High heat-resistant member, method for producing the same, graphite crucible and method for producing single crystal ingot

Patent metadata

Field	Value
Publication number	US-9315921-B2
Application number	US-201213617671-A
Country	US
Kind code	B2
Filing date	Sep 14, 2012
Priority date	Sep 14, 2011
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

A high heat-resistant member includes a graphite substrate including isotropic graphite and a carbide coating film including a carbide, such as tantalum carbide, and covering a surface of the graphite substrate, the carbide coating film having a randomly oriented isotropic grain structure in which crystallites having a size indexed by a full width at half maximum of a diffraction peak of an X-ray diffraction pattern of not more than 0.2° from (111) planes are accumulated at substantially random. The orientation of the carbide coating film is determined by whether degree of orientation (F) in any Miller plane calculated based on an XRD pattern using the Lotgering method is within a range from −0.2 to 0.2.

First claim

The invention claimed is:

1. A high heat-resistant member, comprising:
a graphite substrate comprising isotropic graphite; and
a carbide coating film comprising a carbide and covering a surface of the graphite substrate;
the carbide coating film having a randomly oriented isotropic grain structure in which crystallites having a size indexed by a full width at half maximum of a diffraction peak of an X-ray diffraction pattern of not more than about 0.2° from (111) planes are accumulated at substantially random,
wherein a degree of orientation (F) in all Miller planes of the carbide coating film calculated based on the X-ray diffraction pattern using the Lotgering method is within a range of from about −0.2 to about 0.2.

2. The high heat-resistant member according to claim 1 , wherein the carbide is at least one selected from the group consisting of tantalum carbide, niobium carbide, tungsten carbide and hafnium carbide.

3. The high heat-resistant member according to claim 1 , wherein the carbide coating film has a thickness of about 40 to about 300 μm.

4. A method for producing the high heat-resistant member according to claim 1 , comprising:
coating a slurry containing carbide particles on a surface of a graphite substrate comprising isotropic graphite; and
forming a carbide coating film comprising sintered carbide particles by heating the graphite substrate after coating the surface of the graphite substrate with the slurry.

5. A graphite crucible, comprising the high heat-resistant member according to claim 1 .

6. A method for producing a single crystal ingot, comprising:
placing a seed crystal and a raw material in the graphite crucible according to claim 5 in a manner to face each other; and
heating the raw material in an inert atmosphere so as to sublime the raw material,
thereby obtaining a single crystal ingot comprising single crystal grown from the seed crystal.

7. The high heat-resistant member according to claim 1 , wherein the full width at half maximum of the diffraction peak of the X-ray diffraction pattern ranges from about 0.03° to not more than about 0.2°.

Assignees

• Nakamura Daisuke
• Suzumura Akitoshi
• SHIGETOH Keisuke
• Toyota Chuo Kenkyusho Kk

Inventors

• Nakamura Daisuke
• Suzumura Akitoshi
• SHIGETOH Keisuke

Classifications

• Y10T428/26

  Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension · CPC title

• C30B23/06

  Heating of the deposition chamber, the substrate or the materials to be evaporated · CPC title

• C30B35/002 Primary

  Crucibles or containers · CPC title

• C09D1/00

  Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances · CPC title

• B64G1/58

  Thermal protection, e.g. heat shields · CPC title