Photoconductive antenna, terahertz wave generating device, camera, imaging device, and measuring device

Patent metadata

Field	Value
Publication number	US-9306112-B2
Application number	US-201213717835-A
Country	US
Kind code	B2
Filing date	Dec 18, 2012
Priority date	Dec 20, 2011
Publication date	Apr 5, 2016
Grant date	Apr 5, 2016

Abstract

A photoconductive antenna is adapted to generate terahertz waves when irradiated by pulsed light. The photoconductive antenna includes first and second conductive layers, a semiconductor layer positioned between the first and second conductive layers, first and second electrodes, and a dielectric layer. The semiconductor layer is made of a semiconductor material having a carrier density that is lower than a carrier density of the semiconductor material of the first conductive layer or the second conducive layer. The first and second electrodes are electrically connected to the first and second conductive layers, respectively. The second electrode has an aperture through which the pulsed light passes. The dielectric layer is made of a dielectric material, and is in contact with a surface of the semiconductor layer having a normal direction extending orthogonal to a lamination direction of the first conductive layer, the semiconductor layer, and the second conductive layer.

First claim

What is claimed is:

1. A photoconductive antenna adapted to generate terahertz waves when irradiated by pulsed light, the photoconductive antenna comprising:
a first conductive layer made of a semiconductor material containing a first conductive type impurity;
a second conductive layer made of a semiconductor material containing a second conductive type impurity different from the first conductive type impurity;
a semiconductor layer positioned between the first conductive layer and the second conductive layer in a lamination direction in which the first conductive layer, the semiconductor layer, and the second conductive layer are stacked, the semiconductor layer being made of a semiconductor material having a carrier density that is lower than a carrier density of the semiconductor material of the first conductive layer or a carrier density of the semiconductor material of the second conducive layer;
a first electrode electrically connected to the first conductive layer;
a second electrode electrically connected to the second conductive layer, and having an aperture through which the pulsed light passes; and
a dielectric layer made of a dielectric material, and being in contact with a surface of the semiconductor layer having a normal direction extending orthogonal to the lamination direction, the dielectric layer having first and second edges that define an outer periphery of the dielectric layer as viewed in the lamination direction such that a width between the first and the second edges as viewed in the lamination direction gradually increases as a distance between the width and the semiconductor layer increases.

2. The photoconductive antenna according to claim 1 , wherein
a relative dielectric constant of the dielectric material is higher than a relative dielectric constant of the semiconductor material of the semiconductor layer.

3. The photoconductive antenna ac cording to claim 1 , further comprising
a covering layer covering a part of the surface of the semiconductor layer which is not in contact with the dielectric layer.

4. The photoconductive antenna according to claim 1 , further comprising
a first reflective layer in contact with a bottom surface of the dielectric layer, and configured and arranged to reflect the terahertz waves.

5. The photoconductive antenna according to claim 1 , wherein
the first electrode is configured and arranged to reflect the terahertz waves.

6. The photoconductive antenna according to claim 1 , further comprising
a second reflective layer in contact with a top surface of the dielectric layer, and configured and arranged to reflect the terahertz waves.

7. The photoconductive antenna according to claim 1 , wherein
the second electrode is configured and arranged to reflect the terahertz waves.

8. The photoconductive antenna according to claim 1 , wherein
the second conductive layer includes a thin walled part having a thickness in the lamination direction that is thinner than a part of the second conductive layer disposed outside of the aperture as viewed along the lamination direction.

9. The photoconductive antenna according to claim 1 , wherein
the semiconductor material of the semiconductor layer is a III-V compound.

10. A terahertz wave generating device comprising:
the photoconductive antenna according to claim 1 ; and
a light source configured and arranged to generate the pulsed light.

11. A terahertz wave generating device comprising:
the photoconductive antenna according to claim 2 ; and
a light source configured and arranged to generate the pulsed light.

12. A camera comprising:
the photoconductive antenna according to claim 1 ;
a light source configured and arranged to generate the pulsed light; and
a terahertz wave detecting unit configured and arranged to detect the terahertz waves emitted from the photoconductive antenna and reflected by an object.

13. A camera comprising:
the photoconductive antenna according to claim 2 ;
a light source configured and arranged to generate the pulsed light; and
a terahertz wave detecting unit configured and arranged to detect the terahertz waves emitted from the photoconductive antenna and reflected by an object.

14. An imaging device comprising:
the photoconductive antenna according to claim 1 ;
a light source configured and arranged to generate the pulsed light;
a terahertz wave detecting unit configured and arranged to detect the terahertz waves emitted from the photoconductive antenna and transmitted through an object or reflected by the object; and
an image forming unit configured and arranged to generate an image of the object based on detection results of the terahertz wave detecting unit.

15. The imaging device according to claim 14 , wherein
the image forming unit is configured and arranged to generate the image of the object using intensity of the terahertz waves detected by the terahertz wave detecting unit.

16. An imaging device comprising:
the photoconductive antenna according to claim 2 ;
a light source configured and arranged to generate the pulsed light;
a terahertz wave detecting unit configured and arranged to detect the terahertz waves emitted from the photoconductive antenna and transmitted through an object or reflected by the object; and
an image forming unit configured and arranged to generate an image of the object based on detection results of the terahertz wave detecting unit.

17. The imaging device according to claim 16 , wherein
the image forming unit is configured and arranged to generate the image of the object using intensity of the terahertz waves detected by the terahertz wave detecting unit.

18. A measuring device comprising:
the photoconductive antenna according to claim 1 ;
a light source configured and arranged to generate the pulsed light;
a terahertz wave detecting unit configured and arranged to detect the terahertz waves emitted from the photoconductive antenna and transmitted through an object or reflected by the object; and
a measuring unit configured and arranged to measure the object based on detection results of the terahertz wave detecting unit.

19. The measuring device according to claim 18 , wherein
the measuring unit is configured and arranged to measure the object using intensity of the terahertz waves detected by the terahertz wave detecting unit.

20. A measuring device comprising:
the photoconductive antenna according to claim 2 ;
a light source configured and arranged to generate the pulsed light;
a terahertz wave detecting unit configured and arranged to detect the terahertz waves emitted from the photoconductive antenna and transmitted through an object or reflected by the object; and
a measuring unit configured and arranged to measure the object based on detection results of the terahertz wave detecting unit.

21. The measuring device according to claim 20 , wherein
the measuring unit is configured and arranged to measure the object using intensity of the terahertz waves detected by the terahertz wave detecting unit.

Assignees

• Seiko Epson Corp

Inventors

• Tomioka Hiroto

Classifications

• G01S17/89

  for mapping or imaging · CPC title

• G01N21/3581

  using far infrared light; using Terahertz radiation · CPC title

• G01S13/89

  for mapping or imaging · CPC title

• H10F55/20

  wherein the electric light source controls the radiation-sensitive semiconductor devices, e.g. optocouplers · CPC title

• H10F39/806

  Optical elements or arrangements associated with the image sensors · CPC title