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Substrate processing system and substrate processing program
US9303976B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9303976-B2 |
| Application number | US-201213456458-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 26, 2012 |
| Priority date | Apr 28, 2011 |
| Publication date | Apr 5, 2016 |
| Grant date | Apr 5, 2016 |
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Abstract
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According to one embodiment, a substrate processing system includes a measuring unit, a data processing unit, and a processing unit. The measuring unit is configured to measure information relating to a thickness dimension of a substrate. The substrate includes a light emitting unit and a wavelength conversion unit. The wavelength conversion unit includes a phosphor. The data processing unit is configured to determine processing information relating to a thickness direction of the wavelength conversion unit based on the measured information relating to the thickness dimension of the substrate and based on information relating to a characteristic of light emitted from the light emitting unit. The processing unit is configured to perform processing of the wavelength conversion unit based on the determined processing information.
First claim
Opening claim text (preview).
What is claimed is: 1. A substrate processing system, comprising: a measuring unit configured to measure information relating to a thickness dimension of a substrate, the substrate including a light emitting device having a plurality of light emitting units and a wavelength conversion unit, the wavelength conversion unit including a phosphor; a data processing unit configured to: determine processing information relating to a thickness dimension of the wavelength conversion uni…
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Electricity · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
- G01B11/06Primary
Physics · mapped topic
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Frequently asked questions
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- What does patent US9303976B2 cover?
- According to one embodiment, a substrate processing system includes a measuring unit, a data processing unit, and a processing unit. The measuring unit is configured to measure information relating to a thickness dimension of a substrate. The substrate includes a light emitting unit and a wavelength conversion unit. The wavelength conversion unit includes a phosphor. The data processing unit is…
- Who is the assignee on this patent?
- Uekita Masahiro, Koizumi Hiroshi, Naka Tomomichi, and 3 more
- What technology area does this patent fall under?
- Primary CPC classification G01B11/06. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Apr 05 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).