Substrate processing system
US-2015132086-A1 · May 14, 2015 · US
Substrate processing system
US9305819B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9305819-B2 |
| Application number | US-201414540124-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 13, 2014 |
| Priority date | Nov 14, 2013 |
| Publication date | Apr 5, 2016 |
| Grant date | Apr 5, 2016 |
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- Title
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Abstract
Official abstract text for this publication.
A first transfer apparatus unloads and transfers substrates from a cassette. A first accommodating unit accommodates the substrates. First substrate processing units divided into at least two groups and arranged in a height direction performs a process to the substrates. Second accommodating units respectively corresponding to the groups are arranged to be parallel with the first accommodating unit in the height direction. Second transfer apparatuses respectively corresponding to the groups unload and transfer the substrates from the second accommodating units corresponding to the same groups into the first substrate processing units of the same groups. Second substrate processing units respectively corresponding to the groups are arranged to be parallel with the first and second accommodating units in the height direction. A delivery apparatus delivers the substrates between the first and second accommodating units and transfers the substrates between the first accommodating unit and the second substrate processing units.
First claim
Opening claim text (preview).
We claim: 1. A substrate processing system comprising: a first transfer apparatus configured to unload substrates from a cassette that accommodates the substrates and configured to transfer the unloaded substrates in a transfer direction; at least one first accommodating unit configured to accommodate the substrates transferred by the first transfer apparatus; multiple first substrate processing units, which are divided into at least two groups and arranged in a height directi…
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Inventors
Classifications
Electricity · mapped topic
Electricity · mapped topic
- H10P72/3411Primary
Electricity · mapped topic
Electricity · mapped topic
- H01L21/67778Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9305819B2 cover?
- A first transfer apparatus unloads and transfers substrates from a cassette. A first accommodating unit accommodates the substrates. First substrate processing units divided into at least two groups and arranged in a height direction performs a process to the substrates. Second accommodating units respectively corresponding to the groups are arranged to be parallel with the first accommodating …
- Who is the assignee on this patent?
- Tokyo Electron Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/3411. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Apr 05 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).