Sticking apparatus and sticking method

Patent metadata

Field	Value
Publication number	US-9272494-B2
Application number	US-201414270024-A
Country	US
Kind code	B2
Filing date	May 5, 2014
Priority date	May 8, 2013
Publication date	Mar 1, 2016
Grant date	Mar 1, 2016

Abstract

A sticking apparatus including a pair of plate members sandwiching a laminate between the pair of plate members, and supporting members supporting the plate members. The supporting members supporting at least one of the plate members are located in a form of multiple dots or lines adjacent to each other at regular intervals on the plate member.

First claim

What is claimed is:

1. A sticking apparatus for manufacturing a laminate which is formed by laminating a substrate, an adhesive layer, and a support in this order by sticking the substrate and the support to each other through the adhesive layer, the sticking apparatus comprising:
a pair of plate members which sandwiches the laminate therebetween, wherein the pair of plate members includes respective press plates, each of which is formed of ceramic, wherein mutually facing surfaces of the respective press plates are formed such that flatness at a time of non-pressing is less than or equal to 1.0 μm; and
supporting members which support the plate members,
wherein the supporting member supporting at least one of the plate members is located in a form of a plurality of dots or lines adjacent to each other at regular intervals on the plate member.

2. The sticking apparatus according to claim 1 , wherein the supporting member is provided in a plurality so as to be adjacent to each other at regular intervals.

3. The sticking apparatus according to claim 2 , wherein the plurality of supporting members are provided in the vicinity of an outer peripheral portion of the plate member in a circular pattern so as to be adjacent to each other at regular intervals of 120°, 90°, 72°, 60° or 45°.

4. The sticking apparatus according to claim 3 , wherein a supporting member is further provided at a center point of the circle.

5. The sticking apparatus according to claim 2 , wherein the supporting member is provided with an adjusting member for pressure adjustment.

6. The sticking apparatus according to claim 2 , wherein the supporting member is provided at a position distant from a center point of the plate member in a radial direction in a range of greater than or equal to 65% of a radius and less than or equal to 95% of the radius.

7. A sticking method for manufacturing a laminate which is formed by laminating a substrate, an adhesive layer, and a support in this order by sticking the substrate and the support to each other through the adhesive layer, the sticking method comprising:
supporting at least one plate member of a pair of plate members sandwiching the laminate therebetween by supporting members located in a form of a plurality of dots or lines adjacent to each other at regular intervals on the plate member, and pressing the plate members by the supporting members when sticking the substrate and the support to each other, wherein the pair of plate members includes respective press plates, each of which is formed of ceramic, wherein mutually facing surfaces of the respective press plates are formed such that flatness at a time of non-pressing is less than or equal to 1.0 μm.

8. The sticking method according to claim 7 , wherein pressing forces of the supporting members pressing the plate members are adjusted such that a pressing force which is applied to the laminate becomes uniform.

9. The sticking method according to claim 8 , wherein the difference between the maximum value and the minimum value of the pressure distribution of the pressing force which is applied to the pair of plate members be adjusted into a range of less than or equal to 700 kPa.

Assignees

• Tokyo Ohka Kogyo Co Ltd

Inventors

• Nakamura Akihiko
• Inao Yoshihiro
• Kato Shigeru

Classifications

• B32B37/06

  characterised by the heating method · CPC title

• B32B2457/14

  Semiconductor wafers · CPC title

• B30B15/064

  with heating or cooling means · CPC title

• B32B37/0046

  characterised by constructional aspects of the apparatus · CPC title

• B32B37/10 Primary

  characterised by the pressing technique, e.g. using action of vacuum or fluid pressure · CPC title