Digital microfluidic devices and methods employing integrated nanostructured electrodeposited electrodes
US-2015377831-A1 · Dec 31, 2015 · US
US9254485B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9254485-B2 |
| Application number | US-201514621987-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 13, 2015 |
| Priority date | Dec 17, 2012 |
| Publication date | Feb 9, 2016 |
| Grant date | Feb 9, 2016 |
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An integrated semiconductor device for manipulating and processing bio-entity samples is disclosed. The device includes a microfluidic channel formed between a first substrate and a second substrate and a microfluidic grid formed over the first substrate and coupled to the microfluidic channel to manipulate a droplet within the microfluidic channel. The device further includes a magnetic field generation device included in the microfluidic grid and fluidic control circuitry coupled to the magnetic device to facilitate control of the magnetic field generation device to manipulate the droplet, when the droplet contains at least one magnetic bead, within the microfluidic channel.
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What is claimed is: 1. A device comprising: a microfluidic channel formed between a first substrate and a second substrate configured to receive a droplet therein; a microfluidic grid formed over the first substrate and coupled to the microfluidic channel, the microfluidic grid comprising a plurality of electrodes; a magnetic field generation device included in the microfluidic grid, wherein the magnetic field generation device is positioned within an opening in one of the plurality of electrodes; and fluidic control circuitry coupled to the magnetic field generation device to facilitate control of the magnetic field generation device to manipulate the droplet when the droplet is present and contains at least one magnetic tag within the microfluidic channel. 2. The device of claim 1 , wherein the microfluidic channel is separated from the plurality of electrodes by a planar surface of a hydrophobic coating. 3. The device of claim 2 , wherein the magnetic field generation device is formed in a material layer that includes the plurality of electrodes. 4. The device of claim 3 , wherein the fluidic control circuitry is configured to activate the magnetic field generation device independently of the one of the plurality of electrodes. 5. The device of claim 1 , further comprising a photosensor array formed in the first substrate, and wherein the magnetic field generation device is aligned with the photosensor array. 6. The device of claim 1 wherein the magnetic field generation device produces a magnetic field within the magnetic field generation device that is parallel to the microfluidic channel. 7. The device of claim 1 , wherein the magnetic field generation device comprises a core, the core being formed from a first material that is more magnetic than a second material from which the magnetic field generation device is formed. 8. An integrated semiconductor device for manipulating and processing bio-entity samples, the device comprising: a microfluidic channel formed between a first substrate and a second substrate and configured to receive a sample droplet; a microfluidic grid formed over the first substrate and coupled to the microfluidic channel to manipulate the sample droplet within the microfluidic channel, the microfluidic grid comprising a plurality of electrodes and a first magnetic field generation device positioned along the microfluidic channel, wherein the first magnetic field generation device is surrounded by a first electrode of the plurality of electrodes; and fluidic control circuitry coupled to the magnetic field generation device and the plurality of electrodes to facilitate control of the magnetic field generation device to manipulate the sample droplet, when the sample droplet contains at least one magnetic bead within the microfluidic channel. 9. The integrated semiconductor device of claim 8 , wherein a bottom surface of the microfluidic channel over formed on the first substrate and a top surface of the microfluidic channel is formed over a second substrate, the second substrate being coupled to the first substrate so as to provide the microfluidic channel, and wherein the bottom surface and the top surface of the microfluidic channel have a hydrophobic coating. 10. The integrated semiconductor device of claim 9 , wherein the hydrophobic coating of the bottom surface and the hydrophobic coating of the top surface are planar throughout the microfluidic channel. 11. The integrated semiconductor device of claim 8 , further comprising a second magnetic field generation device included in the microfluidic grid. 12. The integrated semiconductor device of claim 8 , wherein the fluidic control circuitry coupled to the magnetic field generation device is configured to control a duration of the magnetic field generated by the magnetic field generation device. 13. A method for manipulating and processing bio-entity samples with an integrated semiconductor device, the method comprising: transporting a bio-entity-containing sample droplet into a microfluidic channel using an electrowetting effect, the sample droplet comprising a plurality of magnetic beads, wherein one side of the microfluidic channel is provided on a first substrate; generating a magnetic field using a magnetic field generation device positioned along the microfluidic channel and within an opening in one of a plurality of electrodes included in the microfluidic channel, the magnetic field attracting the magnetic beads to a first side of the sample droplet; and activating a first electrode and a second electrode positioned along the microfluidic channel to split the sample droplet into a higher concentration droplet and a lower concentration droplet the higher concentration droplet comprising more magnetic beads than the lower concentration droplet. 14. The method of claim 13 , further comprising: providing the plurality of magnetic beads from a second reservoir coupled to a microfluidic grid by the microfluidic channel; and mixing the sample droplet and the plurality of magnetic beads in the microfluidic grid to form a prepared sample droplet, such that the magnetic beads behind with bio-entities contained in the sample droplet. 15. The method of claim 13 , wherein the sample droplet further comprises another plurality of magnetic beads, and wherein the plurality of magnetic beads comprises magnetic beads of a first size and the other plurality of magnetic beads comprises magnetic beads of a second size, wherein the first size is different from the second size. 16. The method of claim 13 , wherein the sample droplet further comprises another plurality of magnetic beads, wherein the plurality of magnetic beads is formed from a first material and the other plurality of magnetic beads is formed from a second material. 17. The method of claim 16 , wherein activating the first electrode and the second electrode positioned along the microfluidic channel to split the droplet splits the droplet such that the lower concentration droplet has a lower concentration of magnetic beads of a first size and a higher concentration of the magnetic beads of a second size. 18. The method of claim 13 , further comprising generating another magnetic field using another magnetic field generation device positioned along the microfluidic channel, and wherein: the magnetic field is generated for a first duration; and the other magnetic field is generated for a second duration. 19. The method of claim 13 , wherein providing a bio-entity sample droplet from a first reservoir comprises providing a pre-treated bio-entity sample droplet, the pre-treated bio-entity sample droplet comprising the plurality of magnetic beads. 20. The method of claim 13 , further comprising generating another magnetic field using another magnetic field generation device positioned along the microfluidic channel; and wherein a magnitude of the magnetic field generated by the magnetic field generation device is greater than a magnitude of the other magnetic field generated by the other magnetic field generation device.
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