Semiconductor storage device comprising peripheral circuit, Shielding layer, and memory cell array

Patent metadata

Field	Value
Publication number	US-9318374-B2
Application number	US-201213606472-A
Country	US
Kind code	B2
Filing date	Sep 7, 2012
Priority date	Sep 21, 2011
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

Probability of malfunction of a semiconductor storage device is reduced. A shielding layer is provided between a memory cell array (e.g., a memory cell array including a transistor formed using an oxide semiconductor material) and a peripheral circuit (e.g., a peripheral circuit including a transistor formed using a semiconductor substrate), which are stacked. With this structure, the memory cell array and the peripheral circuit can be shielded from radiation noise generated between the memory cell array and the peripheral circuit. Thus, probability of malfunction of the semiconductor storage device can be reduced.

First claim

What is claimed is:

1. A semiconductor storage device comprising:
a peripheral circuit;
a conductive film over the peripheral circuit; and
a memory cell array over the conductive film,
wherein the memory cell array comprises a memory cell comprising a transistor, and
wherein entirety of the memory cell array overlaps with the conductive film.

2. The semiconductor storage device according to claim 1 , wherein an active layer of the transistor comprises an oxide semiconductor material.

3. The semiconductor storage device according to claim 1 , wherein the peripheral circuit is formed by utilizing a semiconductor substrate.

4. The semiconductor storage device according to claim 1 , further comprising a second conductive film over the memory cell array and a second memory cell array over the second conductive film.

5. The semiconductor storage device according to claim 1 , wherein the conductive film is configured to be supplied with a ground potential.

6. The semiconductor storage device according to claim 5 , wherein the peripheral circuit is electrically connected to the memory cell array through a contact plug comprising a same layer as the conductive film.

7. A semiconductor storage device comprising:
a peripheral circuit;
a shielding layer over the peripheral circuit; and
a memory cell array over the shielding layer,
wherein the memory cell array comprises a memory cell comprising a transistor,
wherein the shielding layer is configured to shield the peripheral circuit and the memory cell array from radiation noise generated between the peripheral circuit and the memory cell array, and
wherein the shielding layer is configured to be supplied with a ground potential.

8. The semiconductor storage device according to claim 7 , wherein an active layer of the transistor comprises an oxide semiconductor material.

9. The semiconductor storage device according to claim 7 , wherein the peripheral circuit is formed by utilizing a semiconductor substrate.

10. The semiconductor storage device according to claim 7 , further comprising a second shielding layer over the memory cell array and a second memory cell array over the second shielding layer.

11. The semiconductor storage device according to claim 7 , wherein entirety of the memory cell array overlaps with the shielding layer.

12. The semiconductor storage device according to claim 7 , wherein the peripheral circuit is electrically connected to the memory cell array through a contact plug comprising a same layer as the shielding layer.

13. A semiconductor storage device comprising:
a peripheral circuit;
a first insulating film over the peripheral circuit;
a conductive film over the first insulating film;
a second insulating film over the conductive film; and
a memory cell array over the second insulating film,
wherein the memory cell array comprises a memory cell comprising a transistor electrically connected to an electrode,
wherein a capacitor is formed using a region of the conductive film as a first electrode, a region of the second insulating film over the region of the conductive film, and a region of the electrode over the region of the second insulating film as a second electrode, and
wherein entirety of the memory cell array overlaps with the conductive film.

14. The semiconductor storage device according to claim 13 , wherein an active layer of the transistor comprises an oxide semiconductor material.

15. The semiconductor storage device according to claim 13 , wherein the peripheral circuit is formed by utilizing a semiconductor substrate.

16. The semiconductor storage device according to claim 13 , further comprising a second conductive film over the memory cell array and a second memory cell array over the second conductive film.

17. The semiconductor storage device according to claim 13 , wherein the conductive film is configured to be supplied with a ground potential.

18. The semiconductor storage device according to claim 17 , wherein the peripheral circuit is electrically connected to the memory cell array through a contact plug comprising a same layer as the conductive film.

19. The semiconductor storage device according to claim 13 , wherein a distance between the region of the electrode and the region of the conductive film is shorter than a distance between at least one of a source and a drain of the transistor and the conductive film.

20. The semiconductor storage device according to claim 13 , wherein the capacitor is a trench capacitor formed in a depressed portion or an opening portion provided in the first insulating film.

Assignees

• Atsumi Tomoaki
• Okuda Takashi
• Semiconductor Energy Lab

Inventors

• Atsumi Tomoaki
• Okuda Takashi

Classifications

• H10W20/096

  by contacting with gases, liquids or plasmas · CPC title

• H10W20/071 Primary

  of dielectric parts thereof · CPC title

• H10B41/70

  the floating gate being an electrode shared by two or more components · CPC title

• H10D88/00

  Three-dimensional [3D] integrated devices · CPC title

• H10D87/00

  Integrated devices comprising both bulk components and either SOI or SOS components on the same substrate · CPC title