Scanning ion beam deposition and etch
US-12176178-B2 · Dec 24, 2024 · US
US9312097B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9312097-B2 |
| Application number | US-201414513969-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 14, 2014 |
| Priority date | May 9, 2007 |
| Publication date | Apr 12, 2016 |
| Grant date | Apr 12, 2016 |
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A novel specimen holder for specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical support for specimen support devices and as well as electrical contacts to the specimens or specimen support devices.
Opening claim text (preview).
What is claimed is: 1. An electron microscope specimen holder comprising a body, a clipping means, and an interchangeable specimen support device, wherein the clipping means comprise an article of manufacture having a top surface, a bottom surface, a first end, a securing means, a second end, and at least one electrical contact integrated on and/or in the bottom surface of the article, wherein the interchangeable specimen support device is mechanically secured between the bottom surface of the clipping means and the body, and wherein the interchangeable specimen support device is selected from the group consisting of a window device and a temperature control device. 2. The electron microscope specimen holder of claim 1 , wherein the electron microscope specimen holder further comprises at least one guide mechanism wherein the interchangeable specimen support device is aligned in the body by the at least one guide mechanism. 3. The electron microscope specimen holder of claim 1 , wherein the interchangeable specimen support device comprises a temperature control device. 4. The electron microscope specimen holder of claim 3 , wherein the temperature control device is used to control the temperature around a specimen positioned on the interchangeable specimen support device. 5. The electron microscope specimen holder of claim 3 , wherein the temperature control device comprises: (a) a membrane comprising at least one membrane observation region, said membrane having a top side and a bottom side; (b) at least two conductive heat source elements in contact with the top side of the membrane, wherein the at least two heat source elements flank the at least one membrane observation region, wherein the membrane observation region is heatable, and wherein the membrane and the at least two heat source elements are both conductive, ceramic materials. 6. The electron microscope specimen holder of claim 5 , wherein the at least two heat source elements are relatively more conductive than the membrane. 7. The electron microscope specimen holder of claim 5 , wherein the at least two heat source elements are arranged so that current can be forced through the membrane thus allowing Joule heating to occur in the membrane observation region. 8. The electron microscope specimen holder of claim 5 , wherein both the membrane and the at least two heat source elements are silicon carbide and have different conductivities. 9. The electron microscope specimen holder of claim 1 , wherein the interchangeable specimen support device is mechanically secured between the clipping means and the body without disassembly of or soldering of the specimen holder. 10. The electron microscope specimen holder of claim 1 , wherein an electrical contact to the specimen support device is provided once the specimen support device is mechanically secured and aligned. 11. The electron microscope specimen holder of claim 9 , wherein disassembly comprises removing screws or other small parts. 12. The electron microscope specimen holder of claim 1 , wherein the securing means comprise a pivot positioned between the first end and the second end of the article, wherein the second end of the article is pivotally raised by depressing the top surface of the first end of the article for insertion of the interchangeable specimen support device between the bottom surface of the second end of the article and a top surface of the body, and wherein the article is pivotally lowered such that the interchangeable specimen support device is mechanically secured. 13. The electron microscope specimen holder of claim 12 , wherein at least one electrical lead of the interchangeable specimen support device substantially contacts at least one electrical contact of the article. 14. The electron microscope specimen holder of claim 1 , wherein the securing means comprise a locking screw, wherein the interchangeable specimen support device is inserted between the bottom surface of the second end of the article and a top surface of the body by turning the locking screw in a direction such that the article is raised relative to the body, and wherein the article is lowered by turning the locking screw in the opposite direction such that the interchangeable specimen support device is mechanically secured. 15. The electron microscope specimen holder of claim 14 , wherein at least one electrical lead of the interchangeable specimen support device substantially contacts at least one electrical contact of the article. 16. A method of repeatedly mounting and exchanging interchangeable specimen support devices in an electron microscope specimen holder, wherein said electron microscope specimen holder comprises a body, a clipping means, and the specimen support device, wherein the clipping means comprise an article of manufacture having a top surface, a bottom surface, a first end, a securing means, a second end, and at least one electrical contact integrated on and/or in the bottom surface of the article, and wherein the interchangeable specimen support device is selected from the group consisting of a window device and a temperature control device, said method comprising: inserting and mechanically securing the specimen support device between the bottom surface of the clipping means and the body without disassembly of or soldering of the specimen holder. 17. The method of claim 16 , wherein the electron microscope specimen holder further comprises at least one guide mechanism, wherein the at least one guide mechanism permits the insertion and alignment of the interchangeable specimen support device in the body of the specimen holder. 18. The method of claim 16 , wherein the interchangeable specimen support device comprises a temperature control device. 19. The electron microscope specimen holder of claim 17 , wherein the temperature control device is used to control the temperature around a specimen positioned on the specimen control device.
Holding mechanisms · CPC title
Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title
Controlling environment of sample · CPC title
specially adapted for studying electrical or magnetical properties of objects · CPC title
Preparing specimens for investigation {including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q}(mounting specimens on microscopic slides G02B21/34; means for supporting the objects or the materials to be analysed in electron microscopes H01J37/20 {; laboratory gas handling apparatus B01L5/00}) · CPC title
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