Laser processing system having a laser shield and a transmission window

Patent metadata

Field	Value
Publication number	US-9308601-B2
Application number	US-201313922158-A
Country	US
Kind code	B2
Filing date	Jun 19, 2013
Priority date	Jun 21, 2012
Publication date	Apr 12, 2016
Grant date	Apr 12, 2016

Abstract

A processing system for micro processing. The processing system comprises a laser configured to generate a laser beam for performing laser processing within a preparation chamber. The processing system further comprises a transmission window, configured such that the laser beam enters into the preparation chamber through the transmission window. The processing system further comprises a fastening flange for fixing the transmission window relative to the preparation chamber, and a laser shield configured to provide, in a first arrangement of the laser shield, glare protection from a passage of the laser beam from a laser beam housing to the preparation chamber. The laser shield is movably mounted for movement between the first arrangement and a second arrangement of the laser shield, wherein in the second arrangement, at least one of the transmission window and the fastening flange is separable from the processing system.

First claim

What is claimed is:

1. A processing system for micro processing by laser processing of an object, the processing system comprising:
a preparation chamber;
a laser configured to generate a laser beam for performing the laser processing within the preparation chamber;
a transmission window, configured such that the laser beam enters into the preparation chamber through the transmission window;
a fastening flange for fixing the transmission window relative to the preparation chamber;
a laser beam housing, configured such that a portion of the laser beam, which is located outside of the preparation chamber, extends within the laser beam housing;
a laser shield configured to provide, in a first arrangement of the laser shield, glare protection from a passage of the laser beam from the laser beam housing to the preparation chamber;
wherein the laser shield is movably mounted for movement between the first arrangement and a second arrangement of the laser shield, wherein in the second arrangement, at least one of the transmission window and the fastening flange is separable from the processing system.

2. The processing system of claim 1 , further comprising:
an electrical connector, arranged stationary relative to at least one of the laser beam housing and the preparation chamber; and
an electrical mating connector;
wherein the laser shield is configured such that a connection of the mating connector to the connector requires the first arrangement of the laser shield.

3. The processing system according to claim 1 , further comprising a light optical component, which is attached to the laser beam housing, wherein at least a portion of the light optical component is arranged in the laser beam.

4. The processing system according to claim 1 , wherein the laser shield is movably mounted such that the laser shield is movable from the first arrangement to an arrangement, in which the light optical component is separable from the processing system.

5. The processing system according to claim 1 ,
wherein the fastening flange comprises a first fastening system for fastening the fastening flange to the preparation chamber;
wherein the laser beam housing is abuttingly attached to the preparation chamber and comprises a cutout for at least partially receiving the fastening flange, wherein the laser beam housing leaves a working space of the first fastening system; and
wherein the laser shield comprises a cutout for at least partially receiving the first fastening system in the first arrangement of the laser shield.

6. The processing system according to claim 1 , further comprising a sealing element, which is arranged between a sealing surface of the transmission window and a sealing surface of the preparation chamber.

7. The processing system according to claim 6 , further comprising a sealing element, which is arranged between a sealing surface of the transmission window and a sealing surface of the preparation chamber;
wherein the sealing surface of the transmission window is arranged at a wide side surface of the transmission window.

8. The processing system according to claim 1 , wherein the transmission window comprises a first abutting surface on a first wide side surface of the transmission window and a second abutting surface on a second wide side surface of the transmission window;
wherein the transmission window is fastened to the fastening flange at the first and second abutting surfaces.

9. The processing system according to claim 1 , further comprising an optical measuring system, which is at least partially received within the laser beam housing, wherein the optical measuring system is configured to measure parameters of the laser beam.

10. The processing system according to claim 1 , wherein the processing system further comprises a detector system, which is at least partially received within the laser beam housing;
wherein at least one of the following holds:
the detector system is configured to detect light emitted from an interior of the preparation chamber; and
the detector system is configured for an optical endpoint detection of the laser processing.

11. The processing system according to claim 1 , wherein the fastening flange comprises an abutting surface, which abuts against the preparation chamber.

12. The processing system according to claim 1 , wherein the fastening flange is arranged outside of the preparation chamber.

13. The processing system according to claim 1 ,
wherein the fastening flange comprises a first fastening system for fastening the fastening flange to the preparation chamber;
wherein the fastening flange further comprises a second fastening system for fastening the transmission window to the fastening flange; and
wherein the fastening flange is configured such that the first fastening system is releasable with the second fastening system remaining fastened.

14. The processing system according to claim 1 ,
wherein the laser shield comprises a guiding surface, which faces the laser beam, and the laser beam housing comprises a guiding surface, which faces away from the laser beam;
wherein the guiding surface of the laser shield and the guiding surface of the laser beam housing are configured as a form-fitting guide for movably guiding the laser shield.

15. A processing system for micro processing by laser processing of an object, the processing system comprising:
a preparation chamber;
a laser configured to generate a laser beam for performing the laser processing within the preparation chamber;
a transmission window, configured such that the laser beam enters into the preparation chamber through the transmission window;
a fastening flange for fixing the transmission window relative to the preparation chamber;
a laser beam housing, configured such that a portion of the laser beam, which is located outside of the preparation chamber, extends within the laser beam housing;
a laser shield configured to provide, in a first arrangement of the laser shield, glare protection from a passage of the laser beam from the laser beam housing to the preparation chamber;
wherein the laser shield is movably mounted for movement between the first arrangement and a second arrangement of the laser shield,
an electrical connector, arranged stationary relative to at least one of the laser beam housing and the preparation chamber; and
an electrical mating connector;
wherein the laser shield is configured such that a connection of the mating connector to the connector requires the first arrangement of the laser shield.

16. The processing system according to claim 15 , wherein the laser shield comprises a through-recess;
wherein in the first arrangement of the laser shield, the mating connector is connectable to the connector by inserting the mating connector through the through-recess; and
wherein the laser shield is configured such that a deviation from the first arrangement of the laser shield blocks the mating connector from being connected to the connector.

17. The processing system according to claim 15 ,
wherein the fastening flange comprises a first fastening system for fastening the fastening flange to the preparation chamber;
wherein the laser beam housing is abuttingly attached to the preparation chamber and comprises a cutout for at least partially receiving the fastening flange, wherein the laser beam housing leaves a working space of the first fastening system; and
wherein the laser shield comprises a cutout for at least partially receiving the first fastening system in the first arrangement of the laser shield.

Assignees

• Zeiss Carl Microscopy Gmbh

Inventors

• Himmelsbach Volker
• Alscher Sebastian
• Doemer Holger
• Stenke Bernd
• Spittler-Herrmann Ulrich

Classifications

• B23K26/03

  Observing, e.g. monitoring, the workpiece · CPC title

• B23K26/70

  Auxiliary operations or equipment · CPC title

• B23K26/427

  Operations & Transport · mapped topic

• B23K26/12

  in a special environment or atmosphere, e.g. in an enclosure · CPC title

• H01J37/3056

  for microworking, e. g. etching of gratings or trimming of electrical components · CPC title