Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
US9291375B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9291375-B2 |
| Application number | US-201213525634-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 18, 2012 |
| Priority date | Dec 16, 2009 |
| Publication date | Mar 22, 2016 |
| Grant date | Mar 22, 2016 |
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A thermoelectric heat exchanger for heating or cooling a medium, that includes at least one first tube for carrying a first medium and at least one second tube for carrying the first medium. The second tube being arranged substantially parallel to the first tube. The thermoelectric heat exchanger also has a casing element that is interposed between the first and the second tube, the casing element comprising a first casing part that is connectable to the first tube and at least one second casing part that forms a fluid channel for a second medium. A thermoelectric element for heating or cooling the first or second medium is interposed between the first and second casing part, the thermoelectric element being closed relative to the first and/or the second medium in a fluid-tight manner via the casing element.
Opening claim text (preview).
What is claimed is: 1. A thermoelectric heat exchanger for heating or cooling a medium, the thermoelectric heat exchanger comprising: at least one first tube configured to carry a first medium; at least one second tube configured to carry the first medium, the second tube being arranged substantially parallel to the first tube; a casing element that is disposed between the first tube and the second tube, the casing element comprising a first casing part that is connectable to the first tube and at least one second casing part that forms a fluid channel for a second medium; and a thermoelectric element for heating or cooling the first medium or the second medium, the thermoelectric element being disposed between the first casing part and the second casing part, the thermoelectric element being sealed fluid-tight against the first medium and/or the second medium via the casing element, wherein the second casing part has a ribbing that is manufactured from a metallic material, and wherein the ribbing has upward bends that are embedded into another material of the second casing part. 2. The thermoelectric heat exchanger according to claim 1 , wherein the second casing part has a plurality of openings, which form the fluid channel for the second medium. 3. The thermoelectric heat exchanger according to claim 1 , wherein the first tube has at least one recess that permits direct contact between the first medium and the first casing part when the first medium flows through the first tube. 4. The thermoelectric heat exchanger according to claim 1 , wherein the casing element has a third casing part that is connectable to the second tube, wherein another thermoelectric element is disposed between the third casing part and the second casing part, and wherein the additional thermoelectric element is sealed fluid-tight against the first medium and the second medium. 5. The thermoelectric heat exchanger according to claim 1 , wherein the casing element has at least one casing part that is made of a ceramic material and/or has a coating that includes a ceramic material. 6. The thermoelectric heat exchanger according to claim 1 , wherein at least one of the first casing part or the second casing part is manufactured from a plastic material. 7. The thermoelectric heat exchanger according to claim 1 , wherein the casing element has a heat exchange region in which an exchange of heat between the first medium and the second medium is enabled without intervention by the thermoelectric element. 8. The thermoelectric heat exchanger according to claim 2 , wherein the plurality of openings are oblong holes.
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