Method for manufacturing an electrochemical component comprising a lithium metal anode and an ion-conductive inorganic material layer
US-2024234676-A9 · Jul 11, 2024 · US
US9249503B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9249503-B2 |
| Application number | US-201213559094-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 26, 2012 |
| Priority date | Jul 29, 2011 |
| Publication date | Feb 2, 2016 |
| Grant date | Feb 2, 2016 |
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The film formation method comprises the steps of: unrolling and feeding an elongated substrate wound in a roll form from a first roll chamber in a first direction from the first roll chamber toward a second roll chamber, using a first surface as a surface for film formation; degassing the substrate fed in the first direction; forming a second material film on the first surface of the substrate in a second film formation chamber; taking up the substrate in a roll form in the second roll chamber, the substrate having the second material film formed thereon; unrolling and feeding the substrate from the second roll chamber in a second direction from the second roll chamber toward the first roll chamber; forming a first material film on the second material film in a first film formation chamber; taking up the substrate in a roll form in the first roll chamber.
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What is claimed is: 1. A method for continuously subjecting an elongated substrate to vacuum film formation, comprising the steps of: a) unrolling and feeding an elongated substrate wound in a roll form from a first roll chamber in a first direction from the first roll chamber toward a second roll chamber, using a first surface as a surface for film formation; b) degassing the substrate fed in the first direction; c) forming, in a second film formation chamber, a second materi…
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