Wafer carrier

Patent metadata

Field	Value
Publication number	US-9312157-B2
Application number	US-201214238693-A
Country	US
Kind code	B2
Filing date	Aug 13, 2012
Priority date	Aug 12, 2011
Publication date	Apr 12, 2016
Grant date	Apr 12, 2016

Abstract

A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated.

First claim

What is claimed is:

1. A front opening wafer carrier comprising:
a container portion with a door frame and a door receivable in the door frame to sealingly close the wafer carrier;
the container portion comprising a plurality of columns of wafer shelves arranged for receiving a plurality of wafers;
the door having an inside facing surface, an outside facing surface, and a periphery, the door comprising a latching mechanism with latching portions for engaging with the door frame for securing the door in the door frame at a seated position, and a wafer retainer attached at the inside facing surface of the door;
the wafer retainer comprising a framework and a pair of columns of cantilevered fingers, each cantilevered finger comprising a fixed end portion that is substantially flat and of uniform thickness and extends directly laterally and contiguously from a flat portion of the framework that is of uniform thickness to the fixed end portion, an intermediate portion attached to the fixed end portion, and a distal portion attached to the intermediate portion, the distal portion having a distal tip, each pair of adjacent cantilevered fingers defining a slot therebetween, the slot terminating at the fixed end portions of the cantilevered fingers so that the entirety of each cantilevered finer is cantilevered from the framework, each cantilevered finger having an upper edge portion, a lower edge portion, a middle portion extending intermediate the upper edge portion and lower edge portion, and a wafer receiving groove portion that extends from the distal tip to the intermediate portion, the wafer receiving groove portion having a groove apex that is positioned more proximate to the upper edge portion than the middle portion at the distal tip and extends to a position more proximate the middle portion than the upper edge portion at the intermediate portion of each cantilevered finger, each wafer receiving groove extending a distance at least more than half of the length of the respective cantilevered finger and wherein each slot defined by adjacent airs of cantilevered fingers extends the entirety of the lengths of the wafer receiving grooves of the respective cantilevered fingers.

2. The front opening wafer carrier of claim 1 , wherein the wafer curler is sized for 450 mm wafers, and each of the cantilevered fingers is configured to position the distal tip such that as the door is inserted into the door frame with wafers seated in the container portion, each of the wafers first engage a respective one of the cantilevered fingers more proximate the distal tip than the fixed end portion.

3. The front opening, wafer carrier of claim 2 wherein each wafer receiving groove has a length extending from the distal tip to a groove termination proximate the fixed end portion and wherein each cantilevered finger is configured such that when the door is fully seated, a respective one of the plurality of wafers engages a substantial length of the wafer receiving groove.

4. The front opening wafer carrier of claim 1 wherein each column of the pair of columns of cantilevered fingers cantilevers in a direction toward the other of the pair of columns of cantilevered fingers.

5. The front opening wafer carrier of claim 4 wherein the wafer retainer comprises an additional column of fixed wafer supports each with a V-shaped wafer edge receiving surface.

6. The front opening wafer carrier of claim 1 , wherein each cantilevered finger has a wafer engaging surface facing away from the door, the wafer engaging surface for contacting a top edge and a bottom edge of each wafer, and wherein the wafer receiving groove divides the wafer engaging surface between an upper surface and a lower surface and wherein the upper surface has a less area that the lower surface.

7. The front opening wafer carrier of claim 1 , wherein each cantilevered finger is configured to cantilever away from the frame member in a horizontal direction and to bend downwardly proximate the distal tip.

8. The front opening wafer carrier of claim 1 , wherein the framework of the wafer retainer comprises:
an upper horizontal frame member and a lower horizontal frame member, the upper horizontal frame member spaced from the lower horizontal frame member;
four vertical support members, each extending from the upper horizontal frame member and the lower horizontal frame member, two of the vertical support members being associated with the two columns of cantilevered fingers.

9. A front opening wafer carrier comprising a container portion with a door frame and a door receivable in the door frame to sealingly close the wafer carrier, the container portion comprising a plurality of columns of wafer shelves arranged for receiving a plurality of wafers, the door having an inside facing surface, an outside facing surface, a periphery, and comprising a latching mechanism with latching portions that engage with the door frame for securing the door therein at a seated position, the door further comprising a wafer retainer attached at the inside facing surface of the door, the wafer retainer comprising a framework and a pair of columns of cantilevered fingers, each cantilevered finger comprising a fixed end portion that is substantially flat and of uniform thickness and extends directly laterally and contiguously from a flat portion of the framework that is of uniform thickness to the fixed end portion, each pair of adjacent cantilevered fingers defining a slot therebetween, the slot terminating at the fixed end portions of the cantilevered fingers so that the entirety of each cantilevered finer is cantilevered from the framework, each cantilevered finger having a length, an upper edge portion, a lower edge portion, and a distal portion with a distal tip, each cantilevered finger further having a wafer receiving groove portion that extends from proximate the distal tip toward the intermediate portion, each wafer receiving groove extending a distance at least more than half of the length of the respective cantilevered finger and each wafer receiving groove terminating before the fixed end of the respective cantilevered finger so that the slot defined between adjacent cantilevered fingers extends the entirety of the lengths of the wafer receiving grooves of the respective cantilevered fingers and wherein the intermediate portion and distal portion of each cantilevered finger angles downwardly from the fixed end of each cantilevered finger.

10. The front opening wafer carrier of claim 9 , wherein the wafer carrier is sized for 450 mm wafers, and each of the cantilevered fingers is configured to position the distal tip such that as the door is inserted into the door frame with wafers seated in the container portion, each of the wafers first engage a respective one of the cantilevered fingers more approximate the distal tip than the fixed end portion.

11. The front opening wafer carrier of claim 10 wherein each wafer receiving groove has a length extending from the distal tip to a groove termination proximate the fixed end portion and wherein each cantilevered finger is configured such that, when the door is fully seated, a respective one of the plurality of wafers engages a substantial length of the wafer receiving groove.

12. The front opening wafer carrier of claim 9 wherein each column of cantilevered fingers cantilevers in a direction toward the other column of cantilevered fingers and wherein the wafer retainer comprises two columns of fixed wafer supports positioned intermediate the two columns of cantilevered fingers.

13. The front opening wafer carrier of claim 9 , wherein the wafer receiving groove portion includes a groove apex that is position

Assignees

• Adams Michael S
• Gregerson Barry
• Fuller Matthew A
• Entegris Inc

Inventors

• Adams Michael S
• Gregerson Barry
• Fuller Matthew A

Classifications

• H10P72/1922

  characterised by the construction of the closed carrier · CPC title

• H10P72/1921

  characterised by substrate supports · CPC title

• H10P72/1918

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H10P72/1916

  characterised by sealing arrangements · CPC title

• H10P72/1914

  characterised by locking systems · CPC title