Device and method for detecting energy beam
US-11709098-B2 · Jul 25, 2023 · US
US9291499B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9291499-B2 |
| Application number | US-201414297153-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 5, 2014 |
| Priority date | Jun 5, 2013 |
| Publication date | Mar 22, 2016 |
| Grant date | Mar 22, 2016 |
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A radiometer includes a substrate; a radiation absorber disposed on the substrate to absorb radiation; a thermal member disposed on the substrate to change electrical resistance in response to a change in temperature of the radiometer; and a thermal link to connect the radiometer to a thermal reference, wherein the radiation absorber, the thermal member, or a combination comprising at least one of the foregoing includes a plurality of carbon nanotubes, the carbon nanotubes being mutually aligned with respect to the substrate, and the radiometer being configured to detect optical power.
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What is claimed is: 1. A radiometer comprising: a substrate; a radiation absorber disposed on the substrate to absorb radiation; a thermal member disposed on the substrate to change electrical resistance in response to a change in temperature of the radiometer; and a thermal link to connect the radiometer to a thermal reference, wherein the radiation absorber, the thermal member, or a combination comprising at least one of the foregoing comprises a plurality of carbon nanotubes, the carbon nanotubes being mutually aligned with respect to the substrate, and the radiometer being configured to detect optical power. 2. The radiometer of claim 1 , further comprising a thermal regulator disposed on the substrate, wherein the thermal regulator comprises a metal, a plurality of carbon nanotubes that are mutually aligned with respect to the substrate, or a combination comprising at least one of the foregoing. 3. The radiometer of claim 2 , wherein the radiation absorber, the thermal member, and the thermal regulator are separately disposed on the substrate. 4. The radiometer of claim 2 , wherein the radiation absorber and the thermal regulator are integrally disposed on the substrate as a single member, and the single member and the thermal member are separately disposed on the substrate. 5. The radiometer of claim 1 , wherein the thermal member comprises the plurality of carbon nanotubes, and the radiation absorber comprises a material having a selected optical absorption from 200 nm to 500 μm. 6. The radiometer of claim 2 , wherein the radiation absorber comprises the plurality of carbon nanotubes, and the thermal member comprises a metal. 7. The radiometer of claim 6 , wherein the thermal member further comprises a plurality of carbon nanotubes. 8. The radiometer of claim 2 , wherein the carbon nanotubes are vertically aligned with respect to the substrate. 9. The radiometer of claim 1 , wherein the radiation absorber has a reflectance less than or equal to 1×10 −3 , based on a total hemispherical reflectance, at a wavelength from 350 nm to 2400 nm. 10. The radiometer of claim 1 , wherein the radiation absorber has an optical absorptance greater than or equal to 0.999 for radiation comprising a wavelength from 200 nm to 500 μm. 11. The radiometer of claim 1 , wherein a time constant of the radiometer is less than 1 millisecond (ms). 12. The radiometer of claim 2 , wherein the change in temperature of the thermal member occurs in response to absorption of radiation by the absorber, to heating by the thermal regulator, or a combination comprising at least one of the foregoing. 13. The radiometer of claim 1 , wherein the radiometer is configured to detect the change in temperature at a temperature of the radiometer that is less than or equal to 80 Kelvin. 14. The radiometer of claim 1 , wherein the radiometer is configured to detect absorption of radiation for a radiation power less than or equal to 500 watts per square centimeter (W/cm 2 ). 15. The radiometer of claim 1 , wherein the thermal member has a unitless sensitivity having a magnitude that is greater than or equal to 1.5 at a temperature of 4 K. 16. A radiometer comprising: a substrate; a radiation absorber disposed on the substrate to absorb radiation and comprising a first plurality of carbon nanotubes; a thermal member disposed on the substrate to change electrical resistance in response to a change in temperature of the radiometer; a thermal regulator disposed on the substrate to heat the radiometer and comprising a metal and a second plurality of carbon nanotubes; and a thermal link to connect the radiometer to a thermal reference, wherein the first plurality of carbon nanotubes and the second plurality of carbon nanotubes are mutually aligned with respect to the substrate, and the radiometer is configured to detect optical power. 17. The radiometer of claim 16 , wherein the radiation absorber and the thermal regulator are integrally disposed on the substrate as a single member. 18. A process for acquiring optical power, the process comprising: providing a radiometer comprising: a substrate; a radiation absorber disposed on the substrate to absorb radiation; a thermal member disposed on the substrate to change electrical resistance in response to a change in temperature of the radiometer; a thermal regulator disposed on the substrate to heat the radiometer; and a thermal link to connect the radiometer to a thermal reference; absorbing optical radiation by the radiation absorber during an absorption time; and determining the optical power of the optical radiation, based on absorption of the optical radiation by the radiation absorber, wherein the radiation absorber, the thermal member, the thermal regulator, or a combination comprising at least one of the foregoing comprises a plurality of carbon nanotubes, the carbon nanotubes being mutually aligned with respect to the substrate, and the radiometer being configured to detect optical power. 19. The process of claim 18 , further comprising: maintaining a temperature of the radiometer at substantially a constant temperature by: applying, in an absence of the absorption time, electrical power at a first power level to the thermal regulator; and decreasing, during the absorption time, the electrical power applied to the thermal regulator from the first power level to a second power level; and determining a difference in the first power level and the second power level to acquire the optical power of the optical radiation. 20. The process of claim 18 , further comprising: maintaining, during a quiescent time: a temperature of the radiometer substantially at a zeroth temperature and a resistance of the thermal member substantially at a zeroth resistance corresponding to the zeroth temperature; applying, during the quiescent time and the absorption time, electrical power at a zeroth power level to the thermal regulator; obtaining, during the absorption time: the temperature of the radiometer at a first temperature and a resistance of the thermal member at a first resistance corresponding to the first temperature; increasing, during a heating time, the electrical power from the zeroth power level to a first power level to obtain: the temperature of the radiometer at the first temperature and the resistance of the thermal member at the first resistance; and determining a difference in the zeroth power level and the first power level, a difference in the zeroth resistance and the first resistance, or a combination comprising at least one of the foregoing to acquire the optical power of the optical radiation.
using radiation pressure or radiometer effect · CPC title
having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid · CPC title
Imaging · CPC title
Carbon nanotubes, CNTs · CPC title
using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices · CPC title
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