Reduction of native oxides by annealing in reducing gas or plasma

Patent metadata

Field	Value
Publication number	US-9312137-B2
Application number	US-201314068906-A
Country	US
Kind code	B2
Filing date	Oct 31, 2013
Priority date	Oct 31, 2013
Publication date	Apr 12, 2016
Grant date	Apr 12, 2016

Abstract

Native oxide growth on germanium, silicon germanium, and InGaAs undesirably affects CET (capacitive equivalent thickness) and EOT (effective oxide thickness) of high-k and low-k metal-oxide layers formed on these semiconductors. Even if pre-existing native oxide is initially removed from the bare semiconductor surface, some metal oxide layers are oxygen-permeable in thicknesses below about 25 Å thick. Oxygen-containing species used in the metal-oxide deposition process may diffuse through these permeable layers, react with the underlying semiconductor, and re-grow the native oxide. To eliminate or mitigate this re-growth, the substrate is exposed to a gas or plasma reductant (e.g., containing hydrogen). The reductant diffuses through the permeable layers to react with the re-grown native oxide, detaching the oxygen and leaving the un-oxidized semiconductor. The reduction product(s) resulting from the reaction may then be removed from the substrate (e.g., driven off by heat).

First claim

What is claimed is:

1. A method of removing an oxide from a surface of a substrate, the method comprising:
forming a permeable layer over the surface;
exposing the substrate to a reductant; and
removing a reduction product from the surface;
wherein the reductant diffuses through the permeable layer to react with oxygen in the oxide on the surface; and
wherein the reduction product comprises the oxygen and at least part of the reductant.

2. The method of claim 1 , wherein forming the permeable layer comprises exposing the substrate to an oxidant.

3. The method of claim 1 , wherein the oxide is a result of oxidation of the surface by an oxidant diffused through the permeable layer.

4. The method of claim 1 , further comprising removing a pre-existing oxide from the surface before the permeable layer is formed.

5. The method of claim 1 , wherein at least one of the diffusing or the removing comprises heating the substrate.

6. The method of claim 1 , further comprising heating the substrate to between about 300 C and about 400 C.

7. The method of claim 1 , wherein the reductant comprises hydrogen.

8. The method of claim 1 , wherein the reductant comprises hydrogen (H 2 ) or ammonia (NH 3 ).

9. The method of claim 1 , wherein the reductant comprises a plasma-activated or plasma-generated species.

10. The method of claim 1 , wherein the surface comprises germanium, silicon germanium, or indium gallium arsenide.

11. The method of claim 1 , wherein the permeable layer comprises a metal oxide.

12. The method of claim 1 , wherein the reductant does not react with the permeable layer.

13. The method of claim 1 , wherein the forming, the exposing, the diffusing, or the removing is performed at an ambient pressure between about 0.1 Torr and about 5 Torr.

14. The method of claim 1 , wherein the substrate is exposed to the reductant for a duration between about 1 minute and about 60 minutes.

15. The method of claim 1 , wherein the permeable layer is between about 2 Å and about 40 Å thick.

16. The method of claim 1 , wherein the exposing, the diffusing, and the removing are performed after the permeable layer is fully formed.

17. The method of claim 1 , wherein the exposing, the diffusing, and the removing are performed between atomic layer deposition cycles of the forming of the permeable layer.

18. The method of claim 1 , further comprising forming an oxygen-impermeable layer over the permeable layer.

19. The method of claim 18 , wherein the substrate is exposed to the reductant as part of the forming of the oxygen-impermeable layer; and wherein the diffusing and removing are integrated into the forming of the oxygen-impermeable layer.

20. The method of claim 1 , further comprising:
forming an initial 1 to 10 permeable monolayers of an oxygen-impermeable layer over the permeable layer; and
forming a remainder of the oxygen-impermeable layer;
wherein the exposing, the diffusing, and the removing are performed between the forming of the initial 1 to 10 permeable monolayers and the forming of the remainder of the oxygen-impermeable layer.

Assignees

• Intermolecular Inc
• Intermolecular Inc

Inventors

• Greer Frank
• Joshi Amol
• Kashefi Kevin
• Lee Albert Sanghyup
• Pethe Abhijit
• Watanabe J

Classifications

• H10P14/6939 Primary

  characterised by the metal · CPC title

• H10P14/6339

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title

• H10D64/01352

  with sacrificial oxide · CPC title

• H10D64/01342

  by deposition, e.g. evaporation, ALD or laser deposition (H10D64/01344 takes precedence) · CPC title

• H10D64/01332 Primary

  Making the insulator · CPC title