Methods and apparatus for hybrid MOS capacitors in replacement gate process

Patent metadata

Field	Value
Publication number	US-9269833-B2
Application number	US-201113303096-A
Country	US
Kind code	B2
Filing date	Nov 22, 2011
Priority date	Nov 22, 2011
Publication date	Feb 23, 2016
Grant date	Feb 23, 2016

Abstract

Methods and apparatus for hybrid MOS capacitors in replacement gate process. A method is disclosed including patterning a gate dielectric layer and a polysilicon gate layer to form a polysilicon gate region over a substrate; forming an inter-level dielectric layer over the substrate and surrounding the polysilicon gate region; defining polysilicon resistor regions each containing at least one portion of the polysilicon gate region and not containing at least one other portion of the polysilicon gate region, forming dummy gate regions removing the dummy gate regions and the gate dielectric layer underneath the dummy gate regions to leave trenches; and forming high-k metal gate devices in the trenches. A capacitor region including a high-k metal gate and a polysilicon gate next to the high-k metal gate is disclosed. Additional hybrid capacitor apparatuses are disclosed.

First claim

What is claimed is:

1. A capacitor comprising:
a metal gate over a semiconductor substrate, the high-k metal gate comprising a first top surface distal the semiconductor substrate and a first bottom surface proximate the semiconductor substrate;
a polysilicon gate laterally adjoining the metal gate, the polysilicon gate comprising a second top surface distal the semiconductor substrate and a second bottom surface proximal the semiconductor substrate, the first top surface and the second top surface being substantially coplanar, and the first bottom surface and the second bottom surface being substantially coplanar; an overlying conductor coupling the metal gate and the polysilicon gate together to form an upper plate conductor for the capacitor; and a plurality of vias coupling the overlying conductor and the polysilicon gate.

2. The capacitor of claim 1 , wherein the polysilicon gate further comprises a gate dielectric over the semiconductor substrate, the gate dielectric being a portion of a capacitor dielectric beneath the polysilicon gate.

3. The capacitor of claim 2 , wherein the gate dielectric comprises silicon oxynitride.

4. The capacitor of claim 2 , wherein the polysilicon gate is doped to form a polysilicon resistor.

5. The capacitor of claim 1 , wherein the metal gate further comprises:
a high-k gate dielectric disposed over the semiconductor substrate; and
a metal gate on the high-k gate dielectric.

6. The capacitor of claim 5 , wherein the high-k gate dielectric comprises hafnium.

7. The capacitor of claim 5 , wherein the metal gate comprises titanium.

8. The capacitor of claim 1 further comprising a conductive region in the semiconductor substrate beneath the metal gate and the polysilicon gate forming a bottom plate for the capacitor.

9. A semiconductor device, comprising:
a capacitor region over a semiconductor substrate, the capacitor region comprising:
a first metal gate over the semiconductor substrate;
a high-k gate dielectric material underlying and contacting the first metal gate;
a polysilicon gate over the semiconductor substrate laterally adjacent and contacting a sidewall of the first metal gate;
a gate dielectric material underlying and contacting the polysilicon gate; and
an overlying metal conductor coupling the first metal gate to the polysilicon gate to form an upper plate conductor for a capacitor; and

a logic region comprising a second metal gate over the semiconductor substrate.

10. The semiconductor device of claim 9 , wherein the gate dielectric material comprises silicon oxynitride.

11. The semiconductor device of claim 9 , wherein the high-k gate dielectric material comprises hafnium.

12. The semiconductor device of claim 9 , wherein the high-k gate dielectric material contacts the semiconductor substrate.

13. The semiconductor device of claim 9 , wherein the gate dielectric material contacts the semiconductor substrate.

14. A semiconductor device comprising:
a semiconductor substrate, a portion of the semiconductor substrate comprising a bottom capacitor plate;
a high-k dielectric over the portion of the semiconductor substrate;
a metal gate on the high-k dielectric;
a gate dielectric over the portion of the semiconductor substrate, the gate dielectric being laterally adjacent the high-k dielectric;
a polysilicon gate on the gate dielectric, the polysilicon gate being laterally adjacent the metal gate;
a second polysilicon gate, wherein the metal gate is interjacent the polysilicon gate and the second polysilicon gate in a plane that is substantially parallel to a major surface of the semiconductor substrate; and an overlying metal conductor coupling the metal gate to the polysilicon gate and the second polysilicon gate to form an upper capacitor plate.

15. The semiconductor device of claim 14 further comprising an interlayer dielectric layer adjacent the polysilicon gate.

16. The semiconductor device of claim 14 , wherein the bottom capacitor plate is common to the polysilicon gate, the second polysilicon gate, and the metal gate.

17. The semiconductor device of claim 14 further comprising a second metal gate, wherein the second polysilicon gate is interjacent the metal gate and the second metal gate in a plane that is substantially parallel to the major surface of the semiconductor substrate.

18. The semiconductor device of claim 14 wherein the polysilicon gate and the second polysilicon gate are spaced apart by a polysilicon-to-polysilicon minimum distance.

Assignees

• Wang Pai-Chieh
• Hsieh Tung-Heng
• Huang Yimin
• Taiwan Semiconductor Mfg

Inventors

• Wang Pai-Chieh
• Hsieh Tung-Heng
• Huang Yimin

Classifications

• H10D84/813

  Combinations of field-effect devices and capacitor only · CPC title

• H10D84/817

  Combinations of field-effect devices and resistors only · CPC title

• H10D84/811

  Combinations of field-effect devices and one or more diodes, capacitors or resistors · CPC title

• H10D84/217

  of only conductor-insulator-semiconductor capacitors · CPC title

• H10D1/47

  Resistors having no potential barriers · CPC title