezoelectric layer interposed between a first metal layer and a hardmask layer. A first trench extends through the hardmask layer, the piezoelectric layer and the first metal layer. A self-limiting second trench extends through the hardmask layer and the piezoelectric layer without reaching the first metal layer.

First claim

What is claimed is:

1. A method of fabricating a semiconductor device, the method comprising:
forming a starting substrate including a piezoelectric layer interposed between a first metal layer and a hardmask layer;
performing a patterning process that forms a first pattern in the hardmask having a first size and a second pattern in the hardmask having a second size less than the first size; and
performing an etching process that transfers the first pattern through the first metal layer while the second pattern self-limits at the piezoelectric layer without reaching the first metal layer.

2. The method of claim 1 , wherein the first pattern and the second pattern are simultaneously formed in the hardmask layer in response to a single patterning process.

3. The method of claim 2 , wherein the first pattern surrounds the second pattern.

4. The method of claim 3 , wherein the first patterning process includes a reactive ion etch process.

5. The method of claim 4 , wherein a depth at which the second trench self-limits is based on the second size of the second pattern formed during the patterning process.

6. The method of claim 5 , wherein the etching process is a single reactive ion etching process that simultaneously transfers the first pattern through the first metal layer while the second pattern self-limits at the piezoelectric layer.

7. The method of claim 6 , wherein the forming a starting substrate further includes forming the first metal layer on a substrate base and interposing a second metal layer between the piezoelectric layer and the hardmask layer.

8. The method of claim 7 , further comprising selectively patterning the hardmask layer using the patterning process such that the first and second patterns stop on an upper surface of the second metal layer.

9. The method of claim 8 , further comprising transferring the first pattern and the second pattern through the second metal layer using the etching process, wherein the first trench is transferred through the first metal layer to expose the substrate base.

10. The method of claim 9 , wherein the first metal layer is a metal gate layer comprising an electrically conductive metal material.

11. The method of claim 10 , wherein the metal gate layer comprises platinum (Pt).

12. The method of claim 11 , further comprising forming electrically conductive sidewalls on the inner walls of the first trench to electrically connect the metal gate layer to the second metal layer.

13. A semiconductor device, comprising:
a piezoelectric layer interposed between a first metal layer and a hardmask layer;
a first trench extending through the hardmask layer, the piezoelectric layer and the first metal layer; and
a second trench extending through the hardmask layer and the piezoelectric layer without reaching the first metal layer.

14. The semiconductor device of claim 13 , wherein the first trench has a first size and the second trench has a second size that is less than the first size.

15. The semiconductor device of claim 14 , wherein the first trench surrounds the second trench.

16. The semiconductor device of claim 15 , further comprising a second metal layer interposed between the piezoelectric layer and the hardmask layer.

17. The semiconductor device of claim 16 , wherein the first and second metal layers comprises an electrically conductive metal material.

18. The semiconductor device of claim 17 , further comprising electrically conductive sidewalls on the inner walls of the first trench, the electrically conductive sidewalls electrically connecting the first metal layer to the second metal layer.

19. The semiconductor device of claim 18 , wherein the first metal layer is a gate metal layer comprising nickel.

20. The semiconductor device of claim 19 , wherein the piezoelectric layer comprises a material selected from a group including lead magnesium niobate (PMN), lead magnesium niobate-lead titanate (PMN-PT) and lead zirconium titanate (PZT).

Assignees

• IBM

Inventors

• Bryce Brian A
• Chang Josephine B
• Miyazoe Hiroyuki

Classifications

• H10P50/267

  using plasmas · CPC title

• H10D48/50

  Devices controlled by mechanical forces, e.g. pressure · CPC title

• H01L29/84

  Electricity · mapped topic

• H01L21/32139

  Electricity · mapped topic

• H01L27/20

  Electricity · mapped topic