Monitoring leveler concentrations in electroplating solutions

Patent metadata

Field	Value
Publication number	US-9309605-B2
Application number	US-201213711254-A
Country	US
Kind code	B2
Filing date	Dec 11, 2012
Priority date	Dec 12, 2011
Publication date	Apr 12, 2016
Grant date	Apr 12, 2016

Abstract

Provided herein are methods and apparatus for determining leveler concentration in an electroplating solution. The approach allows the concentration of leveler to be detected and measured, even at very low leveler concentrations. According to the various embodiments, the methods involve providing an electrode with a metal surface, exposing the electrode to a pre-acceleration solution with at least one accelerator, allowing the surface of the electrode to become saturated with accelerator, measuring an electrochemical response while plating the electrode in a solution, and determining the concentration of leveler in the solution by comparing the measured electrochemical response to a model relating leveler concentration to known electrochemical responses. According to other embodiments, the apparatus includes an electrode, a measuring apparatus or an electrochemical cell configured to measure an electrochemical response, and a controller designed to carry out the method outlined above.

First claim

What is claimed is:

1. A method of determining leveler concentration in a test solution, comprising:
(a) providing an electrode having a metal surface;
(b) exposing the electrode to a pre-acceleration solution comprising at least one accelerator compound and allowing the surface of the electrode to become substantially saturated with the at least one accelerator compound before removing the electrode from the pre-acceleration solution;
(c) exposing the substantially saturated electrode to the test solution and measuring an electrochemical response while plating the substantially saturated electrode in the test solution, the test solution having an unknown concentration of leveler; and
(d) determining the concentration of leveler in the test solution by comparing the electrochemical response obtained in operation (c) to a model relating leveler concentration to known electrochemical responses.

2. The method of claim 1 , wherein the electrode is a rotating disk electrode.

3. The method of claim 2 , wherein the rotating disk electrode rotates between about 100-5,000 rotations per minute during operation (c).

4. The method of claim 1 , wherein the model in operation (d) is generated by performing operations (a)-(c) with solutions having known leveler concentrations.

5. The method of claim 1 , wherein the electrochemical response is measured through galvanometric sweeping, stripping or AC impedance.

6. The method of claim 1 , wherein operation (c) further comprises:
(i) polarizing the substantially saturated electrode with a constant current; and
(ii) measuring the substantially saturated electrode's potential over time.

7. The method of claim 1 , wherein operation (c) further comprises:
(i) polarizing the substantially saturated electrode with constant potential; and
(ii) measuring the current to the substantially saturated electrode or the current density over time.

8. The method of claim 1 , wherein the pre-acceleration solution comprises 0.05 to 10 g/L accelerator compound in deionized water or weak acid.

9. The method of claim 1 , further comprising:
applying a current to the electrode during operation (b), wherein the current density is greater than 5 mA/cm 2 .

10. The method of claim 1 , wherein a boundary layer thickness in the test solution near the substantially saturated electrode in operation is less than about 60 microns.

11. The method of claim 1 , further comprising:
regenerating the electrode to its starting condition.

12. The method of claim 1 , wherein the method is performed outside a primary plating apparatus.

13. The method of claim 1 , wherein the electrode is plated in a pre-plating solution comprising the same metal ions as those present in the test solution.

14. The method of claim 13 , wherein the pre-plating solution does not contain any leveler species which are the same as a leveler species whose concentration is sought to be characterized in operation (d).

15. The method of claim 13 , wherein the pre-plating solution does not contain any leveler.

16. The method of claim 1 , wherein the method is repeated between 1 and 10 times per day per test solution.

17. The method of claim 1 , further comprising:
rinsing the substantially saturated electrode before operation (c) to remove unadsorbed accelerator compound.

18. A method of determining leveler concentration in a solution, comprising:
(a) providing an electrode having a metal surface;
(b) exposing the electrode to a pre-acceleration solution comprising at least one accelerator compound and allowing the surface of the electrode to become substantially saturated with the at least one accelerator compound;
(c) providing a first solution with a known concentration of leveler and a second solution with an unknown concentration of leveler;
(d) preparing a third solution by adding an amount of the second solution to the first solution;
(e) measuring an electrochemical response while plating the electrode in the third solution;
(f) determining the concentration of leveler in the third solution by comparing the electrochemical response obtained in operation (e) to a model relating leveler concentration to known electrochemical responses; and
(g) determining the concentration of leveler in the second solution by relating the known concentration of leveler in the first solution, the determined concentration of leveler in the third solution and the amount of second solution added in operation (d).

19. The method of claim 18 , wherein the second solution comprises a sample of solution taken from an electroplating apparatus.

20. The method of claim 18 , wherein the concentration of leveler in the second solution is determined by a controller programmed with instructions to calculate the concentration of leveler in the second solution based on the concentration of leveler in the first solution, the amount of second solution added in operation (d) and the electrochemical response obtained in operation (e).

21. The method of claim 18 , further comprising:
rinsing the electrode before operation (c) to remove unadsorbed accelerator compound.

22. The method of claim 18 , wherein two or more solutions used in the method are provided in different vessels.

23. The method of claim 22 , wherein the vessels are provided on a conveyance mechanism.

24. The method of claim 22 , wherein the vessels are stationary and the electrode is movable with respect to the vessels.

Assignees

• Novellus Systems Inc

Inventors

• Mayer Steven T

Classifications

• C25D21/14 Primary

  Controlled addition of electrolyte components · CPC title

• G01N27/26

  by investigating electrochemical variables; by using electrolysis or electrophoresis · CPC title

• G01N27/413

  Concentration cells using liquid electrolytes {measuring currents or voltages in voltaic cells} · CPC title