Reticle transfer system and method

Patent metadata

Field	Value
Publication number	US-9287150-B2
Application number	US-201213648034-A
Country	US
Kind code	B2
Filing date	Oct 9, 2012
Priority date	Oct 9, 2012
Publication date	Mar 15, 2016
Grant date	Mar 15, 2016

Abstract

A fabrication system comprises a global system comprising a plurality of stockers and a global transportation system connected to the stockers, a local system coupled to the global system through the global transportation system, wherein the local system comprises a first buffer located at a boundary between the global system and the local system, a plurality of lithography apparatuses coupled to the first buffer through a local transportation system and an empty pod buffer.

First claim

What is claimed is:

1. A fabrication system comprising:
a global system comprising a plurality of stockers and a global transportation system connected to the stockers;
a local system coupled to the global system through the global transportation system, wherein the local system comprises:
a first buffer located at a boundary between the global system and the local system;
a plurality of lithography apparatuses coupled to the first buffer through a local transportation system;
an aisle, wherein a first terminal of the aisle is connected to the first buffer;
a first rail coupled between the first buffer and a first group of lithography apparatuses;
a second rail coupled between the first buffer and a second group of lithography apparatuses, wherein the first group of lithography apparatuses and the second group of lithography apparatuses are on opposite sides of the aisle;
a second buffer connected to a second terminal of the aisle;
an internal buffer located between the first buffer and the second buffer, wherein the internal buffer is adjustable; and
an empty pod buffer.

2. The fabrication system of claim 1 , wherein:
the global transportation system includes a plurality of rail loops connected between the plurality of stockers and the local system.

3. The fabrication system of claim 1 , wherein the lithography apparatus is a scanner.

4. The fabrication system of claim 1 , further comprising:
a conveyor coupled between the local transportation system and the lithography apparatus;
a robot configured to move a reticle between the conveyor and the lithography apparatus; and
a reticle port embedded in the lithography apparatus, wherein the robot is coupled between the reticle port and the conveyor.

5. The fabrication system of claim 4 , wherein:
the robot is a 3-axis reticle handling arm.

6. The fabrication system of claim 1 , further comprising:
a first service area located from the first buffer to the internal buffer; and
a second service area located from the internal buffer to the second buffer.

7. The fabrication system of claim 6 , further comprising:
a first carrier on the first rail, wherein the first carrier is located in the first service area;
a second carrier on the first rail, wherein the second carrier is located in the second service area;
a third carrier on the second rail, wherein the third carrier is located in the first service area; and
a fourth carrier on the second rail, wherein the fourth carrier is located in the second service area.

8. The fabrication system of claim 1 , wherein:
the empty pod buffer is located at an overhead region.

9. The fabrication system of claim 1 , wherein:
the empty pod buffer is located at the first buffer.

10. A system comprising:
a plurality of stockers configured to store reticles, wherein the stockers are located in a first region comprising:
a first transportation system configured to move the reticles between different stockers;

a plurality of lithography apparatuses in a second region, wherein the second region is connected to the first transportation system through a first buffer;
a second transportation system in the second region, wherein the second transportation system is connected to the first buffer and the plurality of lithography apparatuses, wherein the second transportation system comprises:
a first service area configured to serve a first group of lithography apparatuses;
a second service area configured to serve a second group of lithography apparatuses; and
an internal buffer located a boundary between the first service area and the second service area;
an aisle, wherein a first terminal of the aisle is connected to the first buffer;
a first rail coupled between the first buffer and a first group of lithography apparatuses;
a second rail coupled between the first buffer and a second group of lithography apparatuses, wherein the first group of lithography apparatuses and the second group of lithography apparatuses are on opposite sides of the aisle;
a second buffer connected to a second terminal of the aisle; and

an empty pod buffer.

11. The system of claim 10 , wherein:
the first system is a global system configured to carry long distance transportation.

12. The system of claim 10 , wherein:
the second system is a local system.

13. The system of claim 10 , wherein:
the internal buffer is an adjustable buffer.

14. The system of claim 10 , wherein:
the lithography apparatus is a scanner.

15. A system comprising:
a global system comprising a main aisle, a plurality of stockers placed along the main aisle and a global transportation system connected to the plurality of stockers; and
a local system connected to the global system through the global transportation system, wherein the local system comprises:
a first buffer located at a boundary between the global system and the local system;
a local transportation system having a first terminal connected to the first buffer;
a plurality of lithography apparatuses connected to the local transportation system;
a second buffer connected to a second terminal of the local transportation system; and
a local aisle in the local system, wherein the lithography apparatuses include a first group placed on a first side of the local aisle and a second group placed on a second side of the local aisle, and wherein the local transportation system includes a first rail and a second rail in parallel, and wherein the first rail provides transportation for the first group and the second rail provides transportation for the second group.

16. The system of claim 15 , wherein:
the local system comprises a first service area and a second service area, and wherein the first service area and the second service area are separated by an internal buffer.

17. The system of claim 16 , wherein:
the first service area is configured to serve a first group of lithography apparatuses, and wherein the number of lithography apparatuses in the first group is adjustable by placing the internal buffer at a different position.

Assignees

• Taiwan Semiconductor Mfg

Inventors

• Chang Ching-Jung

Classifications

• H10P72/3404

  Storage means · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• H10P72/3221 Primary

  Overhead conveying · CPC title

• H10P72/3216

  using a general scheme of a conveying path within a factory · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title