Charged particle beam device having an energy filter

Patent metadata

Field	Value
Publication number	US-9318299-B2
Application number	US-201414573965-A
Country	US
Kind code	B2
Filing date	Dec 17, 2014
Priority date	Jun 16, 2011
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

Provided is a charged particle beam device having an energy filter. In one embodiment, a charged particle beam device includes a deflector to deflect charged particles emitted from a sample to an energy filter, and a change in brightness value with the change of voltage applied to the energy filter is found for each of a plurality of deflection conditions for the deflector, and a deflection condition such that a change in the brightness value satisfies a predetermined condition is set as the deflection condition for the deflector.

First claim

The invention claimed is:

1. A charged particle beam device, comprising a charged particle source; a detector to detect charged particles acquired based on irradiation of a sample with a beam emitted from the charged particle source; and an energy filter to perform energy filtering of charged particles emitted from the sample, wherein
the charged particle beam device further comprises a first deflecting element to deflect charged particles emitted from the sample so as to separate the charged particles away from an optical axis of the beam emitted from the charged particle source, and
the energy filter comprises a first filter electrode including a plurality of annular electrodes to which different voltages can be separately applied.

2. The charged particle beam device according to claim 1 , further comprising a controller to apply voltages to the annular electrodes such that charged particles following a specific trajectory among the charged particles deflected by the first deflecting element are allowed to selectively pass through the energy filter.

3. The charged particle beam device according to claim 2 , wherein the controller applies voltages to annular electrodes positioned along the specific trajectory such that charged particles having energy of a specific value are allowed to pass through the energy filter, or the controller applies voltages to annular electrodes which are at earth potential and which are not positioned along the specific trajectory such that the charged particles having energy of a specific value are filtered through the energy filter.

4. The charged particle beam device according to claim 1 , wherein a mesh-form second filter electrode and a mesh-form third filter electrode are arranged such that the first filter electrode is sandwiched therebetween.

Assignees

• Hitachi High Tech Corp

Inventors

• Sasaki Yuko
• Ito Hiroyuki

Classifications

• H01J2237/2448

  Secondary particle detectors · CPC title

• H01J37/263

  Contrast, resolution or power of penetration · CPC title

• H01J2237/2801

  Details · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/2446

  Position sensitive detectors · CPC title