Information processing apparatus, processing system, processing method, and program

Patent metadata

Field	Value
Publication number	US-9256221-B2
Application number	US-201314040783-A
Country	US
Kind code	B2
Filing date	Sep 30, 2013
Priority date	Mar 29, 2011
Publication date	Feb 9, 2016
Grant date	Feb 9, 2016

Abstract

An information processing apparatus for processing information on semiconductor treatment apparatus includes an abnormality information display device which displays information on an abnormality in semiconductor treatment apparatus, a countermeasure information receiving device which receives countermeasure information on countermeasure, a countermeasure information storing device which stores the countermeasure information matched with abnormality identification information, an output device which outputs the countermeasure and abnormality identification information via communication device to outside, a countermeasure item display device which displays countermeasure item candidates, a countermeasure item storing device which stores countermeasure item selected from the candidates matched with the abnormality identification information, a countermeasure item transmitting device which transmits the countermeasure item and abnormality identification information via the communication device to outside, a countermeasure item statistic receiving device which receives statistic regarding the countermeasure item corresponding to the abnormality identification information from outside, and a countermeasure item statistic display device which displays the statistic.

First claim

What is claimed is:

1. An information processing apparatus for processing information on a semiconductor treatment apparatus, comprising:
an abnormality information display device configured to display information on an abnormality when the abnormality occurs in a semiconductor treatment apparatus;
a countermeasure information receiving device configured to receive countermeasure information on a countermeasure to the abnormality;
a countermeasure information storing device configured to store the countermeasure information such that the countermeasure information is matched with abnormality identification information for identifying the abnormality;
an output device configured to output the countermeasure information and the abnormality identification information stored in the countermeasure information storing device via a communication device to the outside;
a countermeasure item display device configured to display a plurality of countermeasure item candidates when the abnormality occurs;
a countermeasure item storing device configured to store a countermeasure item selected from the plurality of countermeasure item candidates displayed on the countermeasure item display device such that the countermeasure item is matched with the abnormality identification information;
a countermeasure item transmitting device configured to transmit the countermeasure item and the abnormality identification information stored in the countermeasure item storing device via the communication device to the outside;
a countermeasure item statistic receiving device configured to receive a statistic regarding the countermeasure item corresponding to the abnormality identification information transmitted from the outside; and
a countermeasure item statistic display device configured to display the statistic regarding the countermeasure item for the abnormality identification information received by the countermeasure item statistic receiving device when the abnormality occurs.

2. The information processing apparatus according to claim 1 , further comprising:
a countermeasure information acquiring device configured to acquire the countermeasure information corresponding to the abnormality identification information when the abnormality occurs; and
a countermeasure information display device configured to display the countermeasure information corresponding to the abnormality identification information obtained by the countermeasure information acquiring device.

3. The information processing apparatus according to claim 2 , wherein the countermeasure information acquiring device has an abnormality identification information transmitting device configured to transmit the abnormality identification information to the outside via the communication device when the abnormality occurs, and a countermeasure information receiving device configured to receive the countermeasure information corresponding to the abnormality identification information transmitted from the outside.

4. The information processing apparatus according to claim 3 , further comprising:
a cause-of-abnormality display device configured to display a plurality of cause-of-abnormality candidates;
a cause-of-abnormality storing device configured to store a cause of abnormality selected from the plurality of cause-of-abnormality candidates displayed on the cause-of-abnormality display device such that the cause of abnormality is matched with the abnormality identification information; and
a cause-of-abnormality transmitting device configured to transmit the cause of abnormality and the abnormality identification information stored in the cause-of-abnormality storing device to the outside via the communication device.

5. The information processing apparatus according to claim 4 , further comprising:
a cause-of-abnormality statistic receiving device configured to receive a statistic of the cause of abnormality corresponding to the abnormality identification information; and
a cause-of-abnormality statistic display device configured to display the statistic of the cause of abnormality corresponding to the abnormality identification information received by the cause-of-abnormality statistic receiving device when the abnormality occurs.

6. The information processing apparatus according to claim 5 , wherein the statistic regarding the cause of abnormality corresponding to the abnormality identification information includes a count or a percentage of a plurality of causes of abnormality corresponding to the abnormality identification information, and the cause-of-abnormality statistic display device is configured to display the plurality of causes of abnormality corresponding to the abnormality identification information received by the cause-of-abnormality statistic receiving device when the abnormality occurs and to display the count or percentage of each of the causes of abnormality in a descending order.

7. The information processing apparatus according to claim 1 , wherein the countermeasure information receiving device is configured to receive the countermeasure information and preservation period information of the countermeasure information, and the output device is configured to output the abnormality identification information, the countermeasure information, and the preservation period information stored in the countermeasure information storing device to at least one other computer.

8. The information processing apparatus according to claim 1 , further comprising a countermeasure information acquiring device configured to acquire the countermeasure information corresponding to the abnormality identification information when the abnormality occurs.

9. The information processing apparatus according to claim 8 , wherein the countermeasure information acquiring device has an abnormality identification information transmitting device configured to transmit the abnormality identification information to the outside via the communication device when the abnormality occurs, and a countermeasure information receiving device configured to receive the countermeasure information corresponding to the abnormality identification information transmitted from the outside.

10. A semiconductor treatment system, comprising:
a semiconductor treatment apparatus;
a plurality of information processing apparatuses for processing information on the semiconductor treatment apparatus; and
a server computer connected to the plurality of information processing apparatuses via a communication network,
wherein the plurality of information processing apparatuses includes a first information processing apparatus and a second information processing apparatus, the first information processing apparatus has an abnormality information display device configured to display information on an abnormality when the abnormality occurs in the semiconductor treatment apparatus, a countermeasure information receiving device configured to receive countermeasure information regarding a countermeasure for the abnormality, a countermeasure information storing device configured to store the countermeasure information such that the countermeasure information is matched with abnormality identification information for identifying the abnormality, an output device configured to output the countermeasure information and the abnormality identification information stored in the countermeasure information storing device to the server computer via the communication network, a countermeasure item display device configured to display a plurality of countermeasure item candidates when the abnormality occurs, a countermeasure item storing device configured to store a countermeasure item selected from the plurality of countermeasure

Assignees

• Tokyo Electron Ltd

Inventors

• Araki Shinichiro
• Matsuda Katsuhiko
• Okada Kiminori
• Ito Taichi
• Nakajima Susumu
• Horiuchi Nobuhiro

Classifications

• G05B19/41875 Primary

  characterised by quality surveillance of production · CPC title

• G06F11/30 Primary

  Monitoring · CPC title

• G05B19/4184 Primary

  characterised by fault tolerance, reliability of production system · CPC title

• G06F11/34

  Recording or statistical evaluation of computer activity, e.g. of down time, of input/output operation {; Recording or statistical evaluation of user activity, e.g. usability assessment} · CPC title

• G06F11/32

  with visual {or acoustical} indication of the functioning of the machine · CPC title