X-ray analyzer

Patent metadata

Field	Value
Publication number	US-9250201-B2
Application number	US-201214359436-A
Country	US
Kind code	B2
Filing date	Dec 5, 2012
Priority date	Dec 9, 2011
Publication date	Feb 2, 2016
Grant date	Feb 2, 2016

Abstract

The X-ray analyzer generates a spectrum of X-rays obtained from an area on a sample where the intensity of X-rays whose energy is not included in an already set-up ROI is high and then, from the generated spectrum, identifies a new element for which an ROI is not set up. Further, the X-ray analyzer sets an ROI corresponding to the identified element and then obtains element distribution. The X-ray analyzer repeats generation of an X-ray spectrum, identification of an element, setting of an ROI, and obtaining element distribution. This avoids unintended omission of setting of an ROI and hence permits as-much-as-possible coverage of the elements in the sample. Further, distribution of a trace element is allowed to be obtained rapidly.

First claim

The invention claimed is:

1. An X-ray analyzer, comprising:
a scanning unit for scanning a sample with a beam;
an X-ray detector for detecting X-rays generated on the sample by the scanning;
an element distribution obtaining unit for, from the detection result of the X-rays generated in an area on the sample scanned with the beam, obtaining intensity distribution of the X-rays whose energy or wavelength is included in a range of energy or wavelength set up in correspondence to an element contained in the sample and thereby obtaining distribution of the element;
an intensity distribution acquiring unit for acquiring intensity distribution of X-rays whose energy or wavelength is not included in the range;
an area specifying unit for specifying an area on the sample corresponding to a portion where the intensity of X-rays is not less than a predetermined intensity in the intensity distribution;
a spectrum generating unit for generating a spectrum of X-rays generated in the specified area on the sample;
an element identification unit for identifying an element contained in the sample on the basis of a peak included in the generated spectrum; and
a setting unit for setting a range of energy or wavelength of X-rays corresponding to the identified element,
wherein the element distribution obtaining unit obtains distribution of the element identified by the element identification means, in accordance with the range set by the setting means.

2. The X-ray analyzer according to claim 1 , further comprising
a display unit for displaying an image representing the distribution of the element at each time that the element distribution obtaining unit obtains the distribution.

3. The X-ray analyzer according to claim 1 ,
wherein the scanning unit scans the area specified by the area specifying unit with the beam,
the X-ray detector detects X-rays generated on the area scanned with the beam, and
the spectrum generating unit generates a spectrum of X-rays generated on the area on the basis of the detection result of the X-rays by the X-ray detector.

4. The X-ray analyzer according to claim 1 ,
wherein the spectrum generating unit generates a spectrum of X-rays whose energy or wavelength is not included in the already set range of energy or wavelength.

5. The X-ray analyzer according to claim 1 ,
wherein the element distribution obtaining unit, the intensity distribution acquiring unit, the area specifying unit, the spectrum generating unit, the element identification unit and the setting unit operates repetitively until distributions of elements of a predetermined number are obtained.

6. The X-ray analyzer according to claim 1 ,
wherein the beam is an electron beam.

7. The X-ray analyzer according to claim 1 ,
wherein the beam is an X-ray beam.

8. The X-ray analyzer according to claim 1 ,
wherein the area specifying unit specifies a portion, in the intensity distribution acquired by the intensity distribution acquiring unit, where the intensity of X-rays whose energy or wavelength is not included in the already set range is not less than a predetermined intensity and specifies an area on the sample corresponding to the specified portion.

9. The X-ray analyzer according to claim 1 ,
wherein the predetermined intensity is a constant value.

10. The X-ray analyzer according to claim 1 ,
wherein the predetermined intensity is a value obtained by averaging the intensity of X-rays included in the intensity distribution acquired by the intensity distribution acquiring unit.

11. The X-ray analyzer according to claim 6 , further comprising
a detector for detecting backscattered electrons,
wherein the area specifying unit specifies the area on the basis of the contrast in the intensity of backscattered electrons.

Assignees

• Horiba Ltd

Inventors

• Ohashi Satoshi

Classifications

• G01N2223/076

  X-ray fluorescence · CPC title

• G01N23/2252 Primary

  Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA] · CPC title

• G01N2223/418

  electron microscope · CPC title

• G01N23/223 Primary

  by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence · CPC title

• G01N2223/402

  mapping distribution of elements · CPC title