Grazing and normal incidence interferometer having common reference surface

Patent metadata

Field	Value
Publication number	US-9273952-B2
Application number	US-201414338091-A
Country	US
Kind code	B2
Filing date	Jul 22, 2014
Priority date	Jun 18, 1999
Publication date	Mar 1, 2016
Grant date	Mar 1, 2016

Abstract

A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface and a reflective surface for each channel of the light beam. Two channels and two reflective surfaces are preferably employed, and the wavefronts are combined using a second diffraction grating and passed to a camera system having a desired aspect ratio. The system preferably comprises a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes means for stitching scans together, providing for smaller and less expensive optical elements.

First claim

What is claimed is:

1. A method for measuring specimen thickness variations in a specimen, the method comprising:
receiving variable coherence light energy;
forming diffracted light energy;
passing the diffracted light energy toward said specimen and toward a plurality of reflective surfaces, the plurality of reflective surfaces comprising a semi-transparent reflective surface transparent through a first side and less than 90 percent reflective on a second side; and
performing an interferometric normal incidence inspection through the semi-transparent reflective surface.

2. The method of claim 1 , wherein forming diffracted light energy comprises diffracting the variable coherence light energy such that the passing the diffracted light energy passes diffracted nonzero order light energy.

3. The method of claim 2 , further comprising blocking passage of diffracted zero order light energy.

4. The method of claim 1 , further comprising receiving light energy from said plurality of reflective surfaces at a diffraction grating.

5. The method of claim 1 , further comprising receiving light energy from the plurality of reflective surfaces and the specimen at a sensor.

6. The method of claim 1 , further comprising sensing using a sensor comprising at least one camera, wherein each camera converts an elliptical image of at least one side of said specimen into an image having an aspect ratio closer to 1:1.

7. The method of claim 4 , further comprising collimating variable coherence light energy and further collimating light energy received from said diffraction grating.

8. The method of claim 1 , wherein said receiving comprises:
passing nonzero order light energy toward at least one reflective surface and said specimen; and
simultaneously blocking zero order light energy.

9. The method of claim 1 , wherein the interferometric normal incidence inspection employs a collimator.

10. The method of claim 9 , wherein said interferometric normal incidence inspection comprises emitting light toward a beamsplitter and the collimator.

11. The method of claim 1 , further comprising optimizing diffracting for zero intensity of a zero order.

12. A method for measuring thickness variations of a specimen, comprising:
diffracting variable coherence light energy into multiple channels of light energy;
directing said multiple channels of light energy toward two sides of said specimen and toward multiple reflecting surfaces comprising a semi-transparent reflecting surface transparent through a first side and less than 90 percent reflective on a second side; and
performing an interferometric normal incidence inspection of the specimen through the semi-transparent reflecting surface.

13. The method of claim 12 , wherein said diffracting comprises diffracting for zero intensity of the zero order of the multiple channels of light energy received.

14. The method of claim 12 , further comprising performing an initial calibration.

15. The method of claim 12 , wherein performing the interferometric normal incidence inspection on the specimen occurs prior to said diffracting.

16. The method of claim 12 , wherein performing the interferometric normal incidence inspection of the specimen occurs after sensing light energy received from the two sides of the specimen.

17. The method of claim 12 , further comprising receiving light energy from the two sides of the specimen and forming an image, wherein said directing comprises altering an image aspect ratio.

18. A specimen thickness measurement apparatus, comprising:
means for diffracting variable coherence light energy toward a specimen;
means for receiving light energy from said means for diffracting, said means for receiving comprising a semi-transparent reflecting surface transparent through a first side and less than 90 percent reflective on a second side; and
means for performing an interferometric normal incidence inspection of the specimen through the semi-transparent surface;
wherein said means for diffracting directs energy simultaneously toward one reflecting surface and one side of the specimen.

19. The apparatus of claim 18 , further comprising means for sensing light energy received from the means for receiving to determine thickness variations in said specimen.

20. The method of claim 18 , further comprising means for blocking zero order light energy received from said diffracting.

Assignees

• Kla Tencor Corp

Inventors

• Mueller Dieter
• Schierle Rainer
• Kavaldjiev Daniel Ivanov

Classifications

• G01B11/0675

  using interferometry · CPC title

• G01B2290/30

  Grating as beam-splitter · CPC title

• G01N21/9501

  Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20) · CPC title

• G01B9/02021

  contacting different faces of object, e.g. opposite faces · CPC title

• G01B11/06 Primary

  for measuring thickness {; e.g. of sheet material (thickness measurement by thermal means G01B21/085)} · CPC title