Transversely-excited film bulk acoustic resonator with a back-side dielectric layer
US-2024396526-A1 · Nov 28, 2024 · US
US9281798B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9281798-B2 |
| Application number | US-201113173219-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 30, 2011 |
| Priority date | Jul 6, 2010 |
| Publication date | Mar 8, 2016 |
| Grant date | Mar 8, 2016 |
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A device comprises at the input a first component (PA) having a first output impedance (Z 1 ), at the output a second component (ANT) having a second input impedance (Z 2 ), and an impedance-matching network between said first and second components. Because the first and/or the second impedance vary/varies, said impedance-matching network comprises a filter (F adp ), with an impedance that is matchable to the first and second impedances, located between said first and second components and comprising at least two acoustic wave coupled resonators. At least one of the resonators comprises a perovskite type material and means for applying a voltage to said resonator, which enable the permittivity and the impedance thereof to be varied.
Opening claim text (preview).
The invention claimed is: 1. A device comprising: at the input a first component (PA) having a first output impedance (Z 1 ), at the output a second component (ANT) having a second input impedance (Z 2 ), and a variable acoustic filter between said first and second components configured to account for a variation in the first output or the second input impedance, said variable acoustic filter includes: a sensor directly coupled to the first output and arranged between the first component and the second component, said sensor configured to sense a mismatch between the first output and the second input impedances, and a filter (F adp ), with an impedance that is matchable to the first output and the second input impedances based upon the sensed mismatch between the first output and the second input impedances, said filter located between said first and second components and comprising a set of resonators connected in a ladder or a lattice structure, at least one of the resonators comprising a perovskite type material and means for applying a voltage to said resonator so as to vary the permittivity and the impedance thereof, wherein the means for applying a voltage are set to a voltage range in which a frequency passband of said impedance-matching filter is substantially stable, the variability of the impedance of said at least one of the resonators provides the matching of the filter impedance. 2. The device according to claim 1 , in which the filter comprises bulk wave resonators. 3. The device according to claim 2 , in which the filter comprises FBAR bulk wave resonators comprising a multilayer comprising at least one supporting membrane and a layer of perovskite type material. 4. The device according to claim 2 , in which the filter comprises SMR bulk wave resonators comprising at least one acoustic reflector and a layer of perovskite type material. 5. The device according to claim 1 , in which each resonator comprises a perovskite type material. 6. The device according to claim 1 , in which the perovskite type material is based on barium strontium titanate (BST). 7. The device according to claim 1 , in which said variable acoustic filter furthermore comprises additional impedance elements. 8. The device according to claim 1 , in which the second component is an antenna. 9. The device according to claim 1 , in which the first component is an amplifier. 10. The device according to claim 1 , in which the first or the second component having a variable impedance is a transistor. 11. The device according to claim 1 , including in a radio-frequency transmitter or receiver in which the first component is an amplifier (PA), the second component being an antenna (ANT). 12. The device according to claim 1 , in which the means for applying a voltage are set to a voltage range in which the frequency passband of said impedance-matching filter is substantially stable.
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