Filament lamp for heating

Patent metadata

Field	Value
Publication number	US-9265091-B2
Application number	US-201313952153-A
Country	US
Kind code	B2
Filing date	Jul 26, 2013
Priority date	Oct 1, 2012
Publication date	Feb 16, 2016
Grant date	Feb 16, 2016

Abstract

Disclosed herein are a filament lamp for heating a disk-shaped workpiece in such a way that the filament lamp rotates relative to the workpiece and radiates light thereonto. Further, the present invention provides a structure that enables the filament lamps to uniformly heat the workpiece even with respect to the radial direction of the workpiece. For this, the filament lamp includes an arc-shaped emitting part which extends in a circumferential direction of the relative rotation, and an auxiliary emitting part which is disposed inside a circle extending along the arc-shaped emitting part and extends from the arc-shaped emitting part in a direction crossing the circle. In addition, the present invention is configured such that areas of the workpiece that correspond to spaces between the arc-shaped emitting parts of the adjacent filament lamps pass just below the corresponding auxiliary emitting parts.

First claim

What is claimed is:

1. A filament lamp for heating a disk-shaped workpiece in such a way that the filament lamp radiates light onto the disk-shaped workpiece while the filament lamp and the disk-shaped workpiece rotate relative to each other, the filament lamp comprising:
an arc-shaped emitting part extending in a circumferential direction of the relative rotation; and
an auxiliary emitting part disposed inside a circle extending along the arc-shaped emitting part and extending from the arc-shaped emitting part in a direction crossing the circle.

2. The filament lamp as set forth in claim 1 , wherein the auxiliary emitting part has a linear shape.

3. The filament lamp as set forth in claim 1 , wherein the auxiliary emitting part is provided in a medial portion of the arc-shaped emitting part.

4. The filament lamp as set forth in claim 2 , wherein the auxiliary emitting part is provided in a medial portion of the arc-shaped emitting part.

5. The filament lamp as set forth in claim 1 , wherein the auxiliary emitting part is integrally connected to an end of the arc-shaped emitting part.

6. The filament lamp as set forth in claim 2 , wherein the auxiliary emitting part is integrally connected to an end of the arc-shaped emitting part.

7. The filament lamp as set forth in claim 1 , wherein the arc-shaped emitting part and the auxiliary emitting part are integrally formed to be round.

8. The filament lamp as set forth in claim 2 , wherein the arc-shaped emitting part and the auxiliary emitting part are integrally formed to be round.

Assignees

• Ushio Electric Inc

Inventors

• Ueshima Yukio

Classifications

• H10P72/0436 Primary

  mainly by radiation · CPC title

• F21S2/005

  of modular construction · CPC title

• H05B3/0033 Primary

  Heating devices using lamps · CPC title

• H05B3/0047

  for semiconductor manufacture · CPC title

• H01L21/67115

  Electricity · mapped topic